Study of the gas-phase parameters affecting the silicon-oxide film deposition induced by an ArF laser

A study of the gas-phase parameters involved in ArF laser induced chemical vapour deposition of silicon-oxide thin films is presented. A complete set of experiments has been performed showing the influence of the concentration of the precursor gases, N₂O and SiH₄, and their influence on total and partial pressures on film growth and properties. In this paper we demonstrate the ability of this LCVD method to deposit silicon oxide films of different compositions and densities by appropriate control of gas composition and total pressure. Moreover, a material specific calibration plot comprising data obtained using different preparation techniques is presented, allowing determination of the stoichiometry of SiO _x films by using FTIR spectroscopy independently of the deposition method. For the range of processing conditions examined, the experimental results suggest that chemical processes governing deposition take place mainly in the gas phase.     

Adsorbate interactions of Cu(II) in Cu(II)-exchanged K-L gallosilicate studied by CW and Pulsed electron spin resonance

The interactions of Cu(II) in Cu(II)-exchanged K-L gallosilicate with adsorbates containing coordinative nitrogens in ammonia, pyridine, aniline, acetonitrile and hydrazine, and with the adsorbates carbon monoxide, benzene, propanol and dimethyl sulfoxide are investigated by electron spin resonance (ESR) and electron spin echo modulation (ESEM) spectroscopies. These results are compared with those in Cu(II)-exchanged K-L aluminosilicate and the differences are discussed. Adsorption of ammonia produces a complex containing four molecules of ammonia based on resolved nitrogen superhyperfine interaction. Upon equilibrium with pyridine, Cu(II) forms a complex containing four molecules of pyridine in CuK-L gallosilicate and a complex containing only three molecules of pyridine in CuK-L aluminosilicate based on resolved nitrogen superhyperfine. Upon adsorption of aniline and acetonitrile, Cu(II) forms complexes containing two molecules of each in CuK-L gallosilicate based on resolved nitrogen superhyperfine. However, no resolved nitrogen superhyperfine between hydrazine and Cu(II) is seen. Adsorption of carbon monoxide, benzene, propanol and dimethyl sulfoxide causes changes in the ESR spectrum of Cu(II), indicating migration of Cu(II) into cation positions in the main channels where adsorbate coordination can occur. Cu(II) forms complexes with one molecule of benzene and two molecules of propanol based on ESEM data in both K-L gallosilicate and K-L aluminosilicate. However, Cu(II) interacts directly with one dimethyl sulfoxide in K-L aluminosilicate but only indirectly at a longer distance with one dimethyl sulfoxide in K-L gallosilicate based on ESEM data.     

On nonspecular “total internal reflection” of powerful electromagnetic waves

It is shown that the nonstable character of nonlinear interaction of a system of waves similar to that resulting from double stimulated Brillouin scattering is retained upon the oblique incidence of a powerful electromagnetic wave on a layer of supercritical plasma. In this case we have nonlinear back reflection from a layer of supercritical plasma. The threshold intensity of the pump wave is greater than that in the case of subcritical plasma for TE polarization waves but can markedly decrease for waves polarized in the incidence plane. Instability is possible only for a layer of finite thickness.Radiophysical Research Institute, Nizhny Novgorod. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 38, Nos. 3–4, pp. 298–303, March–April, 1995.     

Optical detection of NO3 and NO2 in “pure” HNO3 vapor,the liquid-phase decomposition of HNO3

Flowing and static gas-phase samples of HNO₃ in O₂ and N₂ were analyzed by long-path ultraviolet/visible (UV/VIS) spectroscopy to reveal the presence of both NO₂ and NO₃, the concentrations of which were calculated using differential absorption cross sections. NO₂ is produced predominantly by the heterogeneous decomposition of HNO₃, whereas NO₃ is generated in the gas phase by the thermal decomposition of N₂O₅, a product of the self-disproportionation of liquid HNO₃. © 1993 John Wiley & Sons, Inc.     

Monoesterification of styrene–maleic anhydride copolymers with alcohols in ethyl benzene: Catalysis and kinetics

A kinetic investigation on the monoesterification reaction of the maleic anhydride residue (MA) in styrene-maleic anhydride copolymers with aliphatic alcohols was carried out in ethyl benzene solution. By comparison to classic catalysts such as tributylamine (TBA) and pyridine, 4-dimethylaminopyridine (4DMAP) is by far the most effective catalyst for this reaction. While both general base and nucleophilic mechanisms contribute to the reaction catalyzed by TBA or pyridine, a nucleophilic mechanism prevails with 4DMAP. This reaction is reversible, and its chemical equilibrium constant decreases significantly with increasing temperature. Both kinetic and thermodynamic results showed that in the presence of 4DMAP, the forward and reverse reactions are second and first order, respectively. The existence of side reactions, reactivity of two styrene-maleic anhydride copolymers of different MA contents as well as two aliphatic alcohols of different lengths are also addressed. © 1993 John Wiley & Sons, Inc.     

Measurement of cathode spot parameters with pulsed laserdiagnostics

The cathode spot formation in air within the first 170 ns was investigated by laser absorption photography and ps-pulse interferometry. The discharge was initiated between electrodes made from Ag or Pd with cathode-anode distance below 300 μm, the arc duration was some milliseconds, and the arc current 5-10 A. Picosecond holographic interferometry and momentary absorption photography yielded spatial-temporal density distributions in the ignition phase of the cathode spot. An absolute electron density value on the order of 4×10²⁶ m^-3 has been found. In contrast to vacuum, the cathode spot plasmas broaden little with increasing distance from the cathode, thus narrow plasma channels are observed in the vicinity of the cathode surface having diameters <20 μm