Low-NOx NH3-air combustion power generation technology was developed by using a 50-kWe class micro gas-turbine system at the National Institute of Advanced Industrial Science and Technology (AIST), Japan, for the first time. Based on the global demand for carbon-free power generation as well as recent advances involving gas-turbine technologies, such as heat-regenerative cycles, rapid fuel mixing using strong swirling flows, and two-stage combustion with equivalence ratio control, we developed a low-NOx NH3-air non-premixed combustor for the gas-turbine system. Considering a previously performed numerical analysis, which proved that the NO reduction level depends on the equivalence ratio of the primary combustion zone in a NH3-air swirl burner, an experimental study using a combustor test rig was carried out. Results showed that eliminating air flow through primary dilution holes moves the point of the lowest NO emissions to the lesser fuel flow rate. Based on findings derived by using a test rig, a rich-lean low NOx combustor was newly manufactured for actual gas-turbine operations. As a result, the NH3 single fueled low-NOx combustion gas-turbine power generation using the rich-lean combustion concept succeeded over a wide range of power and rotational speeds, i.e., below 10–40 kWe and 75,000–80,000?rpm, respectively. The NO emissions were reduced to 337?ppm (16% O2), which was about one-third of that of the base system. Simultaneously, unburnt NH3 was reduced significantly, especially at the low electrical power output, which was indicative of the wider operating range with high combustion efficiency. In addition, N2O emissions, which have a large Global Warming Potential (GWP) of 298, were reduced significantly, thus demonstrating the potential of NH3 gas-turbine power generation with low environmental impacts. 相似文献
A compositional graded film of poly(ε‐caprolactone) (PCL) with 4,4′‐thiodiphenol (TDP), in the film thickness direction, was fabricated by self‐diffusing of TDP in the PCL melt. We found out the self‐bending deformation of the gradient film, which bent into a rolled‐up shape by itself. The initial shape of the film was flat when the sample was quenched from the melt. Upon the fast crystallization of PCL, the gradient film bent to the side with low TDP content. Then, after PCL crystallized the film bent to the opposite direction, that is, to the side with high TDP content. This bending to the TDP rich region was induced by not only the crystallization of PCL but also mass transfer due to the diffusion of TDP from TDP rich region to poor region.
Monodisperse poly(D ,L ‐lactide) (PDLLA) microspheres have been prepared by dispersion polymerization of D ,L ‐lactide with a synthetic polymeric stabilizer. The polymerization is carried out in xylene/heptane (1:2, v/v) at 368 K for 3 h with poly[(dodecyl methacrylate)‐co‐(2‐hydroxyethyl methacrylate)] (P(DMA‐co‐HEMA)). P(DMA‐co‐HEMA) has hydroxy groups as an initiation group for pseudoanionic dispersion polymerization. The particle diameter and the coefficient of variation concerning the diameter distribution of the obtained PDLLA microspheres are 3.9 µm and 4.3%, respectively. In addition, from the results of dynamic light scattering measurements, it is found that P(DMA‐co‐HEMA) and the PDLLA‐grafted copolymer form a micellar structure in solution.
Cu electroplating is required for the fabrication of Cu/low-k interconnections. The permeation of a plating solution into low-k films during Cu electroplating is a serious challenge for 45-nm nodes and more complex devices. We investigated the influence of Cu electroplating solutions on boron carbon nitride (BCN) as a low-k film. After dipping it into a Cu electroplating solution that contained additives, the BCN film's hydrophilic surface changed to a hydrophobic surface, and the incorporation of water into the BCN film was suppressed by surfactant adsorption. Sulfuric residue was detected on the BCN sample by thermal desorption spectroscopy after treatment in the Cu electroplating solution with additives; however, it was found through electrical measurements that this solution did not affect the leakage current or the dielectric constant of the BCN film. We successfully fabricated an electroplating Cu layer on a BCN film with good adhesion, and we believe that this BCN film is a sufficiently useful material for Cu/BCN integration in LSI. 相似文献
For the purpose of improving the visible method of γ-rays detection, detailed conditions with various acids have been examined for the color development of a fluoran-based black color former in acetonitrile. It is suggested that the protons (H+), which may be produced from acid generators by γ-ray radiation, can be properly detected by the color development of the black color former containing proper kinds and concentrations of bases. Reversible decolorization through the interaction between Mg2+ and polyamines (acyclic and macrocyclic) has been examined in order to reconfirm that the colored zwitterion is produced by the direct chemical interaction with Mg (ClO4)2 in the fluoran dye–acetonitrile solution. 相似文献
Transparent SiO2 thin films were selectively fabricated on Si wafer by 157 nm F2 laser in N2/O2 gas atmosphere. The F2 laser photochemically produced active O(1D) atoms from O2 molecules in the gas atmosphere; strong oxidation reaction could be induced to fabricate SiO2 thin films only on the irradiated areas of Si wafer. The oxidation reaction was sensitive to the single pulse fluence of F2 laser. The irradiated areas were swelled and the height was approximately 500-1000 nm at the 205-mJ/cm2 single pulse fluence for 60 min laser irradiation. The fabricated thin films were analytically identified to be SiO2 by the Fourier-transform IR spectroscopy. The SiO2 thin films could be also removed by subsequent chemical etching to fabricate micro-holes 50 nm in depth on Si wafer for microfabrication. 相似文献