Insights into sticking of radicals on surfaces for smart plasma nano-processing

In reactive plasma processing, species produced in the plasma reach the surface of a substrate and cause etching, deposition and surface modification through surface reactions. These reactions are characterized by the densities and energies of species incident on the surfaces. In order to realize nano-scale plasma processing, important species for plasma processing have been identified and characterized, and their behavior, not only in the gas phase, but also on the surface, have been clarified and controlled. One of the most critical parameters for insights into surface reaction kinetics of radicals is sticking and surface loss probability. On the basis of radical densities measured by various methods, the sticking and surface reaction loss probabilities have been compiled, and they enable the quantitative understanding of the kinetics of radicals on the surface in the plasma. In this article, the sticking and surface reaction loss probabilities measured thus far are reviewed focusing on fluorocarbon gas, silane gas and methane gas based plasma processes. The establishment of a smart plasma process and the development of an autonomous production device with control of radicals on the basis of insights into the surface reactions for nano-scale plasma processing are presented.     

THE ROLE OF DIOXYGEN SPECIES IN THE BASE- AND COBALT-CATALYZED OXYGENATION OF HINDERED PHENOLS

Abstract— The mechanisms by which 4-substituted 2,6-di- t -butylphenols are oxygenated by base- and Co(II) Schiff base complex-catalysis into o - or p -peroxyquinols and their Co(III) complexes, respectively, have been investigated. For the base-catalyzed oxygenation, a one-step ionic mechanism involving no radical species is suggested to be the most probable one. For the formation of the peroxycobalt(III) complexes, the following stoichiometry is concluded: ArOH + Co(II) + 5/4 O₂→ peroxycobalt(III) complex + 1/2 H₂O. A mechanism involving an electron transfer between the phenols and the Co(II)-O₂ complex followed by further electron transfer between the formed phenoxy radicals and the Co(II) complex to give the corresponding phenolate anions is proposed.     

Rapid adsorption and entrapment of benzoic acid molecules onto mesoporous silica (FSM-16)

Changes in the molecular state of benzoic acid (BA) in the presence of folded sheet mesoporous material (FSM-16), which has uniformly sized cylindrical mesopores and a large surface area, were assessed with several analyses. When BA was blended with FSM-16 for 5 min (BA content=30%), the X-ray diffraction peaks of BA crystals disappeared, suggesting an amorphous state. Fluorescence analysis of the mixture showed a new fluorescence emission peak for BA at 386 nm after mixing with FSM-16. Fluorescence lifetime analysis of the BA component in the mixture at 386 nm showed a longer lifetime in comparison with that of BA crystals. The solid-state (13)C CP/MAS and PST/MAS NMR spectra of the mixture with FSM-16 showed a significantly different spectral pattern from the mixture with nonporous glass, whose NMR spectra were identical to those of BA crystals. These results indicate that BA molecules disperse quickly into the hexagonal channels of FSM-16 by a simple blending procedure and adsorbed BA molecules had clearly different physicochemical properties to BA crystals.     

Novel method for preparation of photocrosslinkable poly(vinyl alcohol)

A convenient procedure to prepare photosensitive poly(vinyl alcohol) by acetalization with 1-methyl-4-(p-formylstyryl)pyridinium methosulfate in heterogeneous condition is described. The reaction of fully saponified poly(vinyl alcohol) was carried out in suspension in acidic aqueous solution, while partially saponified poly(vinyl alcohol) was acetalized in acidic aqueous organic solvent. The photosensitive poly(vinyl alcohol) thus prepared was purified by filtration and successive washing out with methanol. The effect of the preparative condition on the electronic absorption spectra of the styrylpyridinium group attached to poly(vinyl alcohol) is discussed.     

Polymerization of N-carbazolylacetylene by various transition metal catalysts and polymer properties

N-Carbazolylacetylene (CzA) was polymerized in the presence of various transition metal catalysts including WCl₆, MoCl₅, [Rh(NBD)Cl]₂, and Fe(acac)₃ to give polymers in good yields. The polymers produced with W catalysts were dark purple solids and soluble in organic solvents such as toluene, chloroform, etc. The highest weight-average molecular weight of poly(CzA) reached about 4 × 10⁴. In the UV–visible spectrum in CHCl₃, poly(CzA) exhibited an absorption maximum around 550 nm (ε_max = 4.0 × 10³ M⁻¹ cm⁻¹) and the cutoff wavelength was 740 nm, showing a large red shift compared with that of poly(phenylacetylene) [poly(PA)]. Poly(CzA) began to lose weight in TGA under air at 310°C, being thermally more stable than poly(PA) and poly[3-(N-carbazolyl)-1-propyne]. Poly(CzA) showed a third-order susceptibility of 18 × 10⁻¹² esu, which was 2 orders larger than that of poly(PA). © 1998 John Wiley & Sons, Inc. J. Polym. Sci. A Polym. Chem. 36: 2489–2492, 1998     

