Investigation of organic impurities adsorbed on and incorporated into electroplated copper layers

At room temperature electroplated copper layers exhibit changes in resistivity, residual stress, and microstructure. This process, known as self-annealing, is intimately linked to the release of organic impurities, which stem from the incorporation of organic additives into the Cu layer in the course of the electroplating process. The behavior of these impurities during self-annealing, represented by the carbon content, could be detected by analytical radio frequency glow discharge optical emission spectrometry (GD-OES) and carrier gas hot extraction (CGHE). The precondition of a quantitative determination is a surface cleaning procedure to remove adsorbed organics from the copper surface. It was observed that at first almost all impurities have to leave the Cu metallization before an accelerated abnormal grain growth can start. The small amount of remaining organic species after self-annealing could be quantified by both examination techniques, GD-OES and CGHE.     

Post deposition purification of PTCDA thin films

The decomposition of perylene-3,4,9,10-tetracarboxylic dianhydride (PTCDA) molecules during evaporation of unpurified raw material in ultra high vacuum was studied. The fragments were identified by mass spectrometry and the influence of these fragments and further contaminations of the raw material on the electronic structure of PTCDA thin films was measured by photoemission spectroscopy. Annealing of contaminated PTCDA films was tested as cheap and easy to perform method for (partial) post deposition purification of the contaminated films.     

Rietveld refinement of CdSe phases annealed under argon atmosphere

Hexagonal and cubic cadmium selenide were prepared from a chemical route by using cadmium chloride and potassium selenium hydride obtained from reaction of selenium powder and potassium boron hydride. The product obtained was thermally treated under argon flux at 300, 500 and 600 °C for 2 h and characterized by X-ray photoelectron spectroscopy and X-ray diffraction. The X-ray diffraction data were refined by Rietveld method and the structural parameters were determined for the phases of each annealed samples. At 300 °C five phases were identified: Cubic and hexagonal cadmium selenides and the contaminants: Potassium chloride, boron oxide and cadmium boron oxide. At 500 and 600 °C only the hexagonal cadmium selenide phase was identified besides the other above mentioned contaminant.     

Über Mannit im Cambialsafte der Fichte

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