FTIR Analysis of Plasma Damage of Kapton

Recently, Kapton (polyimide) has been used in the reduction of dust particles in plasma etching chambers. However, it is found that there is a limit of lifetime for Kapton in trapping particles. Beyond this time limit, particle contamination becomes serious and even causes defect on wafers. In this study, two plasma etching recipes were used to test the particle/polymer trapping efficiency of Kapton. A Fourier Transform Infrared (FTIR) spectrometer was used to examine the functional groups change of the Kapton surface after plasma etching. The increase of IR absorption of CF_x (x = 2, 3) indicates the growth of fluorocarbon polymer on the Kapton surface. The Kapton surface was damaged as indicated by the change of C=O, -NH₂, and C - H IR intensities. IR Spectroscopic data show that Kapton has a very good particle/polymer reduction efficiency when using high-polymer recipe but not very efficient with oxygen-rich recipe. It has drawn our attention that when testing metal contamination of the processed wafers using chambers with Kapton coating, the concentration of aluminum was always high as compared to those without using Kapton. It can be ascribed to the plasma damage of Kapton, as supported by the surface chemical analysis with energy dispersion spectroscopy (EDS). Data collected from FTIR and EDS are correlated to interpret the mechanisms of plasma damage of Kapton.     

Enhancement in SERS intensities of azo dyes adsorbed on ZnO by plasma treatment

Surface‐enhanced Raman scattering (SERS) spectra of azo dyes (methyl orange and p‐methyl red) adsorbed on ZnO nanoparticles were observed. Hydrothermally synthesized ZnO nanoparticles were characterized by powder X‐ray diffraction and X‐ray photoelectron spectroscopy. The ZnO nanoparticle size, monitored with X‐ray diffraction, was tuned by calcination to optimize SERS intensities. The observed SERS effect of azo dyes adsorbed on ZnO can be ascribed to charge‐transfer resonance effect. Time‐dependent density functional theory was used to calculate the optical spectra and interpret the chemical enhancement observed in the experiment. The SERS enhancement factors for methyl red on ZnO were boosted by nearly four times and twice with O₂ plasma and H₂ plasma, respectively. However, plasma treatment showed no effect on the enhancement factors of methyl orange on ZnO. We conclude that plasma‐induced defect formation and band gap shift in ZnO and the coupling of energy levels between ZnO and azo dye molecules are responsible for the observed enhancement of SERS intensities. Copyright © 2014 John Wiley & Sons, Ltd.