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1.
The accuracy of ultrashallow depth profiling was studied by secondary ion mass spectrometry (SIMS) and high‐resolution Rutherford backscattering spectroscopy (HRBS) to obtain reliable depth profiles of ultrathin gate dielectrics and ultrashallow dopant profiles, and to provide important information for the modeling and process control of advanced complimentary metal‐oxide semiconductor (CMOS) design. An ultrathin Si3N4/SiO2 stacked layer (2.5 nm) and ultrashallow arsenic implantation distributions (3 keV, 1 × 1015 cm?2) were used to explore the accuracy of near‐surface depth profiles measured by low‐energy O2+ and Cs+ bombardment (0.25 and 0.5 keV) at oblique incidence. The SIMS depth profiles were compared with those by HRBS. Comparison between HRBS and SIMS nitrogen profiles in the stacked layer suggested that SIMS depth profiling with O2+ at low energy (0.25 keV) and an impact angle of 78° provides accurate profiles. For the As+‐implanted Si, the HRBS depth profiles clearly showed redistribution in the near‐surface region. In contrast, those by the conventional SIMS measurement using Cs+ primary ions at oblique incidence were distorted at depths less than 5 nm. The distortion resulted from a long transient caused by the native oxide. To reduce the transient behavior and to obtain more accurate depth profiles in the near‐surface region, the use of O2+ primary ions was found to be effective, and 0.25 keV O2+ at normal incidence provided a more reliable result than Cs+ in the near‐surface region. Copyright © 2007 John Wiley & Sons, Ltd. 相似文献
2.
Hidehisa Kawashima Itsuki Ozawa Masashi Kijima 《Journal of polymer science. Part A, Polymer chemistry》2020,58(13):1747-1756
Rigid and little moldable curdlan, a linear β-1,3-glucan having intra- and interchain hydrogen bonds, was reacted with several alkyl isocyanates, which gave thermoplastic curdlan alkyl carbamates (CrdC) with degree of substitution about 2. The alkyl carbamation at hydroxy groups in the glucan skeleton effectively broke the interchain hydrogen bonds of curdlan and increased flexibility of CrdC, while the newly formed carbamate moieties could moderately keep the hydrogen bonding ability in CrdC. Elongating the alkyl groups in the carbamate side chains increased solubility in organic solvents and thermoplasticity of CrdC, which enabled to make homogeneous and free-standing films by both methods of solution-casting and hot-pressing. 相似文献
3.
Itsuki Shindachi Hiroshi Hanaki Ryo Sasai Tetsuya Shichi Tatsuto Yui Katsuhiko Takagi 《Research on Chemical Intermediates》2007,33(1-2):143-153
Diarylethene derivatives (DE) covalently bonded to silanol oxygens of layered silicate surfaces, i.e., magadiite (Mag), were synthesized and investigated for their photochromic behavior. The DE-Mag layered hybrids were found to undergo reversible color change by alternating UV and visible light irradiation. A more highly efficient, reproducible photochromic behavior was realized with DE-Mag than with a corresponding DE-Si possessing silyl substituents on DE in place of the Mag surface. Moreover, the present covalently bonded DE exhibited an improvement over DE hybrids incorporated in layered double hydroxide (LDH) clays, in which the repetitive photochromic behavior decreased during alternating irradiation, due to the accumulation of the photochemically inert parallel isomers of DE. 相似文献
4.
M Imuta H Itani H Ona Y Hamada S Uyeo T Yoshida 《Chemical & pharmaceutical bulletin》1991,39(3):663-671
The synthesis and antibacterial activity of the 1-methylcarbapenems, 2-heteroaromatic-thiomethyl and 2-carbamoyloxymethyl derivatives having a 6-[(R)-1-hydroxyethyl] side chain, are described. The introduction of a methyl substituent at the C-1 position was accomplished by a newly developed procedure using crotyl halides and zinc dust. The 2-hydroxymethyl carbapenems as key intermediates allowed an easy entry into the preparation of title carbapenems. 相似文献
5.
