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41.
Kotulla M Trnka D Mühlich P Anton G Bacelar JC Bartholomy O Bayadilov D Beloglazov YA Bogendörfer R Castelijns R Crede V Dutz H Ehmanns A Elsner D Ewald R Fabry I Fuchs M Essig K Funke Ch Gothe R Gregor R Gridnev AB Gutz E Höffgen S Hoffmeister P Horn I Hössl J Jaegle I Junkersfeld J Kalinowsky H Klein F Klein F Klempt E Konrad M Kopf B Krusche B Langheinrich J Löhner H Lopatin IV Lotz J Lugert S Menze D Messchendorp JG Mertens T Metag V Mosel U Nanova M Novotny R Ostrick M Pant LM van Pee H 《Physical review letters》2008,100(19):192302
Information on hadron properties in the nuclear medium has been derived from the photoproduction of omega mesons on the nuclei C, Ca, Nb, and Pb using the Crystal Barrel/TAPS detector at the ELSA tagged photon facility in Bonn. The dependence of the omega-meson cross section on the nuclear mass number has been compared with three different types of models: a Glauber analysis, a Boltzmann-Uehling-Uhlenbeck analysis of the Giessen theory group, and a calculation by the Valencia theory group. In all three cases, the inelastic omega width is found to be 130-150 MeV/c(2) at normal nuclear matter density for an average 3-momentum of 1.1 GeV/c. In the rest frame of the omega meson, this inelastic omega width corresponds to a reduction of the omega lifetime by a factor approximately 30. For the first time, the momentum dependent omegaN cross section has been extracted from the experiment and is in the range of 70 mb. 相似文献
42.
43.
44.
Quadrupole-interaction nuclear orientation experiments have been performed on182Ta (jπ=3?1; T1/2=115d) in 2H-TaS2. γ-anisotropies up to ~ 30 % have been observed at a temperature of ~ 8 mK, which, however, is only about half of the value expected taking into account known results of TDPAC measurements on181Ta in 2H-TaS2. In principle, matrices of dichalcogenides could be well suited for nuclear quadrupole resonance on oriented nuclei (NQR-ON) experiments. 相似文献
45.
Generating systematic data on incoming materials, processes, production environments and products by contamination monitoring and analyis is the key element of quality assurance in semiconductor fabrication. To be able to match the analytical capabilities to the requirements of improving materials and processes, the level of sophistication of contamination monitoring and analysis systems must be higher than the expected demands in the fabrication line. The accuracy of each analytical method has to be cross-checked by different independent techniques. Accuracy, precision, power of detection, analysis time and expenses should always be tailored to the particular case. All monitoring methods must run under statistical process control. The methods described meet the analytical requirements of the near future in semiconductor grade silicon manufacturing.Glossary AAS
Atomic Absorption Spectrometry
- ADD
Acid-mixture Drop Decomposition of the native oxide and, occasionally of Si surface due to given acid etchant mixtures such as HF+HNO3 in order to preconcentrate dissolvable metallic impurities of the surface (c.f. MAD, VPD, WSSD)
- AEM
Analytical Electron Microscopy
- AEPS
Auger Electron Appearance Potential Spectroscopy (=APAES)
- AES
Auger Electron Spectroscopy
- AFM
Atomic Force Microscope
- AM
Acoustic Microscopy
- AMS
Accelerator Mass Spectrometry (Tandem-SIMS)
- APIMS
Atmospheric Pressure Ionization Mass Spectroscopy
- ARAES
Angle-Resolved Auger Electron Spectroscopy
- ARUPS
Angle-Resolved Ultraviolet Photoemission Spectroscopy
- ATR-FTIR
Attenuated Total Reflection Fourier Transform Infrared Spectroscopy
- BEEM
Ballistic Electron Emission Microscopy
- BMD
heat induced Bulk Micro-Defects in monocrystalline Si after a specified thermal process cycle, corresponding to SIOx precipitates in monocrystalline Si [31]
- BSE
Back Scattered Electrons
- CE
Capillary Electrophoresis (cf. CIA)
- CIA
Capillary Ion Analysis (cf. CE)
- COP
Crystal Originated Particle detected as LPD
- CV
Capacitance-Voltage measurement
- CVD
Chemical Vapor (phase) Deposit(ion)
- CZ-Si
monocrystalline Si grown by Czochralski-method from quartz crucible in a noble gas atmosphere
- DCT
Coulbe Crystal x-ray Topography
- DLTS
Deep Level Transient Spectroscopy [72]
- DRAM
Dynamic Random Access Memories operate as memory devices by storing charge near the Si wafer surface in micro-capacitors. Defects and impurities can cause the loss of the stored charge and a periodic refresh of the signals is required (cf. PTF).
