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41.
Chemical mechanical planarization of Ge_2Sb_2Te_5 using IC1010 and Politex reg pads in acidic slurry
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In the paper, chemical mechanical planarization(CMP) of Ge2Sb2Te5(GST) is investigated using IC1010 and Politex reg pads in acidic slurry. For the CMP with blank wafer, it is found that the removal rate(RR) of GST increases with the increase of pressure for both pads, but the RR of GST polished using IC1010 is far more than that of Politex reg. To check the surface defects, GST film is observed with an optical microscope(OM) and scanning electron microscope(SEM). For the CMP with Politex reg, many spots are observed on the surface of the blank wafer with OM, but no obvious spots are observed with SEM. With regard to the patterned wafer, a few stains are observed on the GST cell, but many residues are found on other area with OM. However, from SEM results, a few residues are observed on the GST cell, more dielectric loss is revealed about the trench structure. For the CMP with IC1010, the surface of the polished blank wafer suffers serious scratches found with both OM and SEM, which may result from a low hardness of GST, compared with those of IC1010 and abrasives. With regard to the patterned wafer, it can achieve a clean surface and almost no scratches are observed with OM, which may result from the high-hardness SiO2 film on the surface, not from the soft GST film across the whole wafer. From the SEM results, a clean interface and no residues are observed on the GST surface, and less dielectric loss is revealed. Compared with Politex reg, the patterned wafer can achieve a good performance after CMP using IC1010. 相似文献
42.
本文首次以钛宝石飞秒激光振荡级为抽运源,搭建了国内首套宽频时域太赫兹雷达(带宽0.1—1.3 THz)并进行了基于标准球的系统校正验证.利用该雷达测量了太赫兹波段三种缩比模型的散射时域信号.通过改进后的后向投影算法对模型的轮廓外形进行了成像研究,验证了新型时域散射信号成像机理.太赫兹雷达更高的频率,宽谱的特征和高分辨率成像的能力有望用于隐形外形设计过程,成为新兴的太赫兹散射特征研究平台. 相似文献
43.
44.
Ching J Soh WL Tan CH Lee JF Tan JY Yang J Yap CW Koh HL 《Journal of separation science》2012,35(1):53-59
Conventional methods of drug discovery from natural products include bioassay-guided fractionation, which is tedious and has low efficiency. The aim of this work is to develop a platform method to rapidly identify bioactive compounds from crude plant extracts and their partially purified fractions using multivariate data analysis (MVDA). Soxhlet extraction and liquid-liquid fractionation were used to prepare different extracts and fractions from the leaves of a medicinal plant, Ardisia elliptica. The extracts and fractions were analysed chemically using GC-MS, and their ability to inhibit platelet aggregation was investigated. Two MVDA methods were developed and optimised to analyse the results. In the first method, compounds with the highest contribution scores for biological activity calculated by different models were listed as potential antiplatelet compounds. For the second MVDA method, a correlation of the concentrations of constituents and biological activities in the various extracts and fractions for each compound was done. Compounds with the highest correlation coefficients were identified as potential antiplatelet compounds. One of the predicted components was isolated, purified and confirmed to possess antiplatelet effects. This platform method can be developed and optimised for other plant extracts and biological activities, thus reducing time and cost of drug discovery while improving efficiency. 相似文献
45.
Subluminal to superluminal light propagation in a V-type three-level atomic system interacting with squeezed vacuum
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We study the light propagation properties in a V-type three-level atomic system interacting with two independent broadband squeezed baths. Using the graphic method, the dependences of the absorption and the dispersion of the system on the coupling field strength, the incoherent pumping field strength and the intensity of the squeezed vacuum are analysed. The result shows that the probe pulse propagation can be changed from subluminal to superluminal speed. 相似文献
46.
