Realisation and metrological characterisation of thickness standards below 100 nm

High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force microscopy (SFM), grazing incidence X-ray reflectometry (GIXR), or X-ray fluorescence analysis (XRF). The measurement results achieved with these methods are based on different interactions between the film and the probe. A key question in nanotechnology is how to achieve consistent results on a level of uncertainty below one nanometre with different techniques.Two different types of thickness standards are realised. Metal film standards for X-ray techniques in the thickness range 10 to 50 nm are calibrated by GIXR with monochromatised synchrotron radiation of 8048 eV. The results obtained at four different facilities show excellent agreement. SiO₂ on Si standards for SE and SFM in the thickness range 6 to 1000 nm are calibrated by GIXR with monochromatised synchrotron radiation of 1841 eV and with a metrological SFM. Consistent results within the combined uncertainties are obtained with the two methods. Surfaces and interfaces of both types of standards are additionally investigated by transmission electron microscopy (TEM). PACS 61.10.Kw; 68.55.Jk; 06.20.Fn; 06.60.Mr; 07.79.Lh     

The lay-out of the photon collider at the international linear collider

One of the interaction regions at the linear colliders should be compatible both with e ⁺ e ⁻ and γγ, γe modes of operation. In this paper, the differences in requirements and possible design solutions are discussed.      

Utilization of waste solutions in perovskite technology

A scheme for utilization of chloride solutions of complex composition with α-and β-activity of up to 35 and 28 kBq 1^?1, respectively, is suggested.     

A pulsed ion-ion recombination laser

A new mechanism of pulsed laser oscillation based on ion-ion recombination is proposed. The advantages of utilizing this mechanism in a pulsed mode are considered, and the expected characteristics of the proposed lasers are estimated.     

The magnetism of rare earth intermetallics RFe4Al8

Hyperfine Interactions - The YFe4Al8 and ErFe4Al8 intermetallics were studied by57Fe Mössbauer spectroscopy between 2 K and room temperature. The spectra are consistent with iron occupying 8f...     

Cluster sets of subharmonic functions and associated measures in a cone

A study is conducted of the relationship between the asymptotic behavior of a subharmonic function of finite order in a cone and the distribution of the measure associated with it.Translated from Ukrainskii Matematicheskii Zhurnal, Vol. 43, No. 2, pp. 247–261, Febraury, 1991.     

A distance-regular graph with the intersection array {8, 7, 5; 1, 1, 4} and its automorphisms

Possible orders and subgraphs of the fixed points of a distance-regular graph with the intersection array {8, 7, 5; 1, 1, 4} are found. It is shown that such a graph is not vertex-transitive.     

On the instability of parallel weakly interacting dislocations in soft-mode crystals

The instability of the rectilinear form of parallel weakly interacting dislocations, manifesting itself in their spontaneous wave-like bending, has been investigated. It is shown that softening of a crystal leads to the enhancement of this instability.