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采用RF-PECVD法在低温低功率密度下制备了p型nc-Si∶H薄膜,并系统地研究了硼掺杂对薄膜微结构及光电性能的影响.结果表明:由于“硼掺杂效应”,随着掺硼比的增大,nc-Si∶H薄膜的晶化率逐渐降低,晶粒尺寸减小,薄膜的择优取向由[111]变为[220];光学带隙逐渐减小,电导率则先升后降;本实验中薄膜的最优掺杂比为0.3;.以优化后的p型nc-Si∶H薄膜做窗口层,SHJ太阳电池的性能得到明显改善,获得了效率为14.1;的电池. 相似文献
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Growth of Strain Free GaN Layers on (0001) Oriented Sapphire by Using Quasi-Porous GaN Template 总被引:1,自引:0,他引:1 下载免费PDF全文
We report the reduced-strain gallium-nitride (GaN) epitaxial growth on (0001) oriented sapphire by using quasiporous GaN template. A GaN film in thickness of about 1 μm was initially grown on a (0001) sapphire substrate by molecular beam epitaxy. Then it was dealt by putting into 45% NaOH solution at 100℃ for lOmin. By this process a quasi-porous GaN film was formed. An epitaxial GaN layer was grown on the porous GaN layer at 1050℃ in the hydride vapour phase epitaxy reactor. The epitaxial layer grown on the porous GaN is found to have no cracks on the surface. That is much improved from many cracks on the surface of the GaN epitaxial layer grown on the sapphire as the same as on GaN buffer directly. 相似文献
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采用射频等离子体增强化学气相沉积(RF-PECVD)法在低温、低功率的条件下制备了一系列本征硅薄膜, 研究了硅烷浓度(CS)对薄膜微结构、光电特性及表面钝化性能的影响. 将本征硅薄膜作为钝化层应用到氢化纳米晶硅/晶硅(nc-Si:H/c-Si)硅异质结(SHJ)太阳电池中, 研究了硅烷浓度和薄膜厚度对电池性能的影响. 实验发现: 随着硅烷浓度的降低, 本征硅薄膜的晶化率、氢含量、结构因子、光学带隙和光敏性等都在过渡区急剧变化; 本征硅薄膜的钝化性能由薄膜的氢含量及氢的成键方式决定. 靠近过渡区的薄膜具有较好的致密性和光敏性, 氢含量最高, 带隙态密度低, 且主要以SiH 形式成键, 对硅片表现出优异的钝化性能, 使电池的开路电压大幅提高. 但是, 当薄膜的厚度过小时, 会严重影响其钝化质量. 本实验中, 沉积本征硅薄膜的最优硅烷浓度为6% (摩尔分数), 且当薄膜厚度为~8 nm时, 所制备电池的性能最好. 实验最终获得了开路电压为672 mV, 短路电流密度为35.1 mA·cm-2, 填充因子为0.73, 效率为17.3%的nc-Si:H/c-Si SHJ太阳电池 相似文献
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