- DTDA
Differential Thermal Desorption Analysis [73]
- DZ
Denuded Zone, i.e. a subsurface layer free of SiOx precipitates
- EBIC
Electron Beam Induced Conductivity
- EDS
Energy Dispersive Spectroscopy
- EDAX
Energy Dispersive Analysis of X-rays
- EELS
Electron Energy Loss Spectroscopy
- EG
Extrinsic Gettering, i.e. removal of metals from the active device region by dislocation stress in the back side of the wafer
- Elymat
Electrolytical Metal Tracer [69]
- EMP
Electron MicroProbe
- EPA
Electron Probe Analysis
- EPMA
Electron Probe Micro-Analysis
- ERDA
Elastic Recoil Detection Analysis
- ESCA
Electron Spectroscopy for Chemical Analysis (= XPS)
- ETV
Electro Thermal Vaporization
- fab
manufacturing process or fabrication line of microchips
- FESEM
Field Emission Scanning Electron Microscopy
- FIB
Focused Ion Beam
- FIM
Field Ion Microscopy
- FLAA
FlameLess Atomic Absorption
- FMEA
Failure Mode and Effect Analysis
- ()-FTIR
(Microspot) Fourier Transform InfraRed Spectroscopy
- FTPL
Fourier Transform PhotoLuminescence
- FZ-Si
monocrystalline Si grown by float zone method from a polycrystalline Si rod in an rf-coil
- GDMS
Glow Discharge Mass Spectrometry
- GFA
Gas Fusion Analysis (heat extraction of Oi from Si by graphite reduction, [75])
- GF-AAS
Graphite Furnace AAS
- GLP
Good Laboratory Practice (protocol defining general operations)
- GMP
Good Measurement Practice (protocol defining technique-specific operations)
- GOI
Gate Oxide Integrity test
- Graff test
surface precipitation of metallic silicide due to quenching annealed (1100°C) Si wafer, detection by Sirtl etch, cf. TEG haze test [76, 77]
- HeD
He thermal Desorption spectroscopy
- HIBS
Heavy Ion Backscattering Spectrometry
- HREELS
High-Resolution Electron Energy Loss Spectroscopy
- HREM
High Resolution Electron Microscopy index for interstitials (Oi, Sii etc.) in monocrystalline Si
- IC
Ion Chromatography
- ICISS
Impact-Collision Ion-Scattering Spectroscopy
- ICP-OES
Inductively Coupled Plasma Optical Emission Spectrometry
- ICP-MS
Inductively Coupled Plasma Mass Spectrometry
- IG
Intrinsic Gettering, removal of metallic impurities from the device active region and trap them in the bulk using supersaturated Oi in Si and inducing SiOx precipitation by thermal annealing
- INNA
Instrumental Neutron Activation Analysis [70, 71]
- IR
InfraRed Spectroscopy
- IRAS
Infrared Reflection Adsorption Spectroscopy
- ISS
Ion-Scattering Spectroscopy (cf. RBS)
- LAMMA
Laser (Ablation) Microprobe Mass Analyzer
- LANG
scanning Lang x-ray topography
- LAR-RBS
Lateral and Angle Resolved RBS-Imaging [78]
- LEED
Low Energy Electron Diffraction
- LM-PC
(non-contact) Laser/Microwave PhotoConductance
- LOD
Limit Of Detection (2–3 of noise level, [12])
- LOQ
Limit Of Quantification (>6 of noise level, Fig. 2/3, [11, 13]
- LPD
Ligh Point Defect, sites scattering laser beam on monocrystalline Si surface (particles, pits, dimples, scratches, nm-terrasses, etc.)
