Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna

To deposit copper seed layer on ultra large scale integration devices, a large-area (Ø 378 mm) electron cyclotron resonance plasma has been generated by using permanent magnets-embedded Lisitano antenna. The plasma source operates in the pressure range of 0.2–1.5 mTorr with microwave power range of 500–2,000 W. By using a Langmuir probe, the electron density and temperature have been measured near the DC sputter target position. Measurements indicate argon plasmas having electron densities of ~5 × 10¹⁰/cm and electron temperatures of 5 eV with 750 W microwave power at gas pressures of 0.5 mTorr. Using this plasma source and a DC sputter, we obtained excellent conformal copper seed layer with high aspect ratios of 12:1. This is in contrast with conventional methods using magnetron sputter, which has aspect ratios of 2–3:1. Also, improvements are observed in the smoothness (root mean square roughness of 1.345 nm), uniformity (2.5 % at 300 mm wafer), and sidewall symmetricity (more than 95 %) of the copper seed layer.     

Controlling the spectrum of high-power terahertz radiation from a laser-driven plasma wave

Generation of strong THz waves is a very important and difficult research issue. We performed particle-in-cell (PIC) simulation studies to investigate the possibility of powerful THz generation and spectrum controllability by using a laser-driven plasma wave. Our results show that it is possible to produce spectrum-controllable high-power (>1 MV/cm) THz waves by manipulating the plasma density profiles. This method may provide a good way for coherent high-power THz radiation sources, of which the spectrum ranges from a narrow bandwidth to a wide bandwidth.     

Applicability of in situ detectors for radiological assessment of strontium-90 in rivers and lakes

Journal of Radioanalytical and Nuclear Chemistry - An in situ detector for radiological assessments of strontium-90 (90Sr) in river and lake water is developed, based on a CaF2(Eu) scintillator,...     

Issue Information

An integrated finite element method (FEM) is proposed to simulate incompressible two‐phase flows with surface tension effects, and three different surface tension models are applied to the FEM to investigate spurious currents and temporal stability. A Q2Q1 element is adopted to solve the continuity and Navier–Stokes equations and a Q2‐iso‐Q1 to solve the level set equation. The integrated FEM solves pressure and velocity simultaneously in a strongly coupled manner; the level set function is reinitialized by adopting a direct approach using interfacial geometry information instead of solving a conventional hyperbolic‐type equation. In addition, a consistent continuum surface force (consistent CSF) model is utilized by employing the same basis function for both surface tension and pressure variables to damp out spurious currents and to estimate the accurate pressure distribution. The model is further represented as a semi‐implicit manner to improve temporal stability with an increased time step. In order to verify the accuracy and robustness of the code, the present method is applied to a few benchmark problems of the static bubble and rising bubble with large density and viscosity ratios. The Q2Q1‐integrated FEM coupled with the semi‐implicit consistent CSF demonstrates the significantly reduced spurious currents and improved temporal stability. The numerical results are in good qualitative and quantitative agreements with those of the existing studies. Copyright © 2015 John Wiley & Sons, Ltd.