REACTION OF SULFUR CHLORIDE WITH ACETOPHENONE. II

Abstract

In a previous paper,¹ we reported the formation of a resinous material (1) from the reaction of sulfur chloride with acetophenone which, upon treatment with DMF, yielded phenylglyoxylthiodimethylamide (4). We now report two additional resinous materials (5, 6), resulting from bromination of sodium phenacylthiosulfate (3) and diphenacyl disulfide (7) respectively, both of which not only resemble resinous 1 in appearance, but also yield 4 upon treatment with DMF in aqueous alkali.

Resinous 1, 5, and 6 appear to have the same common basic structure and differ only in the number of sulfur atoms bonded between the common units. Cleavage at the sulfur-sulfur bonds and elimination of hydrogen halide then yields identical oxothioamides from 1, 5, or 6. The latter appears to be a general reaction, and several oxothioamides were prepared by this synthetic method from 1, 5, and 6 and various amides and amines.     

Influence of particle design on oral absorption of poorly water-soluble drug in a silica particle-supercritical fluid system

The physicochemical characteristics and oral absorption of a poorly water-soluble drug, K-832, adsorbed onto porous silica (Sylysia 350), were compared with those of K-832 adsorbed onto non-porous silica (Aerosil 200). K-832 and silica were treated with supercritical CO(2) (scCO(2)) to produce K-832-Sylysia 350 and K-832-Aerosil 200 formulations. Scanning electron microscopy, polarizing microscopy, powder X-ray diffraction, and differential scanning calorimetry results suggested that K-832 mainly existed in an amorphous state in both formulations. The specific surface area of both formulations was much larger than that of pure K-832 crystals. The dissolution rate of K-832 from both formulations was considerably greater than that from corresponding physical mixtures due to rapid wetting of the hydrophilic carrier surfaces and amorphous state, the dissolution from the K-832-Sylysia 350 formulation being the fastest. In vivo absorption tests on the two formulations indicated no significant differences in their peak concentration (C(max)) and the area under their plasma concentration-time curve (AUC), while the concentrations of K-832 in the K-832-Sylysia 350 formulation were significantly higher than those in the K-832-Aerosil 200 formulation 1 h and 1.5 h after administration of these formulations (p<0.05). This could be attributed to the different dispersion states of K-832 in the formulations due to their different three-dimensional structures (porous and non-porous). In physical stability tests, the amorphous drugs in both formulations were stable at room temperature for at least 14 months. Thus, the absorption of poorly water-soluble drugs could be greatly improved by adsorption onto porous silica using scCO(2).     

A Quantum Chemical Study of the Abnormal Reactivity of 2‐Methoxyfuran

The gas‐phase pyrolytic and oxidative chemistry of furans has received much attention recently because of their potential as platform chemicals and biofuels. Typically these compounds exhibit very strong ring carbon to H or CH₃ bonds. 2‐Methoxyfuran had been reported to be exceptionally unstable in comparison to related substituted heterocycles in pyrolytic experiments. The origins of its reactivity are shown to be due to the very weak O–CH₃, which at 189.5 ± 1.9 kJ mol^?1 is some 200 kJ mol^?1 weaker than C–H bonds in the molecule. We show that the reported reactivity is somewhat overestimated but that does not alter the fact that 2‐methoxyfuran is exceptionally unstable. It may prove to be a useful alternative to azomethane as a thermal source of methyl radicals.     

Synthesis and Polymerization of (S)-4-Methyl-2-N,N-dimethylaminopentyl Methacrylate

(S)-4-Methyl-2-N,N-dimethylaminopentyl methacrylate (DMAPM) was synthesized from the reaction of N,N-dimethyl-L-leucinol with methacryl chloride, and its radical polymerization was investigated. It was found that DMAPM readily polymerized by α,α¹-azobisisobutyronitrile (AIBN) as an initiator to give poly-DMAPM. The copolymerization of DMAPM(M₁) with styrene(Mz) was also studied in various solvents with AIBN as an initiator at 60°C. From the result obtained in benzene, Q and e values of DMAPM were determined to be 0.64 and -0.04, respectively. Specific rotations of the copolymers of DMAPM with styrene were not proportional to the weight percent of the DMAPM unit incorporated, but the observed relation gave a downward curve. The copolymerizations DMAPM with α, β-disubstituted monomers such as maleic acid, maleimide, and N-phenylmaleimide were carried out in order to induce asymmetric center in the polymer chain. After hydrolysis of the copolymers obtained, the hydrolyzed polymers were found to be optically active, suggesting an induction of asymmetric center into the polymer chain.