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为确定某种新型刻蚀机最优的晶圆与喷淋头间距(Gap),通过CFD仿真分析气体在不同Gap腔室内的物质输运分布,并结合乙醇环境下HF酸刻蚀SiO2工艺的物理化学过程,建立了刻蚀速率估算公式,以此分析了不同Gap腔室的刻蚀速率及刻蚀均匀性,最终获得了具有最佳刻蚀效果的腔室结构.研究分析表明:Gap较小时晶圆中心刻蚀速率偏高,Gap较大时晶圆边缘刻蚀速率偏高;平均刻蚀速率随着Gap的增大逐渐降低,而刻蚀不均匀度随Gap增大先减小后增大,在Gap取值70 mm时刻蚀均匀性最佳且刻蚀速率较高. 相似文献
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Computational design of proteins is a relatively new field, where scientists search the enormous sequence space for sequences that can fold into desired structure and perform desired functions. With the computational approach, proteins can be designed, for example, as regulators of biological processes, novel enzymes, or as biotherapeutics. These approaches not only provide valuable information for understanding of sequence–structure–function relations in proteins, but also hold promise for applications to protein engineering and biomedical research. In this review, we briefly introduce the rationale for computational protein design, then summarize the recent progress in this field, including de novo protein design, enzyme design, and design of protein–protein interactions. Challenges and future prospects of this field are also discussed. 相似文献
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