Piazza ZA Li WL Romanescu C Sergeeva AP Wang LS Boldyrev AI 《The Journal of chemical physics》2012,136(10):104310
The structures and chemical bonding of the B(21)(-) cluster have been investigated by a combined photoelectron spectroscopy and ab initio study. The photoelectron spectrum at 193 nm revealed a very high adiabatic electron binding energy of 4.38 eV for B(21)(-) and a congested spectral pattern. Extensive global minimum searches were conducted using two different methods, followed by high-level calculations of the low-lying isomers. The global minimum of B(21)(-) was found to be a quasiplanar structure with the next low-lying planar isomer only 1.9 kcal/mol higher in energy at the CCSD(T)/6-311-G* level of theory. The calculated vertical detachment energies for the two isomers were found to be in good agreement with the experimental spectrum, suggesting that they were both present experimentally and contributed to the observed spectrum. Chemical bonding analyses showed that both isomers consist of a 14-atom periphery, which is bonded by classical two-center two-electron bonds, and seven interior atoms in the planar structures. A localized two-center two-electron bond is found in the interior of the two planar isomers, in addition to delocalized multi-center σ and π bonds. The structures and the delocalized bonding of the two lowest lying isomers of B(21)(-) were found to be similar to those in the two lowest energy isomers in B(19)(-). 相似文献
47.
Du Xiao-Feng Song San-Nian Song Zhi-Tang Liu Wei-Li Lü Shi-Long Gu Yi-Feng Xue Wei-Jia Xi Wei 《中国物理 B》2012,21(9):98401-098401
Phase-change line memory cells with different line widths are fabricated using focused-ion-beam deposited C-Pt as a hard mask. The electrical performance of these memory devices was characterized. The current-voltage (I-V ) and resistance-voltage (R-V ) characteristics demonstrate that the power consumption decreases with the width of the phase-change line. A three-dimensional simulation is carried out to further study the scaling properties of the phase-change line memory. The results show that the resistive amorphous (RESET) power consumption is proportional to the cross-sectional area of the phase-change line, but increases as the line length decreases. 相似文献
48.
Theoretical analysis of the DNA dynamics reveals that interaction between the single solitons and plane wave implies Smale-horseshoe chaos in the double helices. Solutions of the chaotic solitons are derived from a direct perturbation technique. It is demonstrated that to produce the bounded chaotic solitons, velocities of the solit ons nust be the same and equal to propagation velocity of the plane wave in DNA. The result shows that the DNA structure may be destroyed by the long action of an electromagnetic wave. It also supplies a useful method for controlling the velocities and unboundedness of the DNA motion in a tumour cell by using a plane wave.`` 相似文献
49.
Polarization switching and synchronization of mutually coupled vertical-cavity surface-emitting semiconductor lasers
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Polarization switching (PS) dynamics and synchronization
performances of two mutually coupled vertical-cavity
surface-emitting lasers (VCSELs) are studied theoretically in
this paper. A group of dimensionless rate equations is derived
to describe our model. While analysing the PS characteristics,
we focus on the effects of coupling rate and frequency detuning
regarding different mutual injection types. The results indicate
that the x-mode injection defers the occurrence of PS, while
the y-mode injection leads the PS to occur at a lower current.
Strong enough polarization-selective injection can suppress the
PS. Moreover, if frequency detuning is considered, the effects
of polarization-selective mutual injection will be weakened. To
evaluate the synchronization performance, the correlation
coefficients and output dynamics of VCSELs with both pure mode
and mixed mode polarizations are given. It is found that
performance of complete synchronization is sensitive to the
frequency mismatch but it is little affected by mixed mode
polarizations, which is opposite to the case of
injection-locking synchronization. 相似文献
50.
The properties of the ground state of a closed dot-ring system with a magnetic flux in the Kondo regime are studied theoretically by means of a one-impurity Anderson Hamiltonian. The Hamiltonian is solved by means of the slave-boson mean-field theory. It is shown that at T=0, a suppressed Kondo effect exists in this system even when the mean level spacing of electrons in the ring is larger than the bulk Kondo temperature. The physical quantities depend sensitively on both the parity of the system and the size of the ring; the rich physical behaviour can be attributed to the coexistence of both the finite-size effect and the Kondo screening effect. It is also possible to detect the Kondo screening cloud by measuring the persistent current or the zero field impurity susceptibility χ_{imp} directly in future experiments. 相似文献