X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

Nanoparticle composites: FePt with wide-band-gap semiconductor

We present a simple way to synthesize FePt and ZnO (wide-band-gap semiconductor) nanoparticle composites. The FePt nanoparticles were fabricated using the method reported by Sun et al. By controlling the heating rate, 3 nm FePt nanoparticles were synthesized. Well-dispersed FePt and ZnO nanoparticle composites were prepared by further adding zinc acetate and oleyl amine into the 3 nm FePt nanoparticle dispersion. By controlling the molar ratio of the FePt and zinc acetate, FePt and ZnO nanoparticle composites with different FePt particle fractions were obtained. The intensity of photo luminescence spectra of the nanoparticle composites increases very much with decreasing FePt particle fraction, whereas the peak position shifts a little. After annealing at 550 °C for half an hour, the nanoparticle composites become magnetically hard or semi-hard with coercivity much dependent on the FePt particle volume fraction. The coercivity of the composites increases with annealing temperature. The composites hold the promise of applications in new generation recording and/or optical devices.     

Micromagnetic analysis of transition noise for high-density perpendicular recording

In this paper, specific issues related to high-density perpendicular magnetic recording processes, such as transition noise properties and cross-track correlation lengths, were investigated with the help of micromagnetic analysis. The effects of media parameters were taken into consideration, including intergranular exchange coupling, and exchange distribution, irregular grain shapes, magnetization saturation distribution, and anisotropy distribution. The micromagnetic simulation results showed that the effect of anisotropy distribution on transition noise is more significant than magnetization saturation distribution, and it is crucial to reduce this effect to achieve a high signal-to-noise ratio. Additionally, a new method to further estimate the partial erasure threshold was proposed to approximate the partial erasure effects, and the relation between the microtrack jitter and total track jitter was investigated.     

Magneto resistance due to domain wall scattering and magneto size effect of thin Ni and Co films at low temperatures

Nickel and cobalt films illustrate alternative Bloch lines with cap switches. The strip magnetic domains become zigzag and bubbling cells for Ni and Co films, respectively, under an external field of 1.5 T. The magnetoresistances (MR) for currents parallel (CIW) to the domain walls is 15% less than those of the perpendicular (CPW) case. We also studied the magneto size effect by applying the magnetic field normal to the surface, from which the Sondheimer oscillation appears attributing to periodic striking of the surface for electrons traveling in circular motion on a plane canting to the surface. The experiments can be expressed by the magneto size effect inherited with very small specularity parameters.     

Ionic relaxation in nematic liquid crystal cells

We investigate the dependence of the relaxation time of the current flowing in a nematic cell submitted to an external dc voltage on the physical properties of the substrate. We show that previously presented analyses of the same problem are not very useful for practical applications. We compare our theoretical predictions with experimental data, and show that the agreement is rather good. The influence of the adsorption-desorption phenomenon on the relaxation time is also discussed.     

Raman spectroscopy of acoustic phonons in periodic and Fibonacci superlattices

Results of Raman scattering experiments on (a) periodic superlattices made up of GaAs/In_xGa_1−xAs layers with high indium concentrations, (b) GaAs/Ga_1−xAl_xAs Fibonacci superlattices, are presented. We discuss the observed peak positions and intensities using the continuum theory of acoustic wave propagation in layered media and the photo-elastic coupling model.     

Deposition conditions in tailoring the morphology of highly porous reticular films prepared by electrostatic spray deposition (ESD) technique

Spongy-like reticular structure is a unique morphology fabricated by electrostatic spray deposition (ESD) technique. The effects of solvent, substrate temperature, precursor feeding rate, static electric field strength, and deposition time on tailoring the reticular structure were investigated. Scanning electron microscopy was used to observe the film morphology. MnO_x or LiMn₂O₄ were selected as the model materials. It is found that in addition to the conventional solvent butyl carbitol, other kinds of solvents such as ethylene glycol and propylene glycol can also be used to obtain reticular films at a suitable substrate temperature. Porous films with a low cross-linking degree pore structure can be prepared by increasing precursor feeding rate or decreasing substrate temperature. Increasing the deposition time or the electric field strength helps to obtain reticular films with more homogeneous pore size distribution. In addition, the addition of a high boiling-point solvent in mixed alcohol solvent results in the increase of proper substrate temperature. It is concluded that the fluidity of the spray droplets on the surface of a hot substrate is an important factor to form a reticular film.     

Characterization of oxide thin films using optical techniques

Thin films of oxide materials are playing a growing role as critical elements in optoelectronic devices and nanoscale devices. In this work, thin films of some typical oxides such as WO₃, Ga₂O₃ and SrTiO₃ were investigated. We present measurements of those films, using various optical techniques like photoconductivity transients over a wide time range and photo-Hall measurements. Analysis of the photo-Hall and photoconductivity data permits the determination of the contribution to the photoconductivity made by the carrier mobility and concentration. A model for dispersive carrier transport was proposed to explain the relaxation of the photoconductivity in oxide thin films. In addition, photoluminescence characterization was used to study microstructures and energy band in oxide thin films. The broad emission from oxide host, consisting of several band peaks, was likely due to a recombination process with several possible paths. The dependence of the luminescent intensity on the annealing atmosphere was associated with the presence of oxygen vacancies. It is suggested that our optical analysis efforts have improved the understanding of oxide thin films, and this should lead to the necessary advancements in a variety of devices.     

The Design of Single Mode Large Cross-section Glass-based Waveguides for Photonic Integrated Circuits

This paper presents our recent simulation results and novel designs of single mode large cross-section glass-based waveguides for photonic integrated circuits (PICs). Simulations were performed using an in-house Finite Difference (FD) based mode solver and the FD Beam propagation Method (FD-BPM). Our simulation results show that this innovative technology could provide a simplified means to couple optical energy efficiently between optical components in a single chip. This would provide the base for the future large-scale integration of optical components in PICs. The novel idea of using single mode large cross-section glass-based waveguides as an optical integration platform is an evolutionary innovative solution for the monolithic integration of optical components, in which the glass-based structures act both as waveguides and as an optical bench for integration. This allows easy and efficient optical coupling between optical components and optical fibres, removing costly and tedious alignment problems and considerably reducing optical coupling losses in PICs. We expect that the glass-based waveguide PICs technology will enable the emergence of a new generation of compact, reliable, high speed, and multifunctional devices.