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991.
992.
Qi-Yue Shao Ai-Dong Li Jin-Bo Cheng Hui-Qin Ling Di Wu Zhi-Guo Liu Yong-Jun Bao Mu Wang Nai-Ben Ming Cathy Wang Hong-Wei Zhou Bich-Yen Nguyen 《Applied Surface Science》2005,250(1-4):14-20
LaAlO3 (LAO) is explored in this work to replace SiO2 as the gate dielectric material in metal–oxide–semiconductor field effect transistor. Amorphous LAO gate dielectric films were deposited on Si (0 0 1) substrates by low pressure metalorganic chemical vapor deposition using La(dpm)3 and Al(acac)3 sources. The effect of processing parameters such as deposition temperature and precursor vapor flux on growth, structure, morphology, and composition of LAO films has been investigated by various analytical methods deeply. The film growth mechanism on Si is reaction limiting instead of mass transport control. The reaction is thermally activated with activation energy of 37 kJ/mol. In the initial growth stage, Al element is deficient due to higher nucleation barrier on Si. The LAO films show a smooth surface and good thermal stability and remain amorphous up to a high temperature of 850 °C. The electrical properties of amorphous LAO ultrathin films on Si have also been evaluated, indicating LAO is suitable for high k gate dielectric applications. 相似文献
993.
The Li oxides species formed on Li over-deposited V2O5 thin film surfaces have been studied by using X-ray and UV induced photoelectron spectroscopy (XPS and UPS). The photoelectron spectroscopic data show that the Li over-deposited V2O5 system itself is not stable. Further chemical decomposition reactions are taken place even under UHV conditions and lead to form Li2O and Li2O2 compounds on the surface. The formation of Li2O2 causes to arise an emission line at about 11.3 eV in the valence band spectra. 相似文献
994.
Q.-Y. Shao A.-D. Li J.-B. Cheng H.-Q. Ling D. Wu Z.-G. Liu N.-B. Ming C. Wang H.-W. Zhou B.-Y. Nguyen 《Applied Physics A: Materials Science & Processing》2005,81(6):1181-1185
LaAlO3 (LAO) gate dielectric films were deposited on Si substrates by low-pressure metalorganic chemical vapor deposition. The interfacial structure and composition distribution were investigated by high-resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectroscopy (XPS), secondary-ion mass spectroscopy (SIMS), and Auger-electron spectroscopy (AES). HRTEM confirms that there exists an interfacial layer between LAO and Si in most samples. AES, SIMS, and XPS analyses indicate that the interfacial layer is compositionally graded La–Al silicate and the Al element is severely deficient close to the Si surface. Electrical properties of LAO films were evaluated. No evident difference in electrical properties between samples with and without native SiO2 layers was observed. The electrical properties are discussed in terms of LAO growth mechanisms, in relation to the interfacial structure. PACS 73.40.Qv; 81.15.Gh; 77.55.+f; 68.35.-p 相似文献
995.
研究了两个振子耦合的Henon-Heiles体系的周期轨迹与量子化问题.结果表明,周期轨迹的 作用量积分与体系的能量有着简单的线性关系.可以利用那些是整数值的周期轨迹的作用量 积分对不可积体系进行半经典量子化.由周期轨迹的物理内涵出发,揭示混沌体系的残余周 期轨迹具有与量子化有关的性质.这对于认识和理解经典力学与量子体系的联系关系及其物 理内涵有着深刻而重要的意义.
关键词:
周期轨迹
半经典量子化
混沌 相似文献
996.
997.
998.
将晶核析出的Avrami 方程应用于描述超大规模集成电路中金属Al薄膜互连电迁移过程中电阻的演变. 根据电子散射理论,晶界电阻主要起源于晶界处空位或者空洞对电子的散射. 为了描述这些离子的特征,引入了自由体积的概念,将晶界处电子散射这个复杂的过程简化用自由体积的有效散射截面来描述,从而建立了自由体积与电阻变化的定量关系,统一描述了电迁移过程中不同阶段的电阻变化. 数值模拟结果表明,在第一个空洞成核时刻电阻会发生急剧变化,这一结果已被实验所证实.
关键词:
电迁移
Al互连
电阻变化 相似文献
999.
High-resolution particle-image velocimetry (PIV) measurements are made in the streamwise-wall-normal plane of turbulent channel
flow at Reτ=566, 1184 and 1759, facilitating documentation of the population trends and core diameters of small-scale spanwise vortices.
Swirling strength, an unambiguous vortex-identification criterion and hence a local marker of rotation, is used to extract
small-scale spanwise vortex cores from the instantaneous velocity fields. Once the small-scale vortices are properly extracted
from the PIV realizations, their characteristics are studied in detail. The present results indicate that the very-near-wall
region (y < 0.1h) is densely populated by spanwise vortices with clockwise (negative) rotation. This behavior supports the notion that hairpin-like
vortices are generated very close to the wall and grow into the outer layer as they advect downstream. In contrast, counterclockwise
(positive) spanwise vortices are scarce in the very-near-wall region, but their presence steadily increases within the logarithmic
layer presumably due to a localized generation mechanism. The average core diameter of negative spanwise vortices is found
to be larger than the average diameter of positive vortices, with few positive vortices having core diameters exceeding 80y. 相似文献
1000.