Chemical mechanical planarization of Ge_2Sb_2Te_5 using IC1010 and Politex reg pads in acidic slurry

In the paper, chemical mechanical planarization(CMP) of Ge2Sb2Te5(GST) is investigated using IC1010 and Politex reg pads in acidic slurry. For the CMP with blank wafer, it is found that the removal rate(RR) of GST increases with the increase of pressure for both pads, but the RR of GST polished using IC1010 is far more than that of Politex reg. To check the surface defects, GST film is observed with an optical microscope(OM) and scanning electron microscope(SEM). For the CMP with Politex reg, many spots are observed on the surface of the blank wafer with OM, but no obvious spots are observed with SEM. With regard to the patterned wafer, a few stains are observed on the GST cell, but many residues are found on other area with OM. However, from SEM results, a few residues are observed on the GST cell, more dielectric loss is revealed about the trench structure. For the CMP with IC1010, the surface of the polished blank wafer suffers serious scratches found with both OM and SEM, which may result from a low hardness of GST, compared with those of IC1010 and abrasives. With regard to the patterned wafer, it can achieve a clean surface and almost no scratches are observed with OM, which may result from the high-hardness SiO2 film on the surface, not from the soft GST film across the whole wafer. From the SEM results, a clean interface and no residues are observed on the GST surface, and less dielectric loss is revealed. Compared with Politex reg, the patterned wafer can achieve a good performance after CMP using IC1010.     

条形码识别技术

介绍了条形码的识别系统及识别原理。     

等离子体喷射X光时空分辨测量

在“神光”强激光装置上对０．５３μｍ激光产生的等离子体喷射进行了Ｘ光时空分辨诊断。首次利用多针孔阵列成像技术结合软Ｘ光扫描相机观察激光加热区和Ｘ光加热区等离子体的运动，获得了初级和次级等离子体膨胀速度等结果．     

高能强子在铁中的衰减

利用强子探测效率高的厚型甘巴拉山铁乳胶室,观测了能量大于4TeV强子流的衰减长度.分别对无伴随的单个强子、ΣE_γ>500TeV、100TeV≤ΣE_γ≤500TeV和30TeV≤ΣE_γ<100TeV的族事例中的强子作了测量. 初步结果表明,四种情况的衰减长度是有差异的,对此作了讨论.     

两个原子与双模腔场的多光子相互作用：场和原子的动力学性质

研究一对偶极相互作用原子与双模量子腔场的多光子相互作用，分析场和原子的动力学性质，给出腔模平均光子数和原子反转度时间演化的解析表达式，考察腔模初态、初场强度以及原子间偶极－偶极相互作用的影响。     

国际物理师范教育会议综述

国际物理师范教育会议于1992年9月14日至18日在德国多特蒙得(Dbrtmund)大学举行。来自五大州的约40名代表出席会议，代表中有半数来自发展中国家。会议主席为多特蒙得大学的D.K．纳克帝(Nachtigall)教授。     

寻找来自原始黑洞蒸发的TeV γ射线暴

用兴隆站的两台大气切伦科夫望远镜ACT2和ACT3在1995—1997年间的观测数据,寻找来自原始黑洞(PBH)蒸发终态的0.1sTeVγ射线暴.分析这些资料没发现有这样的γ射线暴.据此估算出在太阳系附近、在99%的置信水平下原始黑洞的蒸发率-密度的上限为3×10⁸/年·pc3.     

羊八井50m2RPC实验及初步测试结果

介绍了羊八井50m²电阻板室(RPC)地毯实验的结构、安装和对其性能的初步测试.测试的结果表明RPC完全能够很好地在海拔4300m,气压594mbar的羊八井宇宙线观测站正常地运行.     

超高能γ–强子族的能量集中现象

通过对甘巴拉山铁乳胶室观测到的族事例以及COSMOS程序和CORSI-KA程序产生的模拟族事例进行分析、对比,对超高能γ强子族的能量集中现象的产生特征进行了细致的研究.初步的结论是:超高能γ强子族的能量集中现象是族中含有的高能中心簇射集团的外在表现,这种现象在实验上发生的频度为(20.5±3.1)%,集团的平均横向扩展约为0.37cm.与传统的以唯象多团模型为基础的COSMOS程序相比,基于SIBYLL模型的CORSIKA程序的模拟结果较为接近实验的分析结果.