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101.
102.
Qi-Yue Shao Ai-Dong Li Jin-Bo Cheng Hui-Qin Ling Di Wu Zhi-Guo Liu Yong-Jun Bao Mu Wang Nai-Ben Ming Cathy Wang Hong-Wei Zhou Bich-Yen Nguyen 《Applied Surface Science》2005,250(1-4):14-20
LaAlO3 (LAO) is explored in this work to replace SiO2 as the gate dielectric material in metal–oxide–semiconductor field effect transistor. Amorphous LAO gate dielectric films were deposited on Si (0 0 1) substrates by low pressure metalorganic chemical vapor deposition using La(dpm)3 and Al(acac)3 sources. The effect of processing parameters such as deposition temperature and precursor vapor flux on growth, structure, morphology, and composition of LAO films has been investigated by various analytical methods deeply. The film growth mechanism on Si is reaction limiting instead of mass transport control. The reaction is thermally activated with activation energy of 37 kJ/mol. In the initial growth stage, Al element is deficient due to higher nucleation barrier on Si. The LAO films show a smooth surface and good thermal stability and remain amorphous up to a high temperature of 850 °C. The electrical properties of amorphous LAO ultrathin films on Si have also been evaluated, indicating LAO is suitable for high k gate dielectric applications. 相似文献
103.
Q.-Y. Shao A.-D. Li J.-B. Cheng H.-Q. Ling D. Wu Z.-G. Liu N.-B. Ming C. Wang H.-W. Zhou B.-Y. Nguyen 《Applied Physics A: Materials Science & Processing》2005,81(6):1181-1185
LaAlO3 (LAO) gate dielectric films were deposited on Si substrates by low-pressure metalorganic chemical vapor deposition. The interfacial structure and composition distribution were investigated by high-resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectroscopy (XPS), secondary-ion mass spectroscopy (SIMS), and Auger-electron spectroscopy (AES). HRTEM confirms that there exists an interfacial layer between LAO and Si in most samples. AES, SIMS, and XPS analyses indicate that the interfacial layer is compositionally graded La–Al silicate and the Al element is severely deficient close to the Si surface. Electrical properties of LAO films were evaluated. No evident difference in electrical properties between samples with and without native SiO2 layers was observed. The electrical properties are discussed in terms of LAO growth mechanisms, in relation to the interfacial structure. PACS 73.40.Qv; 81.15.Gh; 77.55.+f; 68.35.-p 相似文献
104.
105.
采用多靶磁控溅射法制备了一系列具有不同TiB2调制层厚度的TiN/TiB2 sub>纳米多层膜.利用x射线衍射仪、高分辨电子显微镜和微力学探针研究了TiB2层厚变化对多层膜生长结构和力学性能的影响.结果表明,在fcc-TiN层(111)生长面的模板 作用下,原为非晶态的TiB2层在厚度小于2.9nm时形成hcp晶体态,并与fcc-TiN 形成共格外延生长;其界面共格关系为{111}TiN//{0001}TiB2,〈110〉TiN//〈1120〉TiB2.由于共格界面存在晶格失配 度,多层膜中形成拉、压交变的应力场,导致多层膜产生硬度和弹性模量升高的超硬效应, 最高硬度和弹性模量分别达到46.9GPa和465GPa.继续增加TiB2层的厚度,TiB2形成非晶态并破坏了与TiN层的共格外延生长,多层膜形成非晶TiN层和非晶TiB< sub>2层交替的调制结构,其硬度和弹性模量相应降低.
关键词:
2纳米多层膜')" href="#">TiN/TiB2纳米多层膜
共格生长
晶体化
力学性能 相似文献
106.
利用束流能量为116MeV的59Co(35Cl,2p2n)90Mo反应布居90Mo的高自旋态.用10台反康普顿HPGe探测器组成的探测阵列进行γγ符合测量.通过多普勒展宽峰的形状分析测定90Mo高自旋态的寿命.在正宇称衰变系观察到增强的M1跃迁,推断I=13以上是扁椭形变.负宇称高自旋态具有大的B(E2)值,并随自旋增大而起伏变化.正、负宇称态之间的跃迁显示增大的E1跃迁,似有八极关联的可能.但是,90Mo并不处在理论预言的存在八极形变的核区内. 相似文献
107.
The ρ-T curves in our single phase HgBa2Ca2Cu3O8+δ superconductor were measured as a function of temperature and magnetic field, ρ=ρ0exp(−Ueff/κBT). It can be transformed to another form d(lnρ)/d(1/T)=−Ueff+TdUeff/dT, then this becomes a plot of the activation energy Ueff as a function of temperature. Our data plotted in these ways show a clear crossover from high-temperature two-dimensional vortex-liquid to a critical region associated with the low-temperature three-dimensional vortex-glass phase transition. The critical exponents v(z−1)=3.9±1.9 in this system are little different with previous measurements in BSCCO and YBCO systems. 相似文献
108.
Pulsed breakdown of dry air at ambient pressure has been investigated
in the point-plane geometry, using repetitive nanosecond pulses with
10 ns risetime, 20--30 ns duration, and up to 100 kV amplitude. A
major concern in this paper is to study the dependence of breakdown
strength on the point-electrode polarity. Applied voltage, breakdown
current and repetitive stressing time are measured under the
experimental conditions of some variables including pulse voltage
peak, gap spacing and repetition rate. The results show that
increasing the E-field strength can decrease breakdown time lag,
repetitive stressing time and the number of applied pulses as
expected. However, compared with the traditional polarity dependence
it is weakened and not significant in the repetitive nanosecond-pulse
breakdown. The ambiguous polarity dependence in the experimental
study is involved with an accumulation effect of residual charges and
metastable states. Moreover, it is suggested that the reactions
associated with the detachment of negative ions and impact
deactivation of metastable species could provide a source of primary
initiating electrons for breakdown. 相似文献
109.
The impulsive control of chaotic systems, which are subjected to
unbounded exogenous perturbations, is considered. By using the
theory of impulsive differential equation together with the fuzzy
control technique, the authors propose an impulsive robust chaos
controlling criterion expressed as linear matrix inequalities
(LMIs). Based on the proposed control criterion, the procedure for
designing impulsive controllers of common (perturbed) chaotic
systems is provided. Finally, a numerical example is given to
demonstrate the obtained theoretical result. 相似文献
110.
"在非水介质中合成了纳米氧化锌,测定了纳米氧化锌的紫外吸收光谱,并用有效质量模型计算了粒子大小,开发并命名了一种称之为纳米粒子过饱和控制生长的技术,该技术涉及将小的纳米粒子悬浊液加入到大的粒子悬浊液中,结果因为不同大小粒子间的溶解度差异小的粒子将全部溶解,大的粒子将整体长大,大粒子悬浊液的粒子数将保持不变,大粒子的生长速度显著比Ostwald老化的高.该技术最显著的特征是只要最初两悬浊液粒子大小的差异足够大,分布不是太宽,则粒子大小的分布将会因为粒子如此长大而变窄." 相似文献