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Soo Ouk Jang Hyun Jong You Young-Woo Kim Yong Ho Jung In Uk Hwang Jae Yang Park Heon Lee 《Plasma Chemistry and Plasma Processing》2014,34(1):229-237
To deposit copper seed layer on ultra large scale integration devices, a large-area (Ø 378 mm) electron cyclotron resonance plasma has been generated by using permanent magnets-embedded Lisitano antenna. The plasma source operates in the pressure range of 0.2–1.5 mTorr with microwave power range of 500–2,000 W. By using a Langmuir probe, the electron density and temperature have been measured near the DC sputter target position. Measurements indicate argon plasmas having electron densities of ~5 × 1010/cm and electron temperatures of 5 eV with 750 W microwave power at gas pressures of 0.5 mTorr. Using this plasma source and a DC sputter, we obtained excellent conformal copper seed layer with high aspect ratios of 12:1. This is in contrast with conventional methods using magnetron sputter, which has aspect ratios of 2–3:1. Also, improvements are observed in the smoothness (root mean square roughness of 1.345 nm), uniformity (2.5 % at 300 mm wafer), and sidewall symmetricity (more than 95 %) of the copper seed layer. 相似文献
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Do-Geun Jang Jinju Kim Inhyuk Nam Min Sup Hur Hyyong Suk 《Current Applied Physics》2012,12(5):1252-1255
Generation of strong THz waves is a very important and difficult research issue. We performed particle-in-cell (PIC) simulation studies to investigate the possibility of powerful THz generation and spectrum controllability by using a laser-driven plasma wave. Our results show that it is possible to produce spectrum-controllable high-power (>1 MV/cm) THz waves by manipulating the plasma density profiles. This method may provide a good way for coherent high-power THz radiation sources, of which the spectrum ranges from a narrow bandwidth to a wide bandwidth. 相似文献
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Park Hye Min Kim Jeong Ho Kim Young Seok Kang Sung Won Oh Dae Min Lee Un Jang Kim Do Hyung Joo Koan Sik 《Journal of Radioanalytical and Nuclear Chemistry》2018,317(2):1051-1057
Journal of Radioanalytical and Nuclear Chemistry - An in situ detector for radiological assessments of strontium-90 (90Sr) in river and lake water is developed, based on a CaF2(Eu) scintillator,... 相似文献
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Bijesh Sekaran Youngwoo Jang Prof. Dr. Rajneesh Misra Prof. Dr. Francis D'Souza 《Chemistry (Weinheim an der Bergstrasse, Germany)》2019,25(56):12991-13001
A new set of free-base and zinc(II)-metallated, β-pyrrole-functionalized unsymmetrical push–pull porphyrins were designed and synthesized via β-mono- and dibrominated tetraphenylporphyrins using Sonogashira cross-coupling reactions. The ability of donors and acceptors on the push–pull porphyrins to produce high-potential charge separated states was investigated. The porphyrins were functionalized at the opposite β,β′-pyrrole positions of porphyrin ring bearing triphenylamine push groups and naphthalimide pull groups. Systematic studies involving optical absorption, steady-state and time-resolved emission revealed existence of intramolecular type interactions both in the ground and excited states. The push–pull nature of the molecular systems was supported by frontier orbitals generated on optimized structures, wherein delocalization of HOMO over the push group and LUMO over the pull group connecting the porphyrin π-system was witnessed. Electrochemical studies were performed to visualize the effect of push and pull groups on the overall redox potentials of the porphyrins. Spectroelectrochemical studies combined with frontier orbitals helped in characterizing the one-electron oxidized and reduced porphyrins. Finally, by performing transient absorption studies in polar benzonitrile, the ability of push–pull porphyrins to produce charge-separated states upon photoexcitation was confirmed and the measured rates were in the range of 109 s−1. The lifetime of the final charge separated state was around 5 ns. This study ascertains the importance of push–pull porphyrins in solar energy conversion and diverse optoelectronic applications, for which high-potential charge-separated states are warranted. 相似文献
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Iseul Jeong Chae Bin Kim Dong‐Gue Kang Kwang‐Un Jeong Se Gyu Jang Nam‐Ho You Seokhoon Ahn Dai‐Soo Lee Munju Goh 《Journal of polymer science. Part A, Polymer chemistry》2019,57(6):708-715
To address tremendous needs for developing efficiently heat dissipating materials with lightweights, a series of liquid crystalline epoxy resins (LCEs) are designed and synthesized as thermally conductive matrix. All prepared LCEs possess epoxies at the molecular side positions and cyanobiphenyl mesogenic end groups. Based on several experimental results such as differential scanning calorimetry, polarized optical microscopy, and X‐ray diffraction, it is found that the LCEs exhibited liquid crystalline mesophases. When LCE is cured with a diamine crosslinker, the cured LCE maintains the oriented LC domain formed in the uncured state, ascribing to a presence of dipole–diploe and π–π interactions between cyanobiphenyl mesogenic end groups. Due to the anisotropic molecular orientation, the cured LCE exhibits a high thermal conductivity of 0.46 W m?1 K?1, which is higher than those of commercially available crystalline or amorphous epoxy resins. © 2018 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2019 , 57, 708–715 相似文献