激光直写邻近效应的校正

邻近效应是限制光刻系统分辨力的一个重要因素,它也限制了激光直写在亚微米和亚半微米光刻中的应用。分析了激光直写邻近效应产生的原因,指出它和电子束直写及投影光刻的区别,提出了一种简便有效的邻近校正方法。实验表明,通过光学邻近校正（ＯＰＣ）,利用微米级激光直写系统,制作出了０．６μｍ的实用光刻线条     

Application of the DRS4 chip for GHz waveform digitizing circuits

A new fast waveform sampling digitizing circuit based on the domino ring sampler (DRS), a switched capacitor array (SCA) chip, is presented in this paper, which is different from the traditional waveform digitizing circuit constructed with an analog to digital converter (ADC) or time to digital converter. A DRS4 chip is used as a core device in our circuit, which has a fast sampling rate up to five gigabit samples per second (GSPS). Quite satisfactory results are acquired by the preliminary performance test for this circuit board. Eight channels can be provided by one board, which has a 1 V input dynamic range for each channel. The circuit linearity is better than 0.1%, the noise is less than 0.5 mV (root mean square, RMS), and its time resolution is about 50 ps. Several boards can be cascaded to construct a multi-board system. The advantages of high resolution, low cost, low power dissipation, high channel density and small size make the circuit board useful not only for physics experiments, but also for other applications.     

用灰阶编码掩模实现邻近效应精细校正的研究

提出了用灰阶编码的二元掩模代替灰阶掩模实现邻近效应精细校正的新方法,并阐述了新方法的特点,讨论了灰阶编码掩模与灰阶掩模的等效关系,给出了灰阶编码掩模实现光学邻近效应校正的模拟结果,校正后的综合面积偏差比较正前减少了１０％。     

改进的CIELAB均匀颜色空间

颜色学的发展依赖于感知现象和实验数据。随着视觉色差实验数据的增加,人们试图探索研发与CIELAB颜色空间一样简单,但更加均匀的颜色空间。分析了CIELAB颜色空间的特性,并基于这些特性提出了包含4个参数的颜色空间,称之为MLAB颜色空间。新颜色空间参数的确定是非线性约束优化问题,可保证优化后的空间能很好地预测由国际照明委员会专家组收集的视觉色差数据集COM-corrected。基于COM-corrected数据集的比较表明,MLAB颜色空间显著优于CIELAB颜色空间。基于色调线性数据集和椭圆数据集的测试表明,MLAB颜色空间较CIELAB颜色空间也有一定程度的进步。     

High Temperature Melting Curve of Basaltic Glass by Laser Flash Heating

Basalt is an igneous rock originating from the cooling and solidification of magma and covers approximately 70% of Earth’s surface. Basaltic glass melting in the deep Earth is a fundamental subject of research for understanding geophysics, geochemistry, and geodynamic processes. In this study, we design a laser flash heating system using two-dimensional, four-color multi-wavelength imaging radiometry to measure the basaltic glass melting temperature under high pressure conditions in diamond anvi...     

全固化SHG蓝光激光器的研究

介绍了一种新型鸨结构的全固化二次谐波（ＳＨＧ）蓝光激光器，该器件用波长８６０ｎｍ的激光二极管作基频光源。采用ＫＴＰ晶体作为非线性倍频器产装在半共焦谐振腔内，由一个偏振器与一个λ／４波片组成光隔离器，而偏振器的一个端平面与一个球面输出镜组成半共焦腔，可获得功率２ｍＷ、波长４３０ｎｍ的蓝光激光的稳定输出，且二次谐波激光束为高斯分布。     

凸轮曲线和推杆升程曲线

本文我们将来介绍从平板推杆的升程曲线来确定凸轮曲线的一种“非包络法”——“力学法”,以及“反问题”:从凸轮曲线确定“从动杆”(平板、圆滚)的升程曲线.从推杆升程来确定凸轮曲线这是机械工业中常常碰到的问题.当已知升程曲线而求凸轮曲线时,目前常用的都是“包络法”.然而,对于平板推杆来说,由于当凸轮带动平板推杆时,其切点处的“切向矢量”永远与“推杆的变化方向”互垂,从运动学的观点而言,也     

用微透镜阵列在单模光纤中写入长周期光纤光栅的新方法

报道了用微透镜阵列、几百个准分子激光脉冲有效地写入长周期光纤光栅的新方法。     

Theoretical Analysis of Interference Nanolithography of Surface Plasmon Polaritons without a Match Layer

Interference nanolithography techniques based on long-range surface plasmon polaritons （LR-SPP） are hardly ever achieved by experiments at present. One key reason is that suitable liquid materials are difflcult to find as the match layer connects the metal film and the resist. We redesign a Kretschmann-Raether structure for interference lithography. A polymer layer is coated under the metal film, and an air layer is placed between the polymer layer and the resist layer. This design not only avoids the above-mentioned question of the match layer, but also can form a soft contact between the polymer layer and the resist layer and can protect the exposure pattern. Simulation results confirm that a device with an appropriately thick polymer layer can form high intensity and contrast interference fringes with a critical dimension of about λ/7 in the resist. In addition, the fabrication of the device is very easy.