Three-component photopolymers based on thermal crosslinking and acidolytic de-crosslinking of vinyl ether groups. 2. effects of acid components on photopolymer characteristics

The three-component photopolymers consisting of poly(p-hydroxystyrene) (PHS) or poly(styrene-co-acrylic acid) (PSA) as the binder polymer, 2,2-bis(4-(2-(vinyloxy)ethoxy)phenyl)propane (BPA-DEVE) or 1,1,1-tris(4-(2-(vinyloxy)ethoxy)phenyl)ethane (THPETEVE) as the crosslinking agent, and a photoacid generator were investigated with regard to their lithographic characteristics and thermal crosslinking reactivity because of the acidity of the acid component. The thermal crosslinking rate can be represented as the pseudo first-order reaction. The PSA copolymer with an acrylic acid unit has the higher crosslinking rate and sensitivity, and the lower activation energy. Under low baking temperatures at which crosslinking does not take place, dual-mode resist behavior is observed.     

Study of radical generated from coumarin dye-sensitized photo-initiator systems in high-speed photopolymer coating layers using laser flash photolysis

Radical generation from photoinitiation systems containing carbonylbiscoumarin dye with a radical-generating reagent, 3,3′-carbonylbis[7-(diethylamino)-2H-1-benzopyran-2-one] (KCD-DA), with 2,2′-bis(2-chloro-phenyl)-4,4′5,5′-tetraphenyl-1, 1′-bi-1H-imidazole (BI) in a poly(methyl methacrylate) film has been investigated by laser flash photolysis using a total reflection cell. Imidazolyl radical (Im·) was predominantly generated from carbonylbiscoumarin triplet-sensi-­tized decomposition of BI, the quantum yield, Φ^o_Im· of Im· at an infinite concentration of BI was measured, Φ^o_Im· = 1.3. The high quantum yield, Φ^o_Im·, implies an efficient KCD-DA triplet-sensitized photoinitiation system containing BI. Copyright © 1998 John Wiley & Sons, Ltd.     

Rapid discharge-pumped wide aperture X-ray preionized KrF laser

A wide aperture X-ray preionized discharge-pumped KrF excimer laser has been constructed. A flat plate pulse-forming line (36 nF, 340 kV) charges a peaking capacitor (6 nF) through a rail-gap to facilitate a rapid discharge in the laser head. Collimated X-ray preionization is employed to obtain a wide and uniform discharge. The laser is intended to be used as a short pulse amplifier and results are presented when characterized as an oscillator. The active cross-section of the laser beam is 10×8 cm² with 50 cm effective electrode length. The laser pulse energy exceeds 4.7 J in a 28 ns pulse (FWHM).     

An analysis of the swelling equilibrium of an ionic polymer network in a binary liquid mixture

An equation which represents the swelling equilibrium of an ionic polymer network in a binary liquid mixture is introduced and evaluated numerically. Discontinuous volume changes are obtained with pertinent values of the parameters. From two types of dependence of the degree of ionic dissociation on the composition of a liquid mixture, two types of volume transitions of an ionic gel are illustrated. One is the transition typically seen in acrylamide gels, and the other is a re-entrant transition typical of isopropylacrylamide gels. The selective dissolution factor of two liquids into a swollen polymer network also becomes discontinuous in accordance with the discontinuous volume change. Transition points and the spinodal line are calculated from a generalized form of the free energy change of the swollen gel system. © 1994 John Wiley & Sons, Inc.     

Spectral dynamics of narrow-band F<Subscript>2</Subscript> laser for optical lithography

We describe the spectral dynamics of a line-narrowed F ₂ laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F ₂ laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F ₂ laser system. In addition, a new spectral narrowing technique for the F ₂ laser has been proposed and its effectiveness was evaluated by the simulation code.     

Impurity 55Mn NMR in Cu-Mn dilute alloys

We detected impurity ⁵⁵Mn NMR in Cu-45 ppm and -110 ppm Mn dilute alloys at temperatures of 150–330 K. The hyperfine field we obtained was 65±5 kOe/μ_B. From a temperature variation of linewidths we could estimate J_sd as 1.2±0.1 eV, using the reported theories of relaxation times T₁ and T₂.     

On the behavior of solutions for a semilinear parabolic equation with supercritical nonlinearity

This paper is concerned with a Cauchy problem where and is a nonnegative radially symmetric function in with compact support. Denote the solution of (P) by . Let if and $p^{\ast} = 1+6/(N-10) N \geq 11 p_{\ast} < p < p^{\ast} \lambda_{\varphi} > 0 $ such that: (i) If $ \lambda < \lambda_{\varphi} u_{\lambda} $ exists globally in time in the classical sense and converges to zero locally uniformly in as . (ii) If , then $ u_{\lambda} $ blows upincompletely in finite time. (iii) If , then blows upcompletely in finite time. Received: 20 December 1999; in final form: 26 May 2000 / Published online: 4 May 2001