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N. I. Stas’kov A. B. Sotsky L. I. Sotskaya A. N. Petlitskii 《Optics and Spectroscopy》2012,112(6):881-883
The solution of the inverse problem of spectral ellipsometry is obtained for titanium with a surface layer of titanium oxide that was formed as a result of thermal (450°C) oxidation of the metal substrate. Using the Drude-Zener and Cauchy dispersion models, it is shown that a rather thick (46 nm) inhomogeneous binary surface layer including about 23% of titanium and 77% of titanium oxide is present on the studied samples of pure polycrystalline titanium. A natural weakly absorbing surface layer with a thickness of 13 nm is on this layer. 相似文献
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V. B. Odzhaev A. N. Petlitskii V. I. Plebanovich P. K. Sadovskii M. I. Tarasik A. R. Chelyadinskii 《Physics of the Solid State》2018,60(1):20-22
The interaction between Sb atoms and micropores of a getter layer in silicon is studied. The getter layer was obtained via implantation of Sb+ ions into silicon and subsequent heat treatment processes. The antimony atoms located in the vicinity of micropores are captured by micropores during gettering annealing and lose its electrical activity. The activation energy of capture process to the pores for antimony is lower than that of antimony diffusion in silicon deformation fields around microvoids on the diffusion process. 相似文献
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N. I. Stas’kov I. V. Ivashkevich N. A. Krekoten’ V. A. Ukhov A. N. Petlitskii 《Optics and Spectroscopy》2011,111(6):962-966
We discuss the solutions of the inverse problem of multiangle ellipsometry for titanium with a natural surface layer, namely,
the determination of the thickness of the near-surface layer and optical characteristics by use of which one can interpret
the titanium structure. It turned out that the studied samples of pure polycrystalline titanium have a rather thick inhomogeneous
layer of polycrystalline titanium with oxygen and, on this layer, there is a surface layer similar to titanium oxide. The
data on the optical characteristics of pure polycrystalline titanium agree well with those determined earlier by other optical
methods. 相似文献
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Staskov N. I. Sotsky A. B. Sotskaya L. I. Gaponenko N. V. Lashkovskaya E. I. Petlitskii A. N. Kozlov A. A. 《Optics and Spectroscopy》2021,129(5):586-591
Optics and Spectroscopy - An algorithm for solving the inverse problem of multiangle spectrophotometry of an inhomogeneous absorbing film is developed, which is based on polynomial representations... 相似文献
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