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21.
22.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
23.
It is well known that topology and dynamics are two major aspects to determine the function of a network. We study one of the dynamic properties of a network: trajectory convergence, i.e. how a system converges to its steady state. Using numerical and analytical methods, we show that in a logical-like dynamical model, the occurrence of convergent trajectory in a network depends mainly on the type of the fixed point and the ratio between activation and inhibition links. We analytically proof that this property is induced by the competition between two types of state transition structures in phase space: tree-like transition structure and star-like transition structure. We show that the biological networks, such as the cell cycle network in budding yeast, prefers the tree-like transition structures and suggest that this type of convergence trajectories may be universal. 相似文献
24.
Chirped fiber grating was used in dispersion compensator. We tried to use the same phase mask to write fiber grating of different wavelength with two methods to reduce the price of the fiber grating. 相似文献
25.
Using the theoretically calculated point-defect total-energy values of Baraff and Schlüter in GaAs, anamphoteric-defect model has been proposed by Walukiewicz to explain a large number of experimental results. The suggested amphoteric-defect system consists of two point-defect species capable of transforming into each other: the doubly negatively charged Ga vacancyV
Ga
2–
and the triply positively charged defect complex (ASGa+V
As)3+, with AsGa being the antisite defect of an As atom occupying a Ga site andV
As being an As vacancy. When present in sufficiently high concentrations, the amphoteric defect systemV
Ga
2–
/(AsGa+V
As)3+ is supposed to be able to pin the GaAs Fermi level at approximately theE
v
+0.6 eV level position, which requires that the net free energy of theV
Ga/(AsGa+V
As) defect system to be minimum at the same Fermi-level position. We have carried out a quantitative study of the net energy of this defect system in accordance with the individual point-defect total-energy results of Baraff and Schlüter, and found that the minimum net defect-system-energy position is located at about theE
v
+1.2 eV level position instead of the neededE
v
+0.6 eV position. Therefore, the validity of the amphoteric-defect model is in doubt. We have proposed a simple criterion for determining the Fermi-level pinning position in the deeper part of the GaAs band gap due to two oppositely charged point-defect species, which should be useful in the future. 相似文献
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29.
成功制备了结构为ITO/PDDOPV/PPQ/Al的异质结聚合物发光二极管。该器件在正反向偏压下均可发光。在正向偏压下的光发射主要来自PDDOPV,但在反向偏压下的光发射则包括来自PPQ的蓝光发射和PDDOPV的黄光发射。蓝光强度与黄光强度的比值随着反向偏压的增加而增加,当反向直流电压分别为22V、24V、26V、28V时,其电致发光光谱中PPQ与PDDOPV的峰高比IPPQ/IPDDOPV分别为1.092、1.329、1.605、2.046。换句话说,该器件的发光颜色是压控可调的,这对实现彩色显示是极为有利的。分析了在反向偏压下的发光机理以及IPPQ/IPDDOPV受电压控制的原因。 相似文献
30.
Kang Hai TAN Xiao Ping YANG 《数学学报(英文版)》2006,22(3):701-710
In this paper we give a geometric interpretation of the notion of the horizontal mean curvature which is introduced by Danielli Garofalo-Nhieu and Pauls who recently introduced sub- Riemannian minimal surfaces in Carnot groups. This will be done by introducing a natural nonholonomic connection which is the restriction (projection) of the natural Riemannian connection on the horizontal bundle. For this nonholonomic connection and (intrinsic) regular hypersurfaces we introduce the notions of the horizontal second fundamental form and the horizontal shape operator. It turns out that the horizontal mean curvature is the trace of the horizontal shape operator. 相似文献