压印光刻中的两步对正技术

压印光刻中套刻需要粗、精两级对正.实验采用一对斜纹结构光栅作为对正标记.利用物镜组观察光栅标记图像的边界特征进行粗对正,其准确度在精对正信号的捕捉范围内;利用光电接收器件阵列组合接收光栅莫尔信号,在莫尔信号的线区进行精对正.由于线性区的斜率大, 精对正过程中得到相应x,y方向的对正误差信号灵敏度高,利用高灵敏度对正误差信号作为控制系统的驱动信号,对承片台进行驱动定位,实现精对正.最终使X,Y方向上的重复对正准确度分别达到了± 21 nm(± 3σ)和±24 nm(± 3σ).     

Theoretical models for the extracavity Raman laser with crystalline Raman medium

The rate equation model of an extracavity Raman laser is deduced for the first time to the best knowledge of the authors. The normalized radiation transfer equations of the extracavity Raman laser are given. The normalized radiation transfer equations and rate equations were solved numerically to find the optimum reflectivity of the output coupler to realize the maximum conversion efficiency at the first Stokes for both the single and double-pass pumping configurations. Also, the pulse duration of the first Stokes was investigated numerically. The rate equations are verified to be a good approximation to the radiation transfer equations for the regime of low Raman gain and long pump pulse duration. Furthermore, it is found that the optimum reflectivity of the first Stokes and the second Stokes threshold are influenced significantly by the minor feedback of the resonator mirror at the second Stokes. PACS 42.55 42.55.Ye; 42.65 42.65.Dr; 02.60 02.60.Lj; 63.20 63.20.-e     

The Design of Hermetically Double-Coated Optical Fibers to Minimize Hydrostatic Pressure-Induced Stresses

The design of hermetically double-coated optical fibers to minimize hydrostatic pressure-induced stresses is investigated. Several stresses are important in the hermetically double-coated optical fibers, and they would produce the excess bending losses or the failure of hermetic coatings. These stresses can be minimized by appropriately selecting material's properties of hermetic coatings and their thicknesses. The hydrostatic pressure-induced stresses in optical fibers with some selected metallic coatings are also considered. The results show that chromium has the best performance in the minimization of hydrostatic pressure-induced stresses. However, lead and indium are poor materials.     

轴向流对Z箍缩等离子体稳定性的影响

利用理想磁流体力学(MHD)模型对有轴向流参与的Z箍缩等离子体不稳定性进行了分析.对可压缩平板等离子体模型的色散关系进行了推导,讨论了三种不同等离子体状态下的不稳定性增长率.结果显示,等离子体的可压缩性对磁瑞利-泰勒/开尔文-亥姆霍兹(MRT/KH)杂化不稳定性有抑制作用,改善了轴向剪切流对长波长扰动的影响.分析了不同轴向流速度分布对系统稳定性的影响.结果表明,对于峰值相同的不同轴向流,其对不稳定性的抑制效果只依赖于扰动集中区域内速度剪切的大小,与其他位置的速度剪切无关.     

980 nm激发下Er3+/Yb3+共掺杂ZrO2-Al2O3粉末的上转换发光特性

通过固相反应法制备了Er3+/Yb3+共掺杂ZrO2-Al2O3粉末的样品,并对样品在980nm激光激发下的上转换发光特性进行了研究.从发射光谱可以发现,在可见光范围内有3个强的发光带,一个位于654nm附近的红光带和两个分别位于545nm、525nm附近的绿光带,分别对应于Er3+离子的以下辐射跃迁:4F9/2→4I15/2、4S3/2→4I15/2、2H11/2→4I15/2.其中又以Er3+离子的4F9/2→4I15/2跃迁产生的红色荧光辐射最强.对其上转换发光机制进行了分析,发现这三个发光过程都是双光子过程.对样品粉末进行了XRD检测,发现ZrO2主要以立方相为主,并且计算得到了这种立方结构的晶格常数.Al2O3固溶于ZrO2中,Al3+嵌入ZrO2后产生氧空位,导致ZrO2晶体的对称性降低,这种结构变化更有利于提高上转换效率,即上转换发光强度增强.     

