Influence of the chemical structure of (co)polymer resists on their sensitivity to radiation

Resists operating via two mechanisms, i.e., disruption of the main chain and hydrolysis of side functional groups occurring upon EUV and electron beam irradiation, are studied as a function of the chemical composition of a polymer substrate. We show that the latter, belonging to the group of chemically amplified resists, are an order of magnitude more sensitive to radiation and possess outstanding contrast, as compared with disruptive type resists.     

Cyclopolymerization. VII. The 13C NMR Spectra of Cyclopolymers Obtained from N,N-Diallyamines

Pulsed Fourier transform ¹³C natural abundance nuclear magnetic resonance spectroscopy has been used to determine the structures of the polymers formed by the radical-induced cyclopolymerization of N-substituted-N, N-diallylamines and N-methyl-N, N-bls(2-alkylallyl)-amines. The polymers of N, N-diallylamines all contain cis-and trans-substituted pyrrolidine rings in the ratio 5:1. The polymers of N-methyl-N, N-bis(2-alkylallyl)amines give complex spectra due to the presence of both cis-and trans-pyrrolidine and -piperidine rings, but the difference in chemical shifts of the N-methyl signals from the different structural types allows the spectra to be analyzed.     

Synthesis of a Protected Phosphoamino Acid,Nα-tert-Butyloxycarbonyl-O-Diethylphosphoro-L-Serine

Phosphoproteins are known to play metabolic and structural roles in many biological processes. In such proteins, serine is the most commonly phosphorylated amino acid and is usually flanked by a cluster of acidic or basic residues. In our studies of the structure and reactivity of the phosphorylated segments of the caseins, we have been concerned with the development of a synthetic methodology suitable for the rapid synthesis in gram quantities of phosphopeptides.