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P. Thomsen-Schmidt K. Hasche G. Ulm K. Herrmann M. Krumrey G. Ade J. Stümpel I. Busch S. Schädlich A. Schindler W. Frank D. Hirsch M. Procop U. Beck 《Applied Physics A: Materials Science & Processing》2004,78(5):645-649
High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force microscopy (SFM), grazing incidence X-ray reflectometry (GIXR), or X-ray fluorescence analysis (XRF). The measurement results achieved with these methods are based on different interactions between the film and the probe. A key question in nanotechnology is how to achieve consistent results on a level of uncertainty below one nanometre with different techniques.Two different types of thickness standards are realised. Metal film standards for X-ray techniques in the thickness range 10 to 50 nm are calibrated by GIXR with monochromatised synchrotron radiation of 8048 eV. The results obtained at four different facilities show excellent agreement. SiO2 on Si standards for SE and SFM in the thickness range 6 to 1000 nm are calibrated by GIXR with monochromatised synchrotron radiation of 1841 eV and with a metrological SFM. Consistent results within the combined uncertainties are obtained with the two methods. Surfaces and interfaces of both types of standards are additionally investigated by transmission electron microscopy (TEM). PACS 61.10.Kw; 68.55.Jk; 06.20.Fn; 06.60.Mr; 07.79.Lh 相似文献
43.
Those who have worked in the Royal Institution of Great Britain have, since its foundation in 1799, made significant contributions
to scientific knowledge, to its practical application, and to its communication to a wide variety of audiences. Such work
cannot be carried out in an architectural vacuum, and in this paper we examine how the buildings of the Royal Institution,
20 and 21 Albemarle Street in central London, have shaped the work undertaken within its walls and how, on a number of occasions,
the buildings have been reconfigured to take account of the evolving needs of scientific research and communication.
This paper is based on the Conservation Plan of the Royal Institution that we wrote during 2003. The Conservation Plan did
not examine the land owned by the Royal Institution to the north (i.e., 22 and 23 Albemarle Street; for this area see Richard Garnier, “Grafton Street, Mayfair,” Georgian Group Journal 13 (2003), 210–272), but it did discuss 18 and 19 Albemarle Street. In this paper we concentrate on the core Royal Institution
buildings at 20 and 21 Albemarle Street. Other studies of the relationship of architecture,space, and science include Crosbie
Smith and Jon Agar, ed., Making Space for Science: Territorial Themes in the Shaping of Knowledge (Basingstoke: Macmillan, 1997); Peter Galison and Emily Thompson, ed., The Architecture of Science (Cambridge, Mass.: MIT Press, 1999); and Sophie Forgan,“The architecture of science and the idea of a university,” Studies in History and Philosophy of Science 20 (1989), 405–434.
Frank A.J.L. James is Professor of the History of Science at the Royal Institution; he has written widely on the history of
nineteenth-century science in its social and cultural contexts and is editor of the Correspondence of Michael Faraday. He is President of the British Society for the History of Science. Anthony Peers is an Associate of Rodney Melville and
Partners where he works in the field of building conservation as an architectural historian. He is a Council member of the
Ancient Monument Society. 相似文献
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We give a competitive algorithm to identify all d defective edges in a hypergraph with d unknown. Damaschke did the d=1 case for 2-graphs, Triesch extended the d=1 case to r-graphs, and Johann did the general d case for 2-graphs. So ours is the first attempt to solve the searching for defective edges problem in its full generality. Further, all the above three papers assumed d known. We give a competitive algorithm where d is unknown. 相似文献
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Robert S. Maier 《Random Structures and Algorithms》1991,2(4):379-420
We analyze the performance of a prototypical scheme for shared storage allocation: two initially empty stacks evolving in a contiguous block of memory of size m. We treat the case in which the stacks are more likely to shrink than grow, but with the probabilities of insertion and deletion allowed to depend arbitrarily on stack height as a fraction of m. New results are obtained on the m → ∞ asymptotics of the stack collision time, and of the final stack heights. The results of Wentzell and Freidlin on the large deviations of Markov chains are used, and the relation of their formalism to the Hamiltonian formulation of classical mechanics is emphasized. Certain results on higher-order asymptotics follow from WKB expansions. 相似文献