Spatially resolved Raman spectroscopy evaluation of residual stresses in 3C-SiC layer deposited on Si substrates with different crystallographic orientations

Raman scattering studies were performed on hot-wall chemical vapor deposited (heteroepitaxial) silicon carbide (SiC) films grown on Si substrates with orientations of (1 0 0), (1 1 1), (1 1 0) and (2 1 1), respectively. Raman spectra suggested that good quality cubic SiC single crystals could be obtained on the Si substrate, independent of its crystallographic orientation. Average residual stresses in the epitaxially grown 3C-SiC films were measured with the laser waist focused on the epilayer surface. Tensile and compressive residual stresses were found to be stored within the SiC film and in the Si substrate, respectively. The residual stress exhibited a marked dependence on the orientation of the substrate. The measured stresses were comparable to the thermal stress deduced from elastic deformation theory, which demonstrates that the large lattice mismatch between cubic SiC and Si is effectively relieved by initial carbonization. The confocal configuration of the optical probe enabled a stress evaluation along the cross-section of the sample, which showed maximum tensile stress magnitude at the SiC/Si interface from the SiC side, decreasing away from the interface in varied rate for different crystallographic orientations. Defocusing experiments were used to precisely characterize the geometry of the laser probe in 3C-SiC single crystal. Based on this knowledge, a theoretical convolution of the in-depth stress distribution could be obtained, which showed a satisfactory agreement with stress values obtained by experiments performed on the 3C-SiC surface.     

Development of a “Built-in” Scanning Near Field Microscope Head for an Atomic Force Microscope System and Stress Mapping of an Al2O3/ZrO2 Eutectic Composite

We constructed a scanning near-field optical microscope (SNOM) on a commercially available atomic force microscopy (AFM) apparatus (SPM-9500J2; Shimadzu Corp.) to measure the stress distribution in ceramic composite materials. Features of our SNOM system are: (1) a compact SNOM head substituted for the original AFM head; (2) a wide scanning range (125 × 125 μm²) inherited from the original scanner; (3) use of conventional shear-force regulation; (4) an optical system for the illumination-collection (I-C) mode; (5) excitation by a 488 nm line of an Ar-ion laser, and (6) light detection by photon counting or a polychromator equipped with an electronically cooled charge coupled device (CCD). This SNOM system was used to measure the surface structure and stress distribution of an Al₂O₃/ZrO₂ eutectic composite. We simultaneously measured topographic images and fluorescence spectra of an Al₂O₃/ZrO₂ eutectic composite. We estimated its peak intensity, peak position, and peak width from the fluorescence spectrum during scanning, which respectively correspond to the abundance of Al₂O₃, stress in the grain, and the anisotropy of that stress. Mapping images showed that the stress and its anisotropy were weaker in the center of the Al₂O₃ grain than its boundary between Al₂O₃ and ZrO₂. That observation suggests that Al₂O₃ underwent intense anisotropic stress induced by volume expansion in the phase transition of ZrO₂ from the cubic phase to the monoclinic phase during preparation.     

Introduction of several trifluoromethyl groups onto the activated aromatic materials with CF3TMS-CuI-KF system

Trifluoromethylation onto the tetrafluorophthalonitrile and tetrafluoroisophthalonitrile has been carried out using CF₃TMS-CuI-KF system, and it was demonstrated that these trifluoromethylation enabled us to successfully construct di- and/or tri-trifluoromethylated benzonitriles via the decyanotrifluoromethylation.     

Measurement on Spot Size Dependence of Dense WDM Dielectric Multilayer Filters

We present the spot size dependence of dielectric multilayer filters for use in dense WDM systems. We found large dependences of filter performances on the spot size and the incident angle of input light, which should be important for miniaturizing multi-channel add/drop filters.     

Formulation for XPS spectral change of oxides by ion bombardment as a function of sputtering time

XPS measurement revealed that the original state of TiO₂ was changed to Ti₂O₃ and TiO by ion bombardment. TiO₂ decreased and Ti₂O₃ increased at the initial stage. TiO increased at a later stage than Ti₂O₃. Each of them saturated after enough sputtering time.A formulation was proposed in order to explain the change of XPS spectra for oxides as a function of ion sputtering time. This formulation was based on reaction equations that contain two reduction processes (from TiO₂ to Ti₂O₃ and from Ti₂O₃ to TiO), and sputtering effects. Using four fitting parameters (two reduction coefficients, sputtering yield and information depth), the present formula was fitted to the experimental results. The fitting results agree satisfactorily with the experimental results. The calculation shows that the reduction coefficient from TiO₂ to Ti₂O₃ is about ten times larger than that from Ti₂O₃ to TiO. This calculation predicts that surface composition of an oxide that is changed by ion bombardment will reach a different value depending on its bulk composition. Moreover, the present formulation can determine the chemical states of compounds changed by ion bombardment.     

Numerical reconstruction of an infrared wavefront utilizing an optical phase modulation device

We utilize nitroanisole, that absorbs infrared (IR) radiation as heat, as an optical modulation device based on a thermal process. The nitroanisole exhibits a thermal lens effect, i.e. a temperature dependent refractive index. Hence, the nitroanisole can induce phase modulation to visible light, in direct response to intensity of the incident IR radiation. The proposed method can be used to obtain the phase modulation distribution that corresponds to the IR intensity distribution, i.e. the IR hologram itself, on the nitroanisole by examining the phase map of visible light that is modulated upon passing through the nitroanisole. The IR wavefront can be reconstructed by calculating extracted IR holograms through the Fresnel transform. It is verified that both the amplitude and the phase of the IR wavefront can be reconstructed accurately by proposed method.     

Tail probabilities of the limiting null distributions of the Anderson–Stephens statistics

For the purpose of testing the spherical uniformity based on i.i.d. directional data (unit vectors) z_i, i=1,…,n, Anderson and Stephens (Biometrika 59 (1972) 613–621) proposed testing procedures based on the statistics S_max=max_u S(u) and S_min=min_u S(u), where u is a unit vector and nS(u) is the sum of squares of u′z_i's. In this paper, we also consider another test statistic S_range=S_max−S_min. We provide formulas for the P-values of S_max, S_min, S_range by approximating tail probabilities of the limiting null distributions by means of the tube method, an integral-geometric approach for evaluating tail probability of the maximum of a Gaussian random field. Monte Carlo simulations for examining the accuracy of the approximation and for the power comparison of the statistics are given.     

Synthesis of Bioactive and Porous Organic-Inorganic Hybrids for Biomedical Applications

Bioactivity has been exhibited by a limited range of ceramics since the invention of Bioglass®. Recently, some bioactive polymeric organic-inorganic hybrids were introduced, including not only organically modified silicates (Ormosils) synthesized from polydimethylsiloxane (PDMS) and tetraethoxysilane but also those with gelatin and 3-glycidoxypropyl-tremethoxysilane. Preparation of the bulk and porous hybrids and their polymeric structures analyzed by Si NMR spectroscopy were presented. In vitro bioactivity or apatite deposition in a simulated body fluid of the Kokubo recipe were also described for those hybrids. Freeze-drying techniques introduced porosity (up to 90%) and pores extending in a preferred direction.