Self-organization of thin metal films by irradiation with nanosecond laser pulses

Modifications in thin metal films under intensive laser irradiation were studied. Gold, silver, copper, chromium and aluminum films with the thickness of 100 nm were deposited on the glass substrate. Back-side irradiation through the substrate with a burst of nanosecond pulses tightly focused to a line was applied. The film removal threshold with a single pulse F_th was estimated for every material and laser fluence was kept above it in the range of 1.5-3 F_th during experiments. Diverse behavior of the films depending on the metal, the shift between pulses and laser fluence was observed. In chromium, the regular structures were developed in a quite wide range of processing parameters. In gold, three kinds of ripples were observed: transverse (similar to ripples in chromium), longitudinal and a structure of ripples oriented at 60° to each other. The combination of physical properties facilitated the regular assembly of the molten metal in chromium and to some extent in gold.     

Ripple formation in the chromium thin film during laser ablation

The beam of a nanosecond pulse laser tightly focused to a line was applied for the back-side ablation of the chromium thin film on a glass substrate. The stripe ablated with a single laser pulse had sharp edges on both sides and ridges of the melted metal around it. The partially overlapping pulses formed a wide cleaned area with a complicated structure made of the metal remaining from the ridges. Regular structures, ripples, were developed when laser fluence was slightly above the single-pulse removal threshold and the shift between pulses was less than half width of the line ablated with a single laser pulse. The ripples were located periodically (∼4 μm) and were orientated perpendicularly to the long axis of the beam spot. Their orientation did not depend on the laser beam polarization. Different models of the ripple formation in the thin metal film were considered, and instability of the moving vapor-liquid-solid contact line during evaporation of thin liquid films appears to be the most probable process responsible for the observed phenomena. Formation of regular gratings with the unlimited line length was experimentally implemented by using the above-mentioned technique.     

Laser etching of glass substrates by 1064 nm laser irradiation

TiB₂-based cermets are prepared by combustion synthesis followed by a pressing stage in a granulate medium. Products obtained by combustion synthesis are characterized by a large remaining porosity (typically 50%). To produce dense cermets, a subsequent densification step is performed after the combustion process and when the reacted material is still hot. To design the process, numerical simulations are carried out and compared to experimental results. In addition, physical and electrical properties of the products related to electrical contact applications are evaluated. PACS 81.20.Ka; 81.05.Mh; 72.80.Tm     

Visualization of particle trajectories in the laser shock cleaning process

The laser shock cleaning (LSC) method has recently attracted substantial attention since it can remove micro/nano-scale contaminant particles from a solid surface without direct exposure of the surface to laser irradiation. However, despite the importance of the particle detachment and redeposition mechanisms in the LSC process, the behavior of the particles during the cleaning process has never been analyzed experimentally. In this work, the motion of the micrometer-scale particles detached by a laser-induced plasma/shock wave is visualized by a photoluminescence imaging technique. The technique yields time-resolved particle trajectories under typical conditions of the LSC process, with and without a gas jet blowing. Discussions are made on the behavior of the detached particles and redeposition mechanisms.     

Display glass cutting by femtosecond laser induced single shot periodic void array

We propose an idea of fast cutting a display glass plate where the sample is pre-processed micromachining single shot rear-surface and internal void arrays aligned on working plane prior to glass cleaving. Single shot void morphology is investigated varying input pulse energy, focusing depth, and scanning speed. A femtosecond laser with pulse duration of 172 fs, central wavelength of 780 nm, and repetition rate of 1 kHz is used to fabricate voids.     

High repetition rate femtosecond laser nano-machining of thin films

Thin film laser micromachining has been utilized for repairing semiconductor masks, creating solar cells and fabricating MEMS devices. A unique high repetition rate femtosecond fiber laser system capable of variable repetition rates from 200 KHz to 25 MHz along with helium gas assist was used to study the effect of pulse repetition rate and pulse energy on femtosecond laser machining of gold-coated silicon wafer. It was seen that high repetition rates lead to smaller craters with uniform line width. Craters created at 13 MHz pulse repetition rate with 2.042 J/cm² beam energy fluence measured 110 nm in width and had a heat affected zone of 0.79 μm. It was found that pulse repetition rate only played a significant role in the size of the heat affected zone in the lower pulse energy ranges. In the future, a 1 W laser system will be acquired to find the optimal repetition rate that would create the minimal feature size with the least heat affected zone. Using this kind of setup along with techniques such as radial polarization and a different gas assist may enable us to create sub 100 nm feature size with good quality.     