- LST
Laser Scattering Topography
- LT-FTIR
Low Temperature Fourier Transform InfraRed Spectroscopy
- LTV
Local Thickness Variation
- LPI-SNMS
Laser Resonance Ionization SNMS
- MAD
Mixed Acid Droplet (cf. ADD, VPD, WSSD)
- MAKYOH
magic mirror optical surface reflection method (Jpn.)
- Mb
megabit, quantum of digital unit of information, number of memory addresses of a microchip, 4 Mb is about the information capacity of 250 pages/DIN A4
- ME
Monochromatic Ellipsometry
- MOR
Modulated Optical Reflectance
- MOS
MetalOxide Semiconductor (transistor)
- NRA
Nuclear Reaction Analysis
- NRIS
NonResonant Ionization Spectroscopy
- OF
Orientation Flat to position Si wafers due crystal orientation
- OM
Optical Microscopy (usually differential interference/phase contrast Nomarski microscopy)
- MOS-CAP/TAU
Metal Oxide Semiconductor Capacitance/generation lifetime test for minority carrier
- OSF
hermal Oxidation-induced Stacking Fault in monocrystalline Si [31]
- -PCD
Microwawe reflection Photo Conductive Decay
- PAM
PhotoAcoustic Microscopy
- PAS
Positron Annihilation Spectroscopy
- PCMS
Plasma Chromatography Mass Spectroscopy
- PC-SIMS
Polyencapsulation Secondary Ion Mass Spectroscopy
- PET
Puddle Etch Test (HF/HNO3-dissolution of 10 mm spots on as-sliced, as-lapped, as-etched wafers, [43])
- PFZ
Precipitation Free Zone (cf. DZ)
- PIXE
Particle Induced X-ray Emission
- PL
PhotoLuminescence
- POD
Power Of Detection (LOD with real sample matrices, [14])
- 4-PP
4-Point Probe
- PSI
Phase Shift Interferometry
- PSP
Protocol for Specific Purposes (defining entire measurement program)
- PTF
Pause Time Failure can occur between periodic refresh of the stored data (cf. DRAM)
- -Raman
Raman Microprobe
- RBS
Rutherford BackScattering (cf. ISS)
- RHEED
Reflection High Energy Electron Diffraction
- RIS
Resonant Backscattering Ion Spectroscopy
- SALI
Surface Analysis by Laser Ionization
- SAM
Scanning Auger Microprobe/Microscopy
- Schimmel etch
defect/preferential etching for Si(100) [79]
- Secco etch
defect/preferential etching for Si(100) [79]
- SEM
Scanning Electron Microscopy
- SERS
Surface-Enhanced Raman Spectroscopy
- SIMS
Secondary Ion Mass Spectroscopy
- SIRIS
Sputter Initiated Resonant Ionization Spectroscopy
- SIRM
Scanning InfraRed Microscopy
- Sirtl etch
defect/preferential etching for Si(111) [79]
- SOM-DPC
Scanning Opt. Micr. Differential Phase Contrast
- SNMS
Sputtered Neutral Mass Spectroscopy
- SOP
Standard Operation Procedure (defining sampling and measurement process)
- SPC
Statistical Process Control
- SPM
Scanning Photon Microscope
- SPV
Surface Photo-Voltage
- SRP
Spreading Resistance Profiling
- SSD
Solid State Detector or Device
- STM
Scanning Tunneling Microscopy
- S-ULSI
Super-Ultra Scale Integration (Density)=16 Mb
- SXES
Soft X-ray Emission Spectroscopy
- TCS
Total Customer Satisfaction, the hotly pursued goal of all vendors of industrial goods
- TDS
Thermal Desorption Spectroscopy
- TDBD
Time Dependent Break-Down voltage
- TDDB
Time Dependent Dielectric Break-down voltage
- TPD
Temperature-Programmed Desorption
- TEG
haze test according to Telefunken Electronic Ges (cf. Graff-test)
- TEM
Transmission Electron Microscopy
- TOF-SIMS
Time of Flight Secondary Ion Mass Spectroscopy