Allan RD Greenwood JR Hambley TW Hanrahan JR Hibbs DE Itani S Tran HW Turner P 《Organic & biomolecular chemistry》2004,2(12):1782-1788
Reaction of sodium azide with 4-methyl-3,5,6-tribromopyridazine results in the formation of 3,5,6-triazide intermediate which could cyclise to give two possible bicyclic products while ab initio calculations show that the formation of a tricyclic compound is extremely energetically unfavourable. However, experimentally, only one major product is isolated. The structure of this unstable product has been conclusively established by X-ray crystallography as 3,5-diazido-4-methyl[1,5-b]tetrazolopyridazine confirming theoretical predictions. 相似文献
6.
Nobutaka Yamaoka Kohei Sumida Itsuki Itani Hiroko Kubo Yusuke Ohnishi Sho Sekiguchi Dr. Toshifumi Dohi Prof. Dr. Yasuyuki Kita 《Chemistry (Weinheim an der Bergstrasse, Germany)》2013,19(44):15004-15011
Metal‐free oxidative C? C coupling by using polyalkoxybenzene‐derived diaryliodonium(III) salts as both the oxidant and aryl source has been developed. These salts can induce single‐electron‐transfer (SET) oxidation to yield electron‐rich arenes and subsequently transfer the polyalkoxyphenyl group into in situ generated aromatic radical cations to produce biaryl products. The reaction is promoted by a Lewis acid that activates the iodonium salts. It has been revealed that the reactivity of the salts under acidic conditions is quite different to their known behavior under basic conditions. The reactivity preference of a series of iodonium salts in the SET oxidation and their ligand transfer abilities have been systematically investigated and the results are summarized in this report. 相似文献
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8.
Yuji Naruse Atsushi Takamori Itsuki Nagasawa 《Phosphorus, sulfur, and silicon and the related elements》2020,195(7):523-525
AbstractWe previously designed and prepared the first molecules to exhibit observable CD spectra by n-σ* excitation, 2,6-dithiaspiro[3.3]heptane 2,6-dioxide. Spiro[3.3]heptane frameworks possess axial asymmetry due to puckering of 2 four-membered rings; the ring bonds are rich in p-character due to acute bond angles, which lowers the σ* energy levels. In contrast, the lone pairs are rich in s-character, which results in a good donor with conformational fixation. We expected that, instead of lone pairs as donating orbitals, the use of σ-electron-donating Si-Si bonds should result in UV absorption in the observable range (>180?nm), so that the Cotton effect could appear, at least partially, in that range. We designed 2,6-disilyl-2,6-disilaspiro[3.3]heptanes as models, and performed theoretical calculations to confirm our idea. 相似文献
9.
W. Sato H. Ueno A. Taniguchi Y. Itsuki Y. Kasamatsu A. Shinohara K. Asahi Y. Ohkubo 《Journal of Radioanalytical and Nuclear Chemistry》2007,272(3):665-668
The time-differential perturbed angular correlation (TDPAC) method was applied to a study on the behavior of 140Ce atoms implanted in highly oriented pyrolytic graphite (HOPG). Exponential-type gradual attenuation of the directional anisotropy
of the relevant γ-ray cascade was observed in the perturbation patterns. From temperature dependence of the relaxation rate,
a thermally activated dynamic motion of the probe atoms was suggested. 相似文献
10.
Karim Kadir Tetsuo Sakai Itsuki Uehara Lars Eriksson 《Acta Crystallographica. Section C, Structural Chemistry》2001,57(9):999-1000
Yttrium tricopper dialuminium, YCu3Al2, is isostructural with hexagonal CaCu5, in which each Cu atom at the 3g(½,0,½) position in space group P6/mmm (No. 191) is partially replaced by an Al atom. The hydrogen‐uptake properties are usually enhanced in other AB5 structures by aluminium substitution. YCu5 does not show any hydrogen absorption, and the goal of the present work is to investigate whether aluminium substitution could expand the metal‐atom lattice enough to provide better interstitial positions for hydrogen storage. However, no enthalpy change was observed up to 773 K under 3 MPa static H2 pressure by differential thermal analysis (DTA) for the title compound. The compound does not show any significant hydrogen absorption/desorption in the pressure‐composition isotherms (P–C–T diagrams) in the temperature range 298–673 K under 3.3 MPa H2 pressure. 相似文献