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81.
利用射频反应共溅射方法制备了Y掺杂Al2O3电介质薄膜,用掠入射x射线衍射检测了薄膜的结构,用高分辨率扫描电子显微镜(HRSEM)、原子力显微镜(AFM)观察了薄膜断面和表面形貌,用高频C-V和变频C-V及J-V测量了样品的电学特性. 结果表明,Y的掺入使电介质薄膜的介电常数k有了很大提高(8.14—11.8),并体现出了较好的介电特性. 分析认为:与氧具有较大电负性差的Y离子的加入,增大了薄膜中的金属—氧键(M—O)的强度;同时,Y的加入使Al2O3的结构和原子配位发生了改变,从而提高了离子极化对薄膜介电常数的贡献. 退火前后的XRD谱均显示薄膜为非晶态;HRSEM断面和AFM形貌像显示所制备的薄膜非常平整,能够满足器件要求.
关键词:
高k栅介质
掺杂氧化铝
射频反应溅射 相似文献
82.
In this paper, we analyze the exponential method of multipliers for convex constrained minimization problems, which operates like the usual Augmented Lagrangian method, except that it uses an exponential penalty function in place of the usual quadratic. We also analyze a dual counterpart, the entropy minimization algorithm, which operates like the proximal minimization algorithm, except that it uses a logarithmic/entropy proximal term in place of a quadratic. We strengthen substantially the available convergence results for these methods, and we derive the convergence rate of these methods when applied to linear programs.Research supported by the National Science Foundation under Grant DDM-8903385, and the Army Research Office under Grant DAAL03-86-K-0171. 相似文献
83.
We consider a class of unconstrained nonsmooth convex optimization problems, in which the objective function is the sum of
a convex smooth function on an open subset of matrices and a separable convex function on a set of matrices. This problem
includes the covariance selection problem that can be expressed as an ℓ
1-penalized maximum likelihood estimation problem. In this paper, we propose a block coordinate gradient descent method (abbreviated
as BCGD) for solving this class of nonsmooth separable problems with the coordinate block chosen by a Gauss-Seidel rule. The
method is simple, highly parallelizable, and suited for large-scale problems. We establish global convergence and, under a
local Lipschizian error bound assumption, linear rate of convergence for this method. For the covariance selection problem,
the method can terminate in O(n3/e){O(n^3/\epsilon)} iterations with an e{\epsilon}-optimal solution. We compare the performance of the BCGD method with the first-order methods proposed by Lu (SIAM J Optim
19:1807–1827, 2009; SIAM J Matrix Anal Appl 31:2000–2016, 2010) for solving the covariance selection problem on randomly generated instances. Our numerical experience suggests that the
BCGD method can be efficient for large-scale covariance selection problems with constraints. 相似文献
84.
TEMPERATURE DEPENDENCY OF IMPEDANCE-BASED NONDESTRUCTIVE TESTING 总被引:1,自引:0,他引:1
85.
Reported are fiber de-multiplexers based on side-polished fibers with a long interaction length and intra-core fiberBragg gratings. In conjunction with the silicon processing technologies, we demonstrate fiber filters and advantages ofour approaches are addressed. 相似文献
86.
Sharon Peled Ching-Hua Tseng Aaron A. Sodickson Ross W. Mair Ronald L. Walsworth David G. Cory 《Journal of magnetic resonance (San Diego, Calif. : 1997)》1999,140(2):320-324
A single-shot pulsed gradient stimulated echo sequence is introduced to address the challenges of diffusion measurements of laser polarized 3He and 129Xe gas. Laser polarization enhances the NMR sensitivity of these noble gases by >10(3), but creates an unstable, nonthermal polarization that is not readily renewable. A new method is presented which permits parallel acquisition of the several measurements required to determine a diffusive attenuation curve. The NMR characterization of a sample's diffusion behavior can be accomplished in a single measurement, using only a single polarization step. As a demonstration, the diffusion coefficient of a sample of laser-polarized 129Xe gas is measured via this method. 相似文献
87.
Tkaczyk S Tollefson K Tollestrup A Toyoda H Trischuk W de Troconiz JF Tseng J Turini N Ukegawa F Valls J Vejcik S Velev G Vidal R Vilar R Vologouev I Vucinic D Wagner RG Wagner RL Wahl J Wallace NB Walsh AM Wang C Wang CH Wang MJ Watanabe T Waters D 《Physical review letters》2000,84(6):1110-1115
We search for color singlet technirho and technipion production in p&pmacr; collisions at sqrt[s] = 1.8 TeV recorded with the Collider Detector at Fermilab. These exotic technimesons are present in a model of walking technicolor. The signatures studied are lepton plus two jets plus E(T) and multijet final states. No excess of events is seen in either final state. We set an upper limit on the technirho production cross section and exclude a region in the technipion mass versus technirho mass plane. 相似文献
88.
Toyoda H Trischuk W de Troconiz JF Tseng J Turini N Ukegawa F Vaiciulis T Valls J Vejcik S Velev G Vidal R Vilar R Volobouev I Vucinic D Wagner RG Wagner RL Wahl J Wallace NB Walsh AM Wang C Wang CH Wang MJ Watanabe T Waters D Watts T Webb R 《Physical review letters》2000,84(22):5043-5048
We report results from a study of events with a leading antiproton of beam momentum fraction 0.9057 GeV. Using the dijet events, we evaluate the diffractive structure function of the antiproton and compare it with expectations based on results obtained in diffractive deep inelastic scattering experiments at the DESY ep collider HERA. 相似文献
89.
基于熔石英材料对波长为10.6μm的CO2激光具有强吸收作用这一特点,提出采用CO2激光光栅式多次扫描修复熔石英光学元件表面密集分布的划痕和抛光点等缺陷的方法.实验结果表明,在合理的扫描参数下,元件表面的划痕和抛光点等缺陷可被充分地消除.损伤阈值测试结果表明,表面划痕和抛光点等缺陷被完全消除的元件的损伤阈值可回复到或超过基底的损伤阈值.同时结合有限元软件Ansys的模拟结果分析了CO2激光扫描修复及消除元件表面划痕和抛光点等缺陷的过程.本文为消除元件表面划痕和抛光点等缺陷提供了非常有意义的参考. 相似文献
90.
Ying-Tung Chen Kris Naessens Roel Baets Yunn-Shiuan Liao Ampere A. Tseng 《Optical Review》2005,12(6):427-441
For many years, the development of effective ablation or laser machining techniques for making micro-optical components has
been the key factor in the birth of new photonic devices and systems. In this article, the ablation characteristics of two
types of the most important transparent materials, transparent polymers and glasses, are studied. Simple shaped microcavities
are first machined for studying the fundamental ablation parameters, including threshold fluence, effective absorption coefficient,
and ablation rate. In studying polymer ablation, five standard grades and five proprietary polymeric compounds are selected.
Ablation techniques using these transparent polymers for making arrayed ferrules and curved microlenses are presented. Applications
of these ablated microstructures for optical fiber connectors, optical fiber coupling and alignment, and transparent chip
encapsulants, are introduced and demonstrated with emphasis on the quality of the ablated profiles and dimensions to satisfy
the required performance. In glass ablation, borosilicate glasses are considered and their associated ablation behaviors are
studied. The procedures to ablate glass-based arrayed microstructures with flat and curved surfaces are described. The utilizations
of these arrayed microstructures for optical waveguide, wave absorber, and beam guider, are specifically discussed. Finally,
concluding remakes for future trends are presented. 相似文献