Optodynamic monitoring of laser micro-drilling of glass by using a laser probe

We present a new method for monitoring of the laser micro-drilling process. The method is based on detection of acoustic waves in air above the processed sample using a laser beam deflection probe (LBDP). We present an augmentation of the experimental set-up by means of a digital micrographic system which enables the acquisition of images of the plasma plume and of the hole cross-section during a drilling sequence. Comparing the acquired images with the detected LBDP signals, we examine the drilling process from a new perspective.     

Control of electrical resistance of TiO2 films by short-pulse laser irradiation

Titanium dioxide (TiO₂) films were irradiated with a femtosecond laser beam to alter their electrical resistances. The TiO₂ film was produced by aerosol beam deposition. The wavelength, pulse duration, and repetition rate of the femtosecond laser scanned across the sample surface were 800 nm, 100 fs, and 1 kHz, respectively. By attenuating the laser fluence on the TiO₂ film, a range was found in which the electrical resistance of the TiO₂ film was varied even though the morphology of the film surface was not changed.     

SBN thin films growth by RF plasma beam assisted pulsed laser deposition

SBN thin films were grown on MgO and Silicon substrates by PLD and RF-PLD (radiofrequency assisted PLD) starting from single crystal Sr_0.6Ba_0.4Nb₂O₆ and ceramic Sr_0.5Ba_0.5Nb₂O₆ stoichiometric targets. Morphological and structural analyses were performed on the SBN layers by AFM and XRD and optical properties were measured by spectroellipsometry. The films composition was determined by Rutherford Backscattering Spectrometry. The best set of experimental conditions for obtaining crystalline, c-axis preferential texture and with dominant 31° in-plane orientation relative to the MgO (100) axis is identified.     

Rotational-coherence molecular laser isotope separation

We have proposed a laser isotope separation method, utilizing rotational coherence of a simple molecule. In the scheme, photoexcited molecules are isotopically separated by difference of rotational period between them. To illustrate this method, two-pulse photodissociation of mixed ⁷⁹Br₂/⁸¹Br₂ isotopes has been investigated theoretically. The photodissociation probabilities of ⁷⁹Br₂ and ⁸¹Br₂ have been calculated as functions of time delay between the photoexcitation and dissociation laser pulses. We have demonstrated that isotope enrichment factor of ⁷⁹Br relative to ⁸¹Br can be changed from 0.34 to 1.8, by simply changing the time delay only by 0.2 ns. Additionally, we have shown that this method is effective for heavy isotopes, based on mass dependence of the isotope enrichment factor.     

Microdrilling of metals with an inexpensive and compact ultra-short-pulse fiber amplified microchip laser

We have investigated the ultra-fast microdrilling of metals using a compact and cheap fiber amplified passively Q-switched microchip laser. This laser system delivers 100-ps pulses with repetition rates higher than 100 kHz and pulse energies up to 80 μJ. The ablation process has been studied on metals with quite different thermal properties (copper, carbon steel and stainless steel). The dependence of the ablation depth per pulse on the pulse energy follows the same logarithmic scaling laws governing laser ablation with sub-picosecond pulses. Structures ablated with 100-ps laser pulses are accompanied only by a thin layer of melted material. Despite this, results with a high level of precision are obtained when using the laser trepanning technique. This simple and affordable laser system could be a valid alternative to nanosecond laser sources for micromachining applications.     

Glass modification by continuous-wave laser backside irradiation (CW-LBI)

We report on a permanent change in the physical properties inside glass that is rapidly heated and quenched with a continuous-wave (CW) laser beam. The absorption of the glass was enhanced by laser heating, and the heated spot moved by thermal radiation and conduction. To trigger the heating, an absorbent material was placed on the backside of a glass plate and irradiated through the glass. The laser beam can modify borosilicate glass with a high aspect ratio (∼100:1) at a rate of ∼130 mm/s. The modified zone consists of two concentric cylindrical zones and is crack-free.     

