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91.
92.
随着光刻特征尺寸的不断减小,硅片表面不平度对光刻性能的影响越来越显著.该文提出了一种新的硅片表面不平度的原位检测技术本文在分析特殊测试标记成像规律的基础上,讨论了测试标记的对准位置偏移量与硅片表面起伏高度的变化规律,提出了一种新的硅片表面不平度原位检测技术.实验表明,该技术可实现硅片表面不平度及硅片表面形貌的高准确度原位测量.该技术考虑了光刻机承片台吸附力的非均匀性对硅片表面不平度的影响,更真实反映曝光工作状态下的硅片表面不平度大小.与现有的原位检测方法相比,硅片表面不平度的测量空间分辨率提高了1.67%倍,可实现硅片表面形貌的原位检测. 相似文献
93.
Shi Hu Han Xi Liang Wang Yong Fan 《International Journal of Infrared and Millimeter Waves》2006,27(10):1391-1402
An improved generalized admittance (GAM) matrix technique is presented in this paper. Matrix transformation eliminates the
singularity factor of GAM, denominator (1+Γ), because of new presentations of GAM. The relationship equations between II-port
current and I-port incidence wave is computed by mode matching method. The generalized scattering matrix (GSM) of waveguide
structure and its discontinuity problems is obtained with relationship equations and reflection coefficients. The GSM’s of
millimeter-wave multistepped bend and T-junction in rectangular waveguide are computed by the improved GAM technique. The
results comparisons between the proposed method and commercial software HFSS10.0 show the validity of the proposed method,
which improves the validity of the GAM technique and reduces mathematical efforts. It is general, very efficient and can be
used to solve other complicated and multiport network problems. 相似文献
94.
95.
Dandan?Lian Bing?Shi Rongrong?Dai Xiaohua?JiaEmail author Xiangyang?WuEmail author 《Journal of nanoparticle research》2017,19(12):401
A kind of novel ZnSnO3/SnO2 hollow urchin nanostructure was synthesized by a facile, eco-friendly two-step liquid-phase process. The structure, morphology, and composition of samples were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), and nitrogen adsorption–desorption techniques. The results revealed that many tiny needle-like SnO2 nanowires with the average diameter of 5 nm uniformly grew on the surface of the ZnSnO3 hollow microspheres and the ZnSnO3/SnO2 hollow urchin nanostructures with different SnO2 content also were successfully prepared. In order to comprehend the evolution process of the ZnSnO3/SnO2 hollow urchin nanostructures, the possible growth mechanism of samples was illustrated via several experiments in different reaction conditions. Moreover, the gas-sensing performance of as-prepared samples was investigated. The results showed that ZnSnO3/SnO2 hollow urchin nanostructures with high response to various concentration levels of acetone enhanced selectivity, satisfying repeatability, and good long-term stability for acetone detection. Specially, the 10 wt% ZnSnO3/SnO2 hollow urchin nanostructure exhibited the best gas sensitivity (17.03 for 50 ppm acetone) may be a reliable biomarker for the diabetes patients, which could be ascribed to its large specific surface area, complete pore permeability, and increase of chemisorbed oxygen due to the doping of SnO2. 相似文献
96.
Sulfur K-edge X-ray absorption near-edge structure spectroscopy and chemical sequential extraction was respectively used to study the speciation of sulfur in two sulfur-rich soils samples. Sulfur K-edge X-ray absorption near-edge structure spectroscopy analysis obtained a variety of spectra. Spectral fitting of the X-ray absorption near-edge structure spectra utilizing a large set of model compounds showed great differences between these two sulfur-rich soil samples. It was found that both of the soil samples had high sulfur content (8.40 and 11.57?g?kg?1, respectively). Chemical extraction results suggested that sulfur mainly existed as organic in the ancient paddy soil (7.37?g?kg?1) and more reduced sulfur was identified in it. X-ray absorption near-edge structure spectroscopy also got similar results. These organic forms of sulfur existed in organic matter across a range of oxidation states. There was high proportion of oxidized sulfur in the sulfuric acid plant that mainly existed as sulfate. 相似文献
97.
