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91.
92.
Summary Wet-chemical cleaning procedures of Si(100) wafers are surface analytically characterized and compared. Hydrophobic surfaces show considerably less native oxides in comparison to hydrophilic surfaces.The growth of the oxide is determined as a function of exposure to air by means of XPS measurements. The chemically shifted Si2p XPS signal is utilized for the quantification of the growth kinetics.One hour after cleaning no chemically shifted Si2p XPS peak is discernible on the hydrophobic surfaces. Assuming homogeneous oxide growth, the detection limit of native oxides is estimated to be below 0.05 nm using an emission angle of 18° with respect to the wafer surface. The calculation of the oxide thickness from the chemically shifted and nonchemically shifted Si2p XPS peak intensities is carried out according to Finster and Schulze [1]. For more than a day after cleaning no surface oxides can be identified on the hydrophobic surfaces. The oxide growth kinetics is logarithmic. The very slow oxidation rate cannot be attributed to fluorine residues since no fluorine is seen by XPS. We explain the slow oxidation rate by a homogeneous hydrogen saturated Si(100) wafer surface.
Oberflächenanalytische Charakterisierung oxidfreier Si(100)-Waferoberflächen相似文献
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97.
A. Benedetti P. GabrielG.L. Stephens 《Journal of Quantitative Spectroscopy & Radiative Transfer》2002,72(3):201-225
The inference of optical depth and particle size of clouds and aerosols using remotely sensed reflected radiance at solar wavelengths has received much attention recently. The information these measurements provide is path integrated. However, very little is known about the vertical distribution of this weighting. To characterize it, we first solve the radiative transfer equation (RTE) by a Green's function approach, and then investigate the sensitivity of the weighting to vertical inhomogeneities in the extinction by introducing a function that is closely related to the Green's function, herein called the contribution function. This function calculates the contributions to the radiance at the upper boundary of the medium by underlying layers. Three hypothetical clouds of identical optical depth but exhibiting different extinction profiles were used in this study. The contribution function was found very sensitive to the extinction profile. The global reflection and transmission matrices used to construct the Green's function, derived using an eigenmatrix method, resulted in an efficient, stable, and accurate method for calculating the emerging radiances that can be extended to multi-layered media. 相似文献
98.
A control volume type numerical methodology for the analysis of steady three‐dimensional rotating flows with heat transfer, in both laminar and turbulent conditions, is implemented and experimentally tested. Non‐axisymmetric momentum and heat transfer phenomena are allowed for. Turbulent transport is alternatively represented through three existing versions of the k–ε model that were adjusted to take into account the turbulence anisotropy promoted by rotation, streamline curvature and thermal buoyancy. Their relative performance is evaluated by comparison of calculated local and global heat balances with those obtained through measurements in a laboratory device. A modified version of the Lam and Bremhorst, low Reynolds number model is seen to give the best results. A preliminary analysis focused on the flow structure and the transfer of heat is reported. Copyright © 2002 John Wiley & Sons, Ltd. 相似文献
99.
L. V. Soboleva A. E. Voloshin V. A. Kirikov M. V. Biglova 《Crystallography Reports》2002,47(1):130-134
Based on the analysis of the K2O-P2O5-D2O solubility phase diagram, the optimum conditions of KD2PO4 crystallization—the compositions of mother solutions and the temperature range of crystallization—in the KH2PO4-D2O system have been determined. The technique of K(DxH1 ? x )2PO4 growth is developed. The DKDP single crystals with deuterium concentration up to 88 wt % are grown on DKDP seeds from KH2PO4 solutions in D2O by the method of temperature decrease. 相似文献
100.
L. Galeone C. Mastroserio M. Montrone 《Numerical Methods for Partial Differential Equations》1989,5(2):79-86
This paper presents the study of the numerical solution of a reaction-diffusion system involving a reaction term of integral type arising from biological models. By means of a monotone approach we introduce upper and lower solutions and then we show the existence and the asymptotic behavior of nonnegative numerical solutions. To this end, we require the positivity of the numerical scheme and so we can use some properties of positive and M-matrices. Finally we give some sufficient conditions to verify the asymptotic stability of the numerical solution. 相似文献