Zirconia-based planar NO2 sensor using ultrathin NiO or laminated NiO–Au sensing electrode

The nanostructured thin NiO films with the thicknesses of 30–180 nm were examined as a sensing electrode (SE) for the planar mixed-potential-type yttria-stabilized zirconia (YSZ)-based NO₂ sensor. The sensing characteristics were examined in the temperature range of 600–800 °C under the wet condition (5 vol.% water vapor). Among the NiO-SEs tested, the 60 nm-thick NiO-SE sintered at 1,000 °C was found to give the highest NO₂ sensitivity in the NO₂ concentration range of 50–400 ppm accompanying with fast response/recovery at the operating temperatures of 600–700 °C. The high NO₂ sensitivity was attributed to the high catalytic activity for both electrochemical reactions of O₂ and NO₂ at the interface of NiO-SE/YSZ. The ultrathin gold layer with the thickness of about 60 nm was additionally formed on the 60 nm-thick NiO-SE to fabricate the laminated-type (60 nm NiO/60 nm Au)-SE. It was demonstrated that the use of this laminated (NiO–Au)-SE improved both the sensitivity and the selectivity to NO₂.