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31.
Electron densities and temperatures have been measured by using a Langmuir probe, as well as spectroscopic observations of continuum radiation and of spectral lines, in a cesium plasma. It is shown that the excitation temperatures determined from relative intensities of spectral lines do not always agree with electron temperature determinations. An interpretation of this discrepancy is proposed and discussed.  相似文献   
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The integrity of ultrathin gate oxides was investigated as a function of polished and epitaxial wafer surfaces with various gettering sites. After intentional contamination of wafers with 1×1011 atoms/cm2 and 5×1012 atoms/cm2 Cu and Ni by a spin-on technique of high reproducibility, we performed 0.18-μm low-thermal-budget CMOS process runs. Thermal oxides were grown with various gate oxides in the range of 5–17 nm. After a MOS-capacitor fabrication we applied a ramped current-density test to study the gate-oxide integrity. Generally, thinner gate oxides exhibited a much more robust behavior than thicker oxides. The gate-oxide integrity was strongly influenced by different gettering sites. Although a higher Ni contamination led to a higher number of gate-oxide failures, Cu contamination exhibited a higher impact on the gate-oxide integrity than Ni. Received: 12 September 2000 / Accepted: 21 September 2000 / Published online: 22 November 2000  相似文献   
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Direct, oxidative metal‐catalyzed C? H functionalizations of arenes are important in synthetic organic chemistry. Often, (over‐)stoichoimetric amounts of organic or inorganic oxidants have to be used in these reactions. The combination of rhodium and photoredox catalysis with visible light allows the direct C? H olefination of arenes. Small amounts (1 mol %) of a photoredox catalyst resulted in the efficient C? H functionalization of a broad range of substrates under mild conditions.  相似文献   
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A methodology for the synthesis of oxetanes from benzophenone and furan derivatives is presented. UV-light irradiation in batch and flow systems allowed the [2 + 2] cycloaddition reaction to proceed and a broad range of oxetanes could be synthesized in manual and automated fashion. The identification of high-yielding reaction parameters was achieved through a new self-optimizing photoreactor system.  相似文献   
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The effect of charged particle diffusion on excitation temperature was investigated theoretically, assuming that the diffusion processes are ambipolar and that the charged particles return to the plasma in the form of ground state atoms, after recombination at the plasma boundary. An approximate expression was obtained by solving a set of balance equations for the excited state atom densities. It shows that, with increase of the plasma pressure, the excitation temperature rises and approaches the electron temperature. It was found also that, as the electron density increases, the diffusion effect on the excitation temperature diminishes. A criterion was obtained which should be satisfied so that the excitation temperature may be in agreement with the electron temperature. The theoretical results of this paper are in good agreement with experimental results.  相似文献   
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