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11.
The dry etching characteristics of transparent and conductive indium-zinc oxide (IZO) films have been investigated using an inductively coupled high-density plasma. While the Cl2-based plasma mixture showed little enhancement over physical sputtering in a pure argon atmosphere, the CH4/H2/Ar chemistry produced an increase of the IZO etch rate. On the other hand, the surface morphology of IZO films after etching in Ar and Ar/Cl2 discharges is smooth, whereas that after etching in CH4/H2/Ar presents particle-like features resulting from the preferential desorption of In- and O-containing products. Etching in CH4/H2/Ar also produces formation of a Zn-rich surface layer, whose thickness (∼40 nm) is well-above the expected range of incident ions in the material (∼1 nm). Such alteration of the IZO layer after etching in CH4/H2/Ar plasmas is expected to have a significant impact on the transparent electrode properties in optoelectronic device fabrication. 相似文献
12.
So-Yon Lim Matt Meyer Richard A Kjonaas Swapan K Ghosh 《Journal of immune based therapies and vaccines》2007,5(1):3-1
This is a correction article. 相似文献
13.
Young-Bae Seu Taeg-Kyeong Lim Chang-Jin Kim Sun-Chul Kang 《Tetrahedron: Asymmetry》1995,6(12):3009-3014
Optically active epoxy alcohol, (R)-2-butyryloxymethylglycidol3 which is the precursor of a tert-alcohol chiral building block was obtained in high enantiomeric purity, 98.7% e.e., by lipase-catalyzed asymmetric hydrolysis using a phosphate buffer and organic co-solvent system in 95% of chemical yield. 相似文献
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16.
A new porphyrin, peroxyacetic acid uroporphyrin I, has been isolated from the urine of patients with congenital erythropoietic porphyria by reversed phase high performance liquid chromatography. The porphyrin was characterized by high resolution mass spectrometry and by typical chemical reactions of a peroxyacid. 相似文献
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P. J. Bream J. J. Lim S. Bull A. V. Andrianov S. Sujecki E. C. Larkins 《Optical and Quantum Electronics》2006,38(12-14):1019-1027
We describe the inclusion of nonequilibrium gain into a self-consistent 2.5D CW spectral laser diode model and report on the use of this model to investigate the origin of gain compression in a 975 nm high-brightness tapered QW laser diode. Nonequilibrium gain is calculated using a dynamic gain model, which simulates the dynamic relaxation of the quantum well carrier energy distributions under the influence of steady-state electrical and optical excitation. Calculated gain and spontaneous emission spectra are included in the laser model via parameterised look up tables. Both simulated and experimentally measured intracavity spontaneous emission spectra show an increased carrier density and a blue-shift of the gain maximum with increasing bias caused by carrier heating and spectral hole burning. The accurate incorporation of nonequilibrium gain compression is therefore vital for the accurate prediction of the operating characteristics of these devices and for the experimental determination of the active region temperature. 相似文献
19.
T.W. Lim S.H. Park D.Y. Yang H.J. Kong K.S. Lee 《Applied Physics A: Materials Science & Processing》2006,84(4):379-383
A nano-surfacing process (NSP) is proposed to directly fabricate three-dimensional (3D) concavo–convex-shaped microstructures such as micro-lens arrays using two-photon polymerization (TPP), a promising technique for fabricating arbitrary 3D highly functional micro-devices. In TPP, commonly utilized methods for fabricating complex 3D microstructures to date are based on a layer-by-layer accumulating technique employing two-dimensional sliced data derived from 3D computer-aided design data. As such, this approach requires much time and effort for precise fabrication. In this work, a novel single-layer exposure method is proposed in order to improve the fabricating efficiency for 3D concavo–convex-shaped microstructures. In the NSP, 3D microstructures are divided into 13 sub-regions horizontally with consideration of the heights. Those sub-regions are then expressed as 13 characteristic colors, after which a multi-voxel matrix (MVM) is composed with the characteristic colors. Voxels with various heights and diameters are generated to construct 3D structures using a MVM scanning method. Some 3D concavo–convex-shaped microstructures were fabricated to estimate the usefulness of the NSP, and the results show that it readily enables the fabrication of single-layered 3D microstructures. PACS 85.40.Hp; 81.16.Nd; 42.82.Cr 相似文献
20.
Y. Zhao W.C. Zhai W.L. Seah K.Y. Lim F.C. Cheong C.H. Sow 《Applied physics. B, Lasers and optics》2007,87(2):243-247
A study of the variation of the spectral shape and the harmonic distribution of the high-order harmonics generated from silver
plasma on the frequency chirp of the driving laser radiation (793 nm 48 fs) is reported. The results of the systematic study
of the harmonic generation from the 21st order up to the 61st order (λ=13 nm) are presented. A tuning of the harmonic wavelength
up to 0.8 nm can be accomplished by variation of the laser chirp.
PACS 42.65.Ky; 42.79.Nv; 52.38.Mf 相似文献