- TQM
Total Quality Management
- TTV
Total Thickness Variation
- TXRF
Total Reflection X-Ray Fluorescence [80]
- TREX
Total Reflection Energy Dispersive X-ray fluorescence
- ULSI
Ultra-Large Scale Integration (Density)=4 Mb
- UPS
Ultraviolet Photoelectron Spectroscopy
- US
UltraSonic
- VLSI
Very Large Scale Integration (Density)=1 Mb
- VPD
Vapor Phase Decomposition (vapor phase reaction of HF with native Si-oxide and scanning the surface with a UPW or H2O2 solution droplet [38, 53], cf. ADD, MAD, WSSD)
- Wright etch
defect/preferential etching for Si(100) and Si(111) [79]
- WSA
Wafer Surface Analysis
- WSSD
Wafer Surface Scanner Device (automated VPD)
- XPS
X-ray Photoelectron Spectroscopy
- XRD
X-ray Diffraction
- XRF
X-ray Fluorescence
- XRT
X-ray Topography
- XTEM
X-ray Transmission Electron Microscopy 相似文献
46.
L. Fabry Siegfried Pahlke Ludwig Kotz 《Fresenius' Journal of Analytical Chemistry》1996,354(3):266-270
TXRF has been applied in combination with VPD to the analysis of trace impurities in the native oxide layer of Si wafer surfaces down to the range of 108 atoms · cm–2. Proper quantification of VPD/TXRF data requires calibration with microdroplet standard reference wafers. The precision of calibration function has been evaluated and found to allow quantification at a high level of 3 confidence with microdroplet standard reference. 相似文献
47.
Protein adsorption at polymer surfaces has been investigated by means of both ELISA and radiolabeling techniques. Most of the data obtained are linearly related to each other for protein concentrations between 0.01 and 1 μg/ml, i.e., the concentration range in which the maximum amount of adsorbed active protein (ELISA) is achieved. The correlation of ELISA data with radioisotope-based measurements allows quantification of the former. Specific correlation factors are described. Adsorption is shown to be strongly dependent on the polymer/protein system. 相似文献
48.
We study the boundedness problem for a class of forced isochronous oscillators. 相似文献
49.
The calibration of several ions (Cl(-), Br(-), F(-) and OH(-)) measured with an ion selective electrodes (ISE) array has been carried out in the presence of interferents using an experimental design and multivariate calibration methods. Partial least squares regression and principal component regression do not seem to improve the test set prediction compared to multivariate linear regression. In the case of very slight or no interference on the ISE, each ion can be determined using the corresponding ISE and univariate calibration methods, but the use of multivariate methods does not lead to worse results. 相似文献
50.
Synthesis of Indoles Using Visible Light: Photoredox Catalysis for Palladium‐Catalyzed CH Activation 下载免费PDF全文
Dipl.‐Chem. Jochen Zoller M. Sc. David C. Fabry B. Sc. Meria A. Ronge Prof. Dr. Magnus Rueping 《Angewandte Chemie (International ed. in English)》2014,53(48):13264-13268
A combined palladium‐ and photoredox‐catalyzed C? H olefination enables the synthesis of indoles. By using visible light, the direct C? H activation of aromatic enamines can be achieved and a variety of indole derivatives can be obtained in good yields under mild reaction conditions. 相似文献