Plasma-induced spatiotemporal modulation of propagating femtosecond pulses

The dynamics of the femtosecond pulse propagation in a plasma channel is investigated by the pumpprobe longitudinal diffractometry and second harmonic generation frequency-resolved optical gating (SHGFROG) technique. The spatial characteristics, corresponding to the electronic density and the size of the channel, can be observed by the recorded ring pattern, and the spectral and temporal characteristics are recorded by the SHG-FROG traces. The spatiotemporal characteristics will help us to better understand the dynamics of the plasma induced by the femtosecond pulse and the femtosecond pulse propagating in the plasma channel.     

分立式与分布式光纤传感关键技术研究进展

光纤传感技术已广泛应用于航空航天、石油化工、电子电力、土木工程、生物医药等领域,其技术形式主要体现为分立式和分布式.分立式光纤传感技术利用光纤敏感器件作为传感器来感知被测参量的变化,光纤作为光信号的传输通道连接光纤传感器及后端的解调装置;分布式光纤传感系统基于光纤瑞利散射、拉曼散射或布里渊散射等光学效应,利用光纤本身作为传感器,可对沿途的光信号进行大范围、长距离传感.本文介绍了分立式与分布式光纤传感中主要关键技术的研究进展,并对未来的研究和发展方向进行了探讨.     

α稳定噪声下一类周期势系统的振动共振

将多个低频微弱信号、高频信号和加性α稳定噪声共同激励的一类周期势系统作为研究模型,以平均信噪比增益(MSNRI)为性能指标,对α稳定噪声环境下周期势系统中的振动共振现象进行了研究,分别探究了α稳定噪声的特征参数α、对称参数β、加性噪声强度放大系数D、高频信号幅值B以及频率?对振动共振输出效应的影响.研究结果表明:1)在不同分布的α稳定噪声环境下,固定频率?(或幅值B),当幅值B(或频率?)逐渐增大时,MSNRI-B(或MSNRI-?)曲线出现多个峰值,即存在多个B区间(或?区间)可诱导振动共振,并且这些区间不会随噪声分布参数α或β的变化而变化;2)当加性噪声强度放大系数D发生变化时,幅值B和频率?的共振区间没有随着D的变化而变化,表明只有高频信号能量向待测低频信号转移,噪声能量并没有向待测低频信号转移.另外当幅值B、频率?固定时,随着D的逐渐增大,依然可以实现微弱信号的检测,表明振动共振可以克服工业现场噪声强度不可调控的缺点.本文研究结果提供了一种新的微弱信号检测方法,在信号处理领域有着潜在的应用价值.     

玉米淀粉固态电解质质子\电子杂化突触晶体管

随绿色可持续发展观念的深入人心,研究人员致力于寻找天然有机材料应用于功能性电子器件.淀粉以其低廉的价格、丰富的来源和优异的机械性能进入了科研人员的视野.淀粉可由玉米、马铃薯、甘薯和葛根等含淀粉的物质中提取而得,一般不溶于水,在和水加热至一定温度时,则糊化成胶状溶液.本文通过旋涂法将玉米淀粉的胶状溶液旋涂至氧化铟锡玻璃表面,然后在30?C恒温环境中晾干制备成固态胶合状薄膜.以此薄膜作为固态电解质制备了氧化铟锌突触晶体管,并实现了生物神经突触的双脉冲易化、学习记忆能力、高通滤波等可塑性行为的仿真.本研究以玉米淀粉固态胶合薄膜作为电解质大大降低了氧化物薄膜晶体管固态电解质的成本,且该电解质无毒性、来源丰富,将为人工神经网络的开发提供一种可选择的元件.