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111.
在纳米印章技术中,为克服电子束刻蚀制备50nm以下线条的技术难点,利用等离子增强化学 气相沉积技术制备了a-Si/SiNx多层膜,再利用选择性湿法腐蚀或干法腐蚀在横 截面上制备出浮雕型一维纳米级模板. 多层膜子层之间界面清晰陡峭,可以在纳米量级对子 层厚度进行控制,得到了侧壁在纳米尺度上平滑的模板. 通过控制多层膜子层的生长时间, 制备出线条宽度和槽状宽度均为20nm的等间距模板,品质优于电子束刻蚀技术制备的模板.
关键词:
纳米印章模板
多层膜生长技术 相似文献
112.
Shao Su Xinpan Wei Yuanyuan Guo Yiling Zhong Yuanyuan Su Qing Huang Chunhai Fan Yao He 《Particle & Particle Systems Characterization》2013,30(4):326-331
A new kind of silicon nanowire (SiNWs)‐based nanoelectrode assembly, a gold‐nanoparticle‐decorated silicon nanowire array (AuNPs@SiNWsAr), is employed for the construction of high‐performance electrochemical sensors. Significantly, the electrochemical nanosensors are capable of sensitive detection of various electroactive molecules (e.g., dopamine (DA), ascorbic acid (AA), hydrogen peroxide (H2O2), and glucose). Further, DA molecules loaded on the surface of AuNPs@SiNWsAr preserve stable high electroactivity overnight without special protection, while free DA molecules may lose their biological activity due to severe oxidization in ambient environment. These findings may offer new opportunities for the design of high‐performance electrochemical nanosensors with high sensitivity and robust stability. 相似文献
113.
The detailed reaction pathway and coke formation mechanism over Pt/metal oxide nanoparticles during the steam reforming of ethanol(SRE) at 300℃were studied.The catalysts were prepared by incipient wetness impregnation method and were characterized with CO pulse chemisorption, BET surface measurement,oxygen adsorption,ethanol-TPD,NH3-TPD,and TPO.The SRE activity of the catalysts with steam/ethanol molar ratio of 3/1 was tested using a continuous fixed-bed reactor.Strong interaction between Pt and supports causes lower H2 production temperatures and no C2H4 formation,while weak interaction leads to C2H4 formation and strong bonded CO on Pt particles during ethanol-TPD. H2 production over Pt-based catalysts is mainly resulted from the decomposition and dehydrogenation of ethanol,and decarbonylation of acetaldehyde.Meanwhile,coke can be formed from acetaldehyde,acetone,C2H4 and CO.However,when the interaction between Pt and supports is weak,more coke is formed especially from acetone,C2H4 and CO.When the interaction is strong,no coke formation is observed due to high oxygen storage capacity of the catalyst. 相似文献
114.
The construction and characteristic performance of a PVC membrane electrode responsive for sodium dodecylsulfate (SDS) are described in this paper. The electrode based on CTA+DS? ion pair as ionophore in PVC membrane displays a Nernstian slope of ?58.8 ± 0.7 mV/decade in a 1.32 × 10?6 to 3.75 × 10?3 mol L?1 concentration range and a limit of detection of 1.13 × 10?6 mol L?1. The electrode can be used for 3 months without showing significant changes in the value of slope or working range. The electrode has been utilized as an end point indicator electrode for potentiometric titration involving Hyamine as titrant. More than 100 titrations were carried out for the evaluation of the electrode parameters: the standard deviations of the equivalent volume and the equivalent potential, the height of the potential jump and the number of faulty titrations. The behavior of the electrode was assessed with regard to their usefulness in routine analysis. 相似文献
115.
Laser-induced breakdown spectroscopy(LIBS) is used to determine the total nitrogen(TN) and total phosphorus(TP) in soil.Quantitative determinations are conducted using the line intensity of the analyte element and element concentration.Calibration models are obtained using ten samples for TN and seven samples for TP.The rest samples are used to validate the results.Strong linear correlations are obtained from the determined TN and TP concentrations.LIBS is a powerful tool for analyzing soil samples to determine nutrient elements by selecting calibration and validation samples with similar matrix composition. 相似文献
116.
Rhenium is a superconductor with a relatively weak tendency to oxidize, which is advantageous in superconducting quantum circuit and qubit applications. In this work, Re/A1-A1Ox/Re Josephson tunnel junctions were fabricated using a selective film-etching process similar to that developed in Nb trilayer technology. The Re films had a superconducting transition temperature of 4.8 K and a transition width of 0.2 K. The junctions were found to be highly reproducible using the fabrication process and their characteristics had good quality with a low leakage current and showed a superconducting gap of 0.55 meV. 相似文献
117.
报道位相型电控聚合物分散液晶(H-PDLC)全息衍射透镜的研制及特性研究,理论上,根据耦合波理论,研究了不同的相分离程度系数下,理想位相型电控聚合物分散液晶(H-PDLC)全息衍射透镜在可见光波长(400—800nm)的衍射特性.实验研制了衍射效率最高为70%的电控H-PDLC变焦透镜样品,研究表明H-PDLC透镜具有优良的成像特性,和快速响应的电控开关特性,在光学成像系统,光通信系统中具有良好的应用前景. 相似文献
118.
119.
A whole impulsive control scheme of nonlinear systems with time-varying delays, which is an extension for impulsive control of nonlinear systems without time delay, is presented in this paper. Utilizing the Lyapunov functions and the impulsive-type comparison principles, we establish a series of different conditions under which impulsively controlled nonlinear systems with time-varying delays are asymptotically stable. Then we estimate upper bounds of impulse interval and time-varying delays for asymptotically stable control. Finally a numerical example is given to illustrate the effectiveness of the method. 相似文献
120.