Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features

While anodic bonding is commonly used in a variety of microelectromechanical systems (MEMS) applications, devices and substrates that incorporate this processing technique are often subjected to significant residual stress and curvature that create post-processing and reliability issues. Here, using an anisothermal anodic bonding procedure, residual stresses and the resulting wafer curvature in these structures are controlled by varying the initial bond temperatures of the silicon and Pyrex wafers independently. Residual stresses are quantified by measuring bulk wafer curvature and, locally, stress concentrations are measured using infrared photoelasticity accompanied by 3-D thermomechanical finite element analysis. Based on the good agreement between numerical predictions and experimental results, this process can be used to determine the bulk post-bond wafer curvature and to reduce the likelihood of structural failure at these sites, by changing the residual stresses from tensile in nature, which may drive initiation and growth of cracks, to compressive, which can suppress such failures.     

Robust adaptive sliding mode control for synchronization of space-clamped FitzHugh–Nagumo neurons

Unlike taking the same external electrical stimulation to discuss chaotic synchronization in the literature, the synchronization between two uncouple FitzHugh?CNagumo (FHN) neurons with different ionic currents and external electrical stimulations is considered. The main contribution of this study is the application of a robust adaptive sliding-mode controller instead of the active elimination. The proposed sliding mode controller associated with time varying feedback gains cannot only tackle the system uncertainties and external disturbances, but also compensate for the mismatch nonlinear dynamics of synchronized error system without direct cancellation. Meanwhile, these feedback gains are not determined in advance but updated by the adaptive laws. Sufficient conditions to guarantee the stable synchronization are given in the sense of the Lyapunov stability theorem. In addition, numerical simulations are also performed to verify the effectiveness of presented scheme.     

Experimental study of enhanced emission of the laser-ablated plume in backing gas

The effects of background gases on the optical emission of the excimer-laser-ablated plume from a brass target have been studied experimentally. It is found that the plume emission can be enhanced significantly in a proper gas ambient. In hydrogen, the highest peak intensity is detected, and in argon, there is a distinctive difference in the pressure-dependent emission between in He and in the other three gases, Ar, N₂ and H₂. Moreover, the monitored line peak intensity remains unchanged in Ar and N₂ and increases in H₂ within a distance above the target surface; but in He, the observed peak intensity decreases with distance like in vacuum. Furthermore, the emissions of several more atomic lines of Cu and Zn atoms from the plume are also found to be enhanced in the same manner in gas ambient. Some physical processes involved in the plume expansion and the possible mechanisms for the enhanced emission of the plume in backing gas are discussed.     

北京自由电子激光最近进展──实现饱和振荡

北京自由电子激光(BFEL)装置于1993年底在10.68μm处实现了饱和振荡.输出激光能量为3mJ,饱和平顶宽度2μs.对应饱和振荡平均功率为210kW(宏脉冲),峰值功率约为20MW,比自发辐射高8个量级,单程小讯号净增益为24%,转换效率为0.45%,与理论预期结果相符.光束质量接近衍射极限.目前装置可工作于9-11μm.     

准弹性激光光散射在血细胞检测中的应用

本文利用准弹性激光散射法和细胞电泳法对不同哺乳动物的红细胞,淋巴细胞、粒细胞进行检测,结果表明在一定条件下,不同类型的血细胞平均电泳速度有明显差别。这一结果为光散射法应用于血细胞检测提供了可能性。     

利用不完全自锁模激光研究C60的反饱和吸收效应

本文报道首次采用色心晶体的不完全自锁模激光（１０６４ｎｍ）对Ｃ６０分子反饱和吸收效应的研究，实验结果与采用平均过程的研究方法是一致的，文中还讨论了Ｃ６０分子反饱和吸收效应产生的原因。     

Convergent-beam electron diffraction of CaZr4O9, a complex zirconia alloy phase

The point-group and space-group symmetry of the controversial fluorite-based stoichiometric superlath phase of ø₁ (CaZr₄O₉: Z=16), considered to be a coherently-intergrown subphase of lime-stabilized zirconia, is examined. Using convergent-beam and selected-area electron diffraction, it is determined that the space group of ø₁ is C2/c, in apparent agreement with earlier studies utilizing other diffraction techniques.     

镓一镁二元相图研究

本文用两种差热分析方法即“一步法”和“二步法”以及多晶X-射线衍射法对镓-镁二元系相图进行了研究.修正了前人的工作. 为了考察该二元体系的金属间化合物是否以镓原子多面体簇状结构存在,作者对富镓部分相图(镓原子百分含量大于71.4％)进行了较为细致的研究.在三种不同比例下(含镓量分别为85at.％、90at.％、95at.％)合成,分离得到了颗粒状晶体.对这些晶体进行了差热分析和多晶X-射线研究.分析结果表明:从这三种不同比例的合金中分离得到的晶体为同一金属间化合物Mg_2Ga_5,也是该二元系镓含量最高的金属间化合物.考察Ga-Mg体系中存在的五种金属间化合物的结构,未能发现镓原子以多面体簇状结构存在的现象.