n型窗口层材料及其在高速沉积微晶硅太阳电池中的应用研究

采用常规的射频等离子体增强化学气相沉积技术制备了可以用于微晶硅薄膜太阳电池的n型的掺杂窗口层材料.通过掺杂窗口层材料在电池中的应用发现：微晶硅薄膜太阳电池由于其电子和空穴的迁移率相差比较小而显示出磷掺杂的n型的微晶硅材料也可以像硼掺杂的p型的微晶硅材料一样,可作为微晶硅薄膜太阳电池的窗口层材料;两种窗口层制备电池的效率差别不大,而且量子效率（QE）测试结果显示两种电池的n/i和p/i界面没有明显的区别;电池的双面不同波长拉曼光谱的测试结果给出：不论是n/i/p还是p/i/n型的电池,在起始生长本征层阶段均 关键词： n型的掺杂窗口层 p型的掺杂窗口层 微晶硅薄膜太阳电池     

Reduction of the phosphorus contamination for plasma deposition of p-i-n microcrystalline silicon solar cells in a single chamber

This paper investigates several pretreatment techniques used to reduce the phosphorus contamination between solar cells. They include hydrogen plasma pretreatment, deposition of a p-type doped layer, i-a-Si:H or μc-Si:H covering layer between solar cells. Their effectiveness for the pretreatment is evaluated by means of phosphorus concentration in films, the dark conductivity of p-layer properties and cell performance.     

纳米Ag材料表面等离子体激元引起的表面增强拉曼散射光谱研究

用热蒸发的方法制备了纳米Ag材料,并用扫描电子显微镜对纳米粒子进行了形貌的表征,通过紫外—可见分光光度计得到Ag纳米粒子的透过谱,得到了Ag纳米粒子的表面等离子体共振的峰值位置.以罗丹明6G为探针分子测定Ag纳米粒子衬底的表面增强拉曼散射效应,通过拉曼散射光谱与透过谱研究了由表面等离子体激元的强极化场引起的表面增强拉曼散射效应,结合透过谱与拉曼增益因子提出了一种描述表面等离子体光学和电学特性的方法,并结合扫描电镜的结果给出了不同结构的纳米Ag材料对表面等离子体激元强度的影响. 关键词： 热蒸发 纳米Ag材料 表面等离子体 表面增强拉曼散射     

The mechanism of hydrogen plasma passivation for poly-crystalline silicon thin film

The mechanism of hydrogen plasma passivation for poly-crystalline silicon （poly-Si） thin films is investigated by optical emission spectroscopy （OES） combined with Hall mobility, Raman spectra, absorption coefficient spectra, and so on. It is found that different kinds of hydrogen plasma radicals are responsible for passivating different defects in polySi. The Ha with lower energy is mainly responsible for passivating the solid phase crystallization （SPC） poly-Si whose crystallization precursor is deposited by plasma-enhanced chemical vapor deposition （PECVD）. The H＊ with higher energy may passivate the defects related to teh Ni impurity around the grain boundaries more effectively. In addition, Hβ and H7 with the highest energy are required to passivate intra-grain defects in the poly-Si crystallized by SPC but whose precursor is deposited bv low pressure chemical vapor deposition（LPCVD）     

The influence of SiNx substrate on crystallinity of μc-Si film used in thin film transistors

This paper found that the crystalline volume ratio （Xc） of μc-Si deposited on SiNx substrate is higher than that on 7059 glass. At the same silane concentration （SC） （for example, at SC=2%）, the Xc of μc-Si deposited on SiNx is more than 64%, but just 44% if deposited on Conning 7059. It considered that the ‘hills＇ on SiNx substrate would promote the crystalline growth of μc-Si thin film, which has been confirmed by atomic force microscope （AFM） observation. Comparing several thin film transistor （TFT） samples whose active-layer were deposited under various SC, this paper found that the appropriate SC for the μc-Si thin film used in TFT as active layer should be more than 2%, and Xc should be around 50%. Additionally, the stability comparison of μc-Si TFT and a-Si TFT is shown in this paper.     

气压对VHF-PECVD制备的μc-Si:H 薄膜特性影响的研究

本文主要研究了用VHF-PECVD方法制备的不同工作气压的微晶硅薄膜样品.结果表明:沉积速率随反应气压的增大而逐渐增大;光敏性(光电导/暗电导)和激活能测试结果给出了相同的变化规律;傅立叶红外测试、X射线衍射和室温微区喇曼谱的结果都表明了样品的晶化特性;通过工艺的具体优化得出了器件级的微晶硅材料.     

高比表面纳米二氧化钛胶体、多孔电极及DSC电池的制备

以钛酸四丁酯为前驱物,冰醋酸为水解抑制剂,浓硝酸为胶溶剂,结合溶胶-凝胶与水热处理法成功制备了具有高比表面积的纳米二氧化钛胶体.除水、酸后,浓缩并添加有机粘结剂制成了纳米TiO2浆料.刷制多孔电极并组成电池后测试了其光电特性.调整胶溶剂-浓硝酸的添加量,制备了具有不同颗粒大小、晶型、比表面积的TiO2纳米颗粒.为了提高多孔薄膜的光散射效应,在浆料中添加了400 nm TiO2粉体,研究了其掺入量对电池特性的影响.结果表明,当硝酸加入量为 1 mL、掺入20;大颗粒TiO2时,制备的电池效率达到4.19;(Jsc=8.32 mA/cm2, Voc=0.76 V, FF=66.31;).     

薄膜太阳电池用纳米上转换材料制备及其特性研究

以应用于薄膜太阳电池为目的,采用水热法制备了掺杂稀土离子的纳米氟化钇钠上转换荧光材料.研究了稀土离子Yb³⁺/Er³⁺单独和共同掺杂对材料的晶体结构和光学性质的影响.制备的Yb^3＋/Er^3＋共掺材料兼顾了两种稀土离子的光吸收谱,吸收980nm和1530nm附近的红外光,并发出能够被薄膜太阳电池有效吸收利用的红光(653nm)和绿光(520,540nm).优化出较为合适的18％Yb³⁺,2％Er³⁺的掺杂比例,获得了具有较好上转换效果的纳米荧光颗粒材料.     

液晶人工神经元阵列的研制

研制了一种液晶灵巧像素光学神经元阵列器件，它利用光电混合集成技术，以非晶硅作光敏材料，以液晶实现光调制，通过特殊设计的器件结构，能实现对两束光的相减和非线性取阈等人工神经元功能。该器件具有８×８个神经元，以全并行方式工作