Ion implantation for semiconductor processing

The potential advantages of ion implantation have been exploited in virtually every kind of semiconductor device. Several commercially important devices owe their existence to this technique.

Ion implantation provides precise control over the amount of dopant, concentration profile and lateral dimensions in device fabrication. The high degree of uniformity and reproducibility have made it possible to produce sophisticated devices and integrated circuits with high yield and tight tolerances. This is a truly planar process. It is possible to achieve high doping concentrations with relatively lower processing temperatures thereby avoiding lifetime degradation. The process is carried out in an inherently clean environment. A wide range of dopants is available and one is not limited by the particular properties of the substrate. There is great flexibility in choice of masking materials and self-alignment of doped regions in MOS devices is facilitated.

The increasing impact of ion implantation on device technology is discussed with reference to some recent developments. Specific commercially manufactured devices are mentioned.

Ion implantation machines continue to undergo development aimed at higher throughputs and cleaner vacuum. There is the need for greater reliability of machines. Effort is also directed at the development of low cost machines for dedicated applications.

Design of implanted devices continues to be an empirical process in some respects. The ability to accurately predict profile shapes in samples implanted (perhaps through a screen oxide) and subject to complicated post-implantation process steps, would cut down development time and costs.     

Thermodynamic investigation on M–Te–O (M = Sc, Y) system

The standard Gibbs energy of formation of M₂TeO₆ and M₆TeO₁₂ (where M = Sc, Y), was determined from its vapor pressure measurements by employing thermogravimetry-based transpiration technique. This technique was validated by measuring the vapor pressure of well-studied substances such as TeO₂(s) and CdCl₂(s). The temperature dependence of the vapor pressure of TeO₂(g) over the mixtures M₆TeO₁₂ + M₂O₃ (where M = Sc, Y), generated by the incongruent vaporization reaction, M₆TeO₁₂(s) → 3M₂O₃(s) + TeO₂(g) + ½O₂(g) were measured in the temperature range 1,413–1,473 K and 1,623–1,743 K for Sc₆TeO₁₂(s) and Y₆TeO₁₂(s), respectively. Similarly, the vapor pressure of TeO₂(g) over the mixtures M₂TeO₆(s) + M₆TeO₁₂(s) generated by the vaporization reaction, 3M₂TeO₆(s) → M₆TeO₁₂(s) + 2TeO₂(g) + O₂(g) was measured in the temperature range (1,223–1,293 K) and (1,333–1,423 K) for Sc₂TeO₆(s) and Y₂TeO₆(s), respectively. From the vapor pressure measurements, the standard Gibbs energy of formation of M₆TeO₁₂ and M₂TeO₆ were derived.     

Synthesis and characterization of a novel copolymer of glyoxal dihydrazone and glyoxal dihydrazone bis(dithiocarbamate) and application in heavy metal ion removal from water

We demonstrate synthesis of water insoluble, novel copolymer P_A1 from condensation of glyoxal dihydrazone and glyoxal dihydrazone bis(dithiocarbamate) monomers having high capacity to remove metal ions from aqueous solution. The presence of a high atomic percentage of nitrogen and sulfur atoms in P_A1 leads to strong ligating ability with metal ions. The monomers and the polymer have been characterized by FTIR, UV–Visible spectroscopy, CHNS elemental analysis, NMR, MALDI-MS, and TG/DTA. As a proof of concept, the P_A1 is tested for its ability to remove heavy metal ions Cu²⁺, Co²⁺, Fe²⁺, Ni²⁺, Mn²⁺, and CrO ₇ ^2? from aqueous solutions. P_A1 efficiently removed metals ions from the metal solutions. The highest absorption ability has been observed toward the iron salts where 0.969 g metal salt is absorbed by 1 g polymer. This study has implication for inexpensive and efficient polymer for purification of water.     

