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151.
A design of diode-pumped high-efficiency Nd:YVO4/LBO red laser is reported. Using critical phase-matching (CPM) LBO, 671 nm red laser was obtained from 1342 nm light by intracavity frequency doubling. With an incident pump laser of 800 mW, using type-I and type-II CPM LBO, 97 and 52 mWTEM00 mode red laser outputs were obtained, with optical-to-optical conversion efficiencies of up to 12.1% and 6.5%, respectively. 相似文献
152.
Laser Doppler vibrometer (LVD) has been the most favorite instrument for precision dynamics measurement due to its non-contact, high accuracy and high resolution. However, LDV can only give the dynamic data of a particular location on the entire feature. In order to get the whole field data, a laser beam-scanning mechanism has to be implemented. Currently, motor-driven scanning mirror is used to move the measurement probe from one point to another. The mechanical vibrations of the scanning mirror will reduce the measurement accuracy. This paper introduces a novel scanning LDV optical system embodied in an acousto-optic deflector scanning mechanism. It can improve the measurement accuracy since there is no mechanical motion involved. One main advantage of this system is that it generates a laser scanning beam in parallel that is different from the beam scanning in the conventional scanning laser Doppler vibrometer (SLDV). The new system has a board scanning range. The measurement target size ranges from few tens of millimeters down to 10 μm. We have demonstrated the capability of the novel system on scanning measurements of features as big as ultra-precision cutting tool to features as tiny as AFM cantilever. We believe that the novel SLDV will find profound potential applications in the precision engineering field. 相似文献
153.
Gabrielse G Bowden NS Oxley P Speck A Storry CH Tan JN Wessels M Grzonka D Oelert W Schepers G Sefzick T Walz J Pittner H Hänsch TW Hessels EA;ATRAP Collaboration 《Physical review letters》2002,89(23):233401
Cold antihydrogen is produced when antiprotons are repeatedly driven into collisions with cold positrons within a nested Penning trap. Efficient antihydrogen production takes place during many cycles of positron cooling of antiprotons. A first measurement of a distribution of antihydrogen states is made using a preionizing electric field between separated production and detection regions. Surviving antihydrogen is stripped in an ionization well that captures and stores the freed antiproton for background-free detection. 相似文献
154.
Gabrielse G Bowden NS Oxley P Speck A Storry CH Tan JN Wessels M Grzonka D Oelert W Schepers G Sefzick T Walz J Pittner H Hänsch TW Hessels EA 《Physical review letters》2002,89(21):213401
A background-free observation of cold antihydrogen atoms is made using field ionization followed by antiproton storage, a detection method that provides the first experimental information about antihydrogen atomic states. More antihydrogen atoms can be field ionized in an hour than all the antimatter atoms that have been previously reported, and the production rate per incident high energy antiproton is higher than ever observed. The high rate and the high Rydberg states suggest that the antihydrogen is formed via three-body recombination. 相似文献
155.
A chaotic synchronized system of two coupled skew tent maps is discussed in this paper. The locally and globally riddled basins of the chaotic synchronized attractor are studied. It is found that there is a novel phenomenon in the local-global riddling bifurcation of the attractive basin of the chaotic synchronized attractor in some specific coupling intervals. The coupling parameter corresponding to the locally riddled basin has a single value which is embedded in the coupling parameter interval corresponding to the globally riddled basin, just like a breakpoint. Also, there is no relation between this phenomenon and the form of the chaotic synchronized attractor. This phenomenon is found analytically. We also try to explain it in a physical sense. It may be that the chaotic synchronized attractor is in the critical state, as it is infinitely close to the boundary of its attractive basin. We conjecture that this isolated critical value phenomenon will be common in a system with a chaotic attractor in the critical state, in spite of the system being discrete or differential. 相似文献
156.
157.
K. Venkatakrishnan B.K.A. Ngoi P. Stanley L.E.N. Lim B. Tan N.R. Sivakumar 《Applied Physics A: Materials Science & Processing》2002,75(4):493-496
Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which
is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks
by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography.
In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side
laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning
of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size
and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side
laser writing.
Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001 相似文献
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建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献