50.
The large ultraviolet spectrograph for analysis in vacuum (VUV spectrograph) developed by ONERA and described in a previous article, has been used for multielements quantitative analysis: in pure titanium, concentrations of oxygen, nitrogen, hydrogen and carbon have been determined as well as silicon and iron impurities; in titanium-based alloys, addition metals at high concentration, Al, V, Mo, Zr, Si, have also been determined simultaneously with the gaseous elements and impurities. The analytical lines located between 200 and 2600 Å and corresponding to highly ionized atoms (II to VI) have been selected. The stability of the equipment has been tested and the repeatability of results has been investigated. This new analytical technique allows the study of various surface phenomena such as the variations in oxygen, nitrogen and carbon concentrations with a resolution in depth of a few microns. The method allows it to envisage the quantitative analysis of surface phenomena on metal films with a thickness below one micron.
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