Investigation of 3C-SiC growth on Si(111) by vapor–liquid–solid transport using a SiGe liquid phase

The crystal growth of 3C-SiC onto silicon substrate by Vapor–Liquid–Solid (VLS) transport, where a SiGe liquid phase is fed with propane, has been investigated. Three sample configurations were used. In a preliminary approach, the VLS growth of SiC was conducted directly onto Si substrate using a Ge film as liquid catalyst. It led to the growth of a thick continuous SiC polycrystalline layer which was floating over a SiGe alloy located between the silicon substrate and the topping SiC layer. In the second configuration, a thin seeding layer of 3C-SiC grown by chemical vapor deposition (CVD) was used and the VLS growth was localized using a SiO₂ mask. The liquid phase was a CVD deposited SiGe alloy. The growth of a few hundred nanometers thick 3C-SiC epitaxial layer was demonstrated but the process was apparently affected by the presence of the oxide which was dramatically etched at the end. In the last configuration, the silicon substrate was patterned down to 10 μm and a thin seeding layer of 3C-SiC was grown by CVD onto this patterned substrate. The liquid phase was again a CVD deposited SiGe alloy. In this last configuration, the presence of epitaxial SiC was evidenced but it grew as trapezoidal islands instead of an uniform layer.     

On the ethylene-norbornene copolymerization mechanism

Results of our studies on polymerization kinetics and tests of copolymerization statistical models of ethylene-norbornene (E-N) copolymers obtained on the basis of microstructures determined by ¹³C NMR analysis are reported. Ethylene-norbornene (E-N) copolymers were synthesized by catalytic systems composed of racemic isospecific metallocenes, i-Pr[(3Prⁱ-Cp)(Flu)]ZrCl₂ or a constrained geometry catalyst (CGC) and methylaluminoxane. Polymerization kinetics revealed that E-N copolymerization is quasi living under standard polymerization conditions. Calculations of the number of active sites and of chain propagation and chain transfer turnover frequencies indicate that the metal is mainly in the Mt-N* state, while the Mt-E* state contributes more to transfer and propagation rates. The first-order and the second-order Markov statistics have been tested by using the complete tetrad distribution obtained from ¹³C NMR analysis of copolymer microstructures. The root-mean-square deviations between experimental and calculated tetrads demonstrate that penultimate (second-order Markov) effects play a decisive role in E-N copolymerizations. Results show clues for more complex effects depending on the catalyst geometry in copolymers obtained at high N/E feed ratios. Comonomer concentration was shown to have a strong influence on copolymer microstructure and copolymer properties. The copolymer microstructure of alternating isotactic copolymers obtained with i-Pr[(3Prⁱ-Cp)(Flu)]ZrCl₂ have been described at pentad level. Second-order Markov statistics better describes also the microstrucure of these copolymers.