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101.
铝互连线的电迁移问题历来是微电子产业的研究热点,其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始,超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发,分析概括了铝互连电迁移问题的研究方法,总结了上世纪至今关于铝互连电迁移问题的主要经验;最后结合已知的结论和目前芯片制造业现状,分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式,提出了解决这些问题的总方向.
关键词:
电迁移
铝互连
微结构 相似文献
102.
Jun-tao Chang Joerg Evers Marian O. Scully M. Suhail Zubairy 《量子光学学报》2006,12(B08):77-77
We propose a scheme to obtain the distance of two identical atoms placed inside the standing wave field by monitoring the collective resonance fluorescence spectrum emitted by the two particles. We find three different parameter ranges, depending on the distance of the atoms as compared to the transition wavelength. For large interparticle distances, dipole-dipole coupling is negligible, and the main system evolution arises from the interaction with the standing wave field. In the small-distance limit, the dynamics is dominated by the dipole-dipole interaction. Finally, in the intermediate region, a rich interplay of the various couplings arises, which however is lifted for strong driving laser fields. The present measurement procedure allows us to distinguish the three cases. In each of the cases, we show how to determine the distance of the two particles and their respective positions relative to the nodes of the standing wave field with fractional-wavelength precision. 相似文献
103.
运用层析法、结晶法从狭苞橐吾全草中分离得到艾里莫芬烷型倍半萜8β-hydroxyeremophil-7(11)-ene-12,8α(4β,6α)-diolide化合物,并通过质谱、核磁共振氢谱和碳谱、氢核-氢核相关谱、异核多量子相干谱和异核多键相干谱进行结构鉴定.其单晶经X射线衍射测试表明,其晶体属正交晶系,空间群为P212121,晶胞参数为: a=6.8519(5),b=10.7191(8),c=18.5942(14)A,V=1365.67(18) A3,Z=4,Dc=1.354 mg/m3.F(000)=592,μ=0.101 mm-1 相似文献
104.
Wu Hongyi 《高校应用数学学报(英文版)》2006,21(1):96-106
A family of Said-Bézier type generalized Ball (SBGB) bases and surfaces with a parameter H over triangular domain is introduced, which unifies Bézier surface and Said-Ball surface and includes several intermediate
surfaces. To convert different bases and surfaces, the dual functionals of bases are presented. As an application of dual
functionals, the subdivision formulas for surfaces are established. 相似文献
105.
Qian-shun Chang Bo-ling GuoInstitute of Applied Mathematics Academy of Mathematics System Sciences Chinese Academy of Sciences Beijing ChinaInstitute of Applied Physics Computational Mathematics Beijing China 《应用数学学报(英文版)》2002,18(2):201-214
Abstract In this paper, a dissipative Zakharov equations are discretized by difference method.We make priorestimates for the algebric system of equations. It is proved that for each mesh size,there exist attractors forthe discretized system.The bounds of the Hausdorff dimensions of the discrete attractors are obtained,and thevarious bounds are dependent of the mesh sizes. 相似文献
106.
Guofen Yu Yuanci Gao Shenggang Liu Wenxiang Wang Jin Wu 《International Journal of Infrared and Millimeter Waves》2002,23(8):1261-1269
Analysis of the field distributions in a single biological cell under electromagnetic wave is given. With Debye approximation, the dielectric relaxation of each part of the cell, including the extracellular and cellular media, the cell membrane and the nuclear membrane, was taken into account. Making use of some typical parameters for a cell, the voltage across nuclear and cytoplasma membranes under electromagnetic waves are calculated up to millimeter wave frequency range. The calculated result indicates that it is unlikely to generate electroporation by present available millimeter wave sources. 相似文献
107.
提出了一种基于微悬臂梁传感技术研究大分子折叠/构象转变的新方法.通过分子自组装的方法将热敏性的聚N-异丙基丙烯酰胺(PNIPAM)分子链修饰到微悬臂梁的单侧表面,用光杠杆技术检测温度在20-40 ℃之间变化时由于微悬臂梁上的PNIPAM分子在水中的构象转变所引起的微悬臂梁变形.实验结果显示:在升温过程中,微悬臂梁的表面应力发生了变化并且导致微悬臂梁产生了弯曲变形,这个过程对应着微悬臂梁上的PNIPAM分子从无规线团构象到塌缩小球构象的构象转变.在降温过程中,微悬臂梁发生了反方向的弯曲变形,这对应着PNIPAM分子从塌缩小球构象向无规线团构象的构象转变.整个温度变化过程中构象转变是连续进行的,而在低临界溶解温度(约32 ℃)附近转变幅度较大,这与自由水溶液中PNIPAM分子的无规线团-塌缩小球构象转变相对应.实验结果还显示:由于PNIPAM分子在塌缩过程中氢键的形成和链段间可能的缠结效应,整个温度循环过程中微悬臂梁的变形是不可逆的且有明显的迟滞效应. 相似文献
108.
This paper proposes two constructive heuristics for the well-known single-level uncapacitated dynamic lot-sizing problem. The proposed heuristics, called net least period cost (nLPC) and nLPC(i), are developed by modifying the average period cost concept from Silver and Meal's heuristic, commonly known as least period cost (LPC). An improved tie-breaking stopping rule and a locally optimal decision rule are proposed in the second heuristic to enhance performance. We test the effectiveness of the proposed heuristics by using 20 benchmarking test problems frequently used in the literature. Furthermore, we perform a large-scale simulation study involving three factors, 50 experimental conditions, and 100?000 randomly generated problems to evaluate the proposed heuristics against LPC and six other well-known constructive heuristics in the literature. The simulation results show that both nLPC and nLPC(i) produce average holding and setup costs lower than or equal to those of LPC in every one of the 50 experimental conditions. The proposed heuristics also outperform each of the six other heuristics evaluated in all experimental conditions, without an increase in computational requirements. Lastly, considering that both nLPC and nLPC(i) are fairly simple for practitioners to understand and that lot-sizing heuristics have been commonly used in practice, there should be a very good chance for practical applications of the proposed heuristics. 相似文献
109.
Wen Zhang Hui Huang Yu Ding Margherita Gavagnin Ernesto Mollo Guido Cimino Yue‐Wei Guo 《Helvetica chimica acta》2006,89(4):813-820
Three new polyoxygenated steroids, muricesteroid ( 1 ), and menellsteroids A ( 2 ) and B ( 3 ), were isolated from two species of the South China Sea gorgonian Muricella flexuosa and Menella verrucosa Brundin , respectively. The structures of these new compounds were elucidated on the basis of extensive spectroscopic analysis, chemical methods and comparison with known related compounds. 相似文献
110.