Calculation of heat transfer and uniformity of chemical amplification during post-exposure bake

Heat transfer in a resist-coated silicon wafer using a bake process is theoretically evaluated by modeling the three-dimensional diffusion process, focusing on the controllability of the lithographic performance of chemically amplified resists. Six models of various ambient conditions are used. The proximity gap between the hotplate and the wafer is found to have a dominant influence on the heat transfer process for the whole system. Because the atmosphere near the wafer acts as a thermal diffusion buffer layer, no temperature gradient occurs in the resist, even when it is subjected to convective heat transfer from the resist surface. Experimental results obtained by X-ray lithography confirm the calculation results.     

Crosslinked poly(N-isopropylacrylamide) gel for electrophoretic separation and recovery of substances

Crosslinked poly(N-isopropylacrylamide) gel was tested on the feasibility for a preparative electrophoretic matrix. Horse heart myoglobin and bovine hemoglobin were well separated on the gel matrix electrophoretically by molecular sieving effect of the gel network. Relative mobilities of those proteins in the gel were larger than those in a crosslinked polyacrylamide gel of the same polymer concentration. After the separation, the protein-containing portion of the gel underwent swelling at 4°C and deswelling at 37°C, alternatively. As a result of the deswelling, each protein was recovered in a discharged solution out of the gel at almost 100% yield.     

A two step algorithm for solving a large scale semi-definite logit model

This paper proposes a two step algorithm for solving a large scale semi-definite logit model, which is appreciated as a powerful model in failure discriminant analysis. This problem has been successfully solved by a cutting plane (outer approximation) algorithm. However, it requires much more computation time than the corresponding linear logit model. A two step algorithm to be proposed in this paper is intended to reduce the amount of computation time by eliminating a certain portion of the data based on the information obtained by solving an associated linear logit model. It will be shown that this algorithm can generate a solution with almost the same quality as the solution obtained by solving the original large scale semi-definite model within a fraction of computation time.     

A structural study of CN treated amorphous silicon

Recently, a remarkable technique to overcome the problem of light-induced degradation in amorphous silicon (a-Si) solar cells using a cyanide (CN) treatment has been developed. Structural and bonding characteristics of CN in a-Si has been studied using ab initio molecular dynamics simulations. It was found that CN incorporation results in more than just the termination of dangling bonds. The connectivity of the covalent random network increases because the CN changes from triply bonded, which is a common form in molecular CN, to the singly bonded form. This may be the mechanism by which CN incorporation produces significant reductions in light-induced degradation.     

Alternating copolymerization of carbon dioxide and epoxide by manganese porphyrin: The first example of polycarbonate synthesis from 1-atm carbon dioxide

The first successful example of the formation of polycarbonate from 1-atm carbon dioxide and epoxide was demonstrated by the alternating copolymerization of carbon dioxide and epoxide with manganese porphyrin as a catalyst. The copolymerization of carbon dioxide and cyclohexene oxide with (porphinato)manganese acetate proceeded under the 1-atm pressure of carbon dioxide to give a copolymer with an alternating sequence. © 2003 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 41: 3549–3555, 2003     

A fully linear-time approximation algorithm for grammar-based compression

A linear-time approximation algorithm for the grammar-based compression is presented. This is an optimization problem to minimize the size of a context-free grammar deriving a given string. For each string of length n, the algorithm guarantees approximation ratio without suffix tree construction.     

Development of measuring magnetic Compton profiles by grazing incidence geometry

A novel technique of measuring a magnetic Compton profile using the grazing angle geometry against a sample surface (Grazing Incidence Magnetic Compton Profile) has been successively developed. Measurements of a magnetic moment and a magnetic Compton profile are possible for a Fe 200 nm film on a thick glass substrate. The estimated thinnest limit for measurements is 100 nm for a Fe film.     

P-Chirogenic phosphonium salts: preparation and use in Rh-catalyzed asymmetric hydrogenation of enamides

P-Chirogenic trialkylphosphonium salts were prepared from the corresponding free phosphines by treatment with a strong acid (HBF₄ or HOTf). No racemization of the phosphonium salts occurred in methanol or water even at considerably high temperature. The salts were conveniently used in rhodium-catalyzed asymmetric hydrogenation of enamides.