Limited volume thin film deposition on geometrically complicated substrates

In this paper we report a study on the elastic scattering of electrons by lithium and sodium atoms in the presence of circularly polarized resonant laser field within the framework of the two-state rotating wave approximation. The effect of laser on projectile electrons is described by Volkov states. The frequency of the laser field is chosen to match with the 2s–3p (3s–3p) transition frequency in lithium (sodium) atoms. The total and differential elastic cross sections with single photon exchange are calculated for intermediate energies (50–150 eV) and laser intensity (10⁷–10¹¹ W cm^-2). An erratum to this article can be found online at http://dx.doi.org/. An erratum to this article can be found at     

RF-plasma assisted pulsed laser deposition of nitrogen-doped SrTiO3 thin films

Perovskite-type nitrogen substituted SrTiO₃ thin films were deposited with a one-step process by RF-plasma assisted pulsed laser deposition from a SrTiO₃ target using a N₂ plasma, while deposition with a NH₃ plasma yields films with almost no incorporated nitrogen. The deposited films exhibit a cubic perovskite-type crystal structure and reveal oriented growth on MgO(100) substrates. The unit cell parameters of the studied N-doped SrTiO₃ films range within 3.905<a<3.918 Å, which is slightly larger than for SrTiO₃ (a=3.905 Å). The nitrogen content in the deposited films varies from 0.2 to 0.7 atom%. The amount of incorporated nitrogen in the films decreases with increasing RF-power, while the N₂ flow rate does not have any pronounced influence on the N content. Nitrogen incorporation results in an increased optical absorption at 400–600 nm, which is associated with N(2p) energy states that have a higher energy level than the valence band in strontium titanate. The optical band gap energies in the studied N-doped SrTiO₃ films are at 3.2–3.3 eV, which is very similar to that of pure strontium titanate (～3.2 eV). Films deposited with NH₃ for the RF-plasma exhibit a lower degree of crystallinity and reveal almost no nitrogen incorporation into the crystal lattice.     

Propagation of terawatt laser pulses in the air

One of the problems when increasing the intensity of a femtosecond laser pulse is the propagation of the beam. As the intensity increases nonlinear effects begin to play a significant role. When arriving to the terawatt domain, nonlinear effects and filamentation give rise to a new phenomenology in the propagation. The aim of this paper is to analyze new possibilities to control the beam shape to Taylor the interaction of the beam with the target at large distances.     

Methods for controlling of the laser-induced absorption in a BTO crystal by using of cw-laser radiation

The iron-atom concentration distribution as well as the gas-phase temperature was measured via laser-induced fluorescence (LIF) during iron-oxide nanoparticle synthesis in a low-pressure hydrogen/oxygen/argon flame reactor using ironpentacarbonyl (Fe(CO)₅) as precursor. Temperature measurements based on multi-line NO-LIF imaging are used to correct for temperature-dependent ground-state populations. The concentration measurement is calibrated based on line-of-sight absorption measurements. The influence of the precursor on the flame is observed at precursor concentrations larger than 70 ppm as the flame front moves closer to the burner surface with increasing Fe(CO)₅ concentration.     

Diffusion through a polycrystalline thin film

Analytical solutions to Fick’s second law of diffusion have been simultaneously derived without the restrictions of parabolic profiles along the x-axis in grain boundaries and expressed in a series for both grain interior and grain boundary diffusing through a polycrystalline thin film. The analysis takes segregation of diffusion species at grain boundaries into account. The analytic solutions lead to the concentration profiles in the grain interior and in the grain boundary, to the average-integrated amount of diffusion species at the exit surface, and to the time lag, which can be technologically used for depth profile studies and kinetic accumulation measurements.     

Investigation of heavy-metal accumulation in selected plant samples using laser induced breakdown spectroscopy and laser ablation inductively coupled plasma mass spectrometry

Single-pulse Laser-Induced Breakdown Spectroscopy (LIBS) and Laser-Ablation Inductively Coupled Plasma Mass-Spectrometry (LA-ICP-MS) were applied for mapping the silver and copper distribution in Helianthus Annuus L. samples treated with contaminant in controlled conditions. For Ag and Cu detection the 328.07 nm Ag(I) and 324.75 nm Cu(I) lines were used, respectively. The LIBS experimental conditions (mainly the laser energy and the observation window) were optimized in order to avoid self-absorption effect in the measured spectra. In the LA-ICP-MS analysis the Ag 107 and Cu 63 isotopes were detected. The capability of these two analytical techniques for high-resolution mapping of selected trace chemical elements was demonstrated.     

Transient 3D/2D simulation of laser-induced ablation of silicon

A numerical software has been developed to simulate heating, enthalpy-based phase changes and ablation of silicon during pulsed or continuous-wave laser irradiation. The unsteady