Thermal analysis of interaction between 2-PAM chloride and various excipients in some binary mixtures by TGA and DSC

Pralidoxime chloride known as 2-PAM chloride is used as antidote for nerve agent’s poisoning. This study was undertaken to establish the compatibility of 2-PAM chloride with a number of commonly used excipients by using thermoanalytical technique viz., differential scanning calorimetry (DSC) and thermogravimetry/differential thermogravimetry (TG/DTG) used in pharmaceutical formulation. The TG and DSC both results demonstrated that polyvinyl alcohol, polyacrylamide, microcrestline cellulose, hydroxypropyl cellulose, cellulose acetate, ethyl cellulose found to be compatible with 2-PAM chloride and chosen for the preparation of antidote against chemical warfare agents.     

Fabrication and characterization of electrochemical double layer capacitors using ionic liquid-based gel polymer electrolyte with chemically treated activated charcoal electrodes

The present investigation deals with electrochemical double layer capacitors (EDLCs) made up of ionic liquid (IL)-based gel polymer electrolytes with chemically treated activated charcoal electrodes. The gel polymer electrolyte comprising of poly(vinylidine fluoride-co-hexafluropropylene) (PVdF-HFP)–1-ethyl-2,3-dimethyl-imidazolium-tetrafluroborate [EDiMIM][BF₄]–propylene carbonate (PC)–magnesium perchlorate (Mg(ClO₄)₂) exhibits the highest ionic conductivity of ~8.4?×?10^?3?S?cm^?1 at room temperature (~20 °C), showing good mechanical and dimensional stability, suitable for their application in EDLCs. Activation of charcoal was done by impregnation method using potassium hydroxide (KOH) as activating agent. Brunauer–Emmett–Teller (BET) studies reveal that the effective surface area of treated activated charcoal powder (1,515 m²?g^?1) increases by more than double-fold compared to the untreated one (721 m²?g^?1). Performance of EDLCs has been tested using cyclic voltammetry, impedance spectroscopy, and charge–discharge techniques. Analysis shows that chemically treated activated charcoal electrodes have almost triple times more capacitance values as compared to the untreated one.     

Phase Transfer Catalyzed Peroxidation of Car Boxylic Acids with Potassium Persulfate

Aqueous solution of potassium persulfate converts water-insoluble carboxylic acids in ether (or dichloromethane), to peracids in a yield of 80–90% under the catalytic influence of benzyltriethylammonium chloride (BTEAC) or polyethyleneglycol (PEG-400). The reaction is further catalyzed kinetically in presence of a sulfonated polymer.     

Synthesis of N-Acyl Triazolyl-Pyrazolines via Acylation Initiated by the Hydrazone Moiety with Carboxylic Acids

An efficient synthesis of N-acyl/N-substituted acyl pyrazolines and their triazole hybrids have been accomplished via acylation of pyrazolines and pyrazoline-triazole hybrids with carboxylic acids and/or substituted carboxylic acids in the absence of activating agents/catalysts. In the present study, a mechanism envisaging the in situ generation of a new transient acylating intermediate has been proposed to explain the acylation.     

Isolation and biological evaluation of chromone alkaloid dysoline,a new regioisomer of rohitukine from Dysoxylum binectariferum

The chromone alkaloid dysoline (1), a new regioisomer of rohitukine (2) along with rohitukine and rohitukine-N-oxide (3) were isolated from the stem barks of Dysoxylum binectariferum. The structure of dysoline (1) was determined by extensive 2D-NMR studies and the absolute configuration was established by NOESY and CD spectra. Dysoline (1) consisted of a 5,7-dihydroxy-2-methylchromone nucleus substituted with a 2′-hydroxylated N-Me piperidine ring at the C-6 position. Dysoline differs from rohitukine by the position of the piperidine ring on the chromone nucleus. Dysoline displayed promising cytotoxicity in HT1080 fibrosarcoma cells with an IC₅₀ of 0.21 μM, and also displayed significant inhibition of proinflammatory cytokines TNF-α and IL-6.