Laser writing techniques for photomask fabrication using a femtosecond laser

Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography. In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side laser writing. Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001     

高功率飞秒脉冲激光器的进展

概述了超短激光脉冲技术发展的历程。详尽的论述了啁啾脉冲放大技术的原理和一些关键技术 ,并对当今飞秒激光器研究发展的状况进行了综述。在分析其应用前景的基础上 ,进一步指出了这一技术领域未来的发展趋势。结果表明 ,脉冲激光放大系统以后的发展方向是 :更短脉冲 ;追求更高峰值功率 ;连续光谱调谐化 ;向小型化乃至全光纤化发展。     

DISTORTION THEOREM FOR BIHOLOMORPHIC MAPPINGS IN TRANSITIVE DOMAINS (III)

The distortion theorem for biholomorphic convex mappings in bounded symmetric domains are considered. Especially the distortion theorem for biholomorphic convex mappings in classical domain of type IV and two exceptional domains are given.     

Accurate mass measurements of organic compounds by an internal standard method for laser desorption/electron impact fourier transform mass spectrometry

A method for determining accurate relative molecular masses and elemental compositions of several non-volatile and thermally labile organic compounds in the source cell was established. The experimental sequence included laser desorption/electron impact Fourier transform mass spectrometry and direct-mode observation over a narrow mass range. Perfluorotributylamine was used as internal calibrant. Errors were about 1 ppm.     

三种群食物链交错扩散模型的整体

本文应用能量估计方法和Gagliardo-Nirenberg型不等式证明了一类强耦合反应扩散系统整体解的存在性和一致有界性，该系统是带自扩散和交错扩散项的三种群Lotka-Volterra食物链模型．通过构造Lyapunov函数给出了该模型正平衡点全局渐近稳定的充分条件．     

Chemical Constituents of Ligusticum sinensis Oliv.

The new phenylpropanoid diglycoside ligusinenoside A ( 1 ), and the two new 8,4′‐oxyneolignan(‘8‐O‐4′‐neolignan’) diglycosides ligusinenosides B ( 2 ) and C ( 3 ), together with nine known compounds, were isolated from the rhizomes of Ligusticum sinensis Oliv. The structures of 1 – 3 were elucidated on the basis of spectroscopic analyses.     

代数体函数的定理

本文定义并研究了代数体函数的加法．结合杨乐的方法,将仪洪勋联系重值的亚纯函数唯一性定理推广到多值的代数体函数．     

Monte Carlo方法研究低能电子束曝光沉积能分布规律

建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率. 关键词： 电子束曝光 MonteCarlo方法 低能电子散射 能量沉积