Junmin Xu Haibing Tang Tingting Xu Di Wu Zhifeng Shi Yongtao Tian Xinjian Li 《Ionics》2017,23(12):3273-3280
Porous hollow metal oxides derived from nanoscaled metal-organic framework (MOF) have drawn tremendous attention due to their high electrochemical performance in advanced Li-ion batteries (LIBs). In this work, porous NiO hollow quasi-nanospheres were fabricated by an ordinary refluxing reaction combination of a thermal decomposition of new nanostructured Ni-MOF, i.e., {Ni3(HCOO)6·DMF}n. When evaluated as an anode material for lithium ion batteries, the MOF derived NiO electrode exhibits high capacity, good cycling stability and rate performance (760 mAh g?1 at 200 mA g?1 after 100 cycles, 392 mAh g?1 at 3200 mA g?1). This superior lithium storage performance is mainly attributed to the unique hollow and porous nanostructure of the as-synthesized NiO, which offer enough space to accommodate the dramstic volume change and alleviate the pulverization problem during the repeated lithiation/delithiation processes, and provide more electro-active sites for fast electrochemical reactions as well as promote lithium ions and electrons transfer at the electrolyte/electrode interface. 相似文献
98.
GaN基高电子迁移率晶体管(HEMT)作为栅控器件,具有AlGaN/GaN异质结处高浓度的二维电子气(2DEG)及对表面态敏感等特性,在栅位置处与感光功能薄膜的结合是光探测器领域重要的研究方向之一.本文首先提出在GaN基HEMT栅电极上引入光敏材料锆钛酸铅(PZT),将具有光伏效应的铁电薄膜PZT与HEMT栅极结合,提出一种新的"金属/铁电薄膜/金属/半导体(M/F/M/S)"结构;然后在以蓝宝石为衬底的AlGaN/GaN外延片上制备感光栅极HEMT器件.最后,通过PZT的光伏效应来调控沟道中的载流子浓度和通过源漏电流的变化来实现对可见光和紫外光的探测.在365 nm紫外光和普通可见光条件下,对比测试有/无感光栅极的HEMT器件,在较小V_(gs)电压时,可见光下测得前者较后者的饱和漏源电流I_(ds)的增幅不下降,紫外光下前者较后者的I_(ds)增幅大5.2 mA,由此可知,感光栅PZT在可见光及紫外光下可作用于栅极GaN基HEMT器件并可调控沟道电流. 相似文献
99.
In this work, we calculate the equation of state(EoS) of quark gluon-plasma(QGP) using the CornwallJackiw-Tomboulis(CJT) effective action. We get the quark propagator by using the rank-1 separable model within the framework of the Dyson-Schwinger equations(DSEs). The results from CJT effective action are compared with lattice QCD data. We find that, when μ is small, our results generally fit the lattice QCD data when TT_c,but show deviations at and below T_c. It can be concluded that the EoS of CJT is reliable when TT_c. Then,by adopting the hydrodynamic code UVH2+1, we compare the CJT results of the multiplicity and elliptic flow v2 with the PHENIX data and the results from the original EoS in UVH2+1. While the CJT results of multiplicities generally match the original UVH2+1 results and fit the experimental data, the CJT results of v2 are slightly larger than the original UVH2+1 results for centralities smaller than 40% and smaller than the original UVH2+1 results for higher centralities. 相似文献
100.
The sherds of terra-cotta warriors and horses and Lishan clay were characterized by Mossbauer spectroscopy, XRD, XRF, NAA,
thermal and chemical analyses. Lishan clay was testified as the original material of terracotta warriors and horses, the kilning
of these warriors and horses was first carried out in an oxidizing atmosphere, and then changed to a predominantly reducing
atmosphere. With refiring experiments, the temperatures of Q3 and Q4 samples were determined to be 830±50 and 980±50°C respectively.
Transformations of Lishan clay were determined by firing in oxidizing and reducing atmospheres. The Mossbauer parameters of
Lishan clay, which was taken after 2–24h firing, were changing up to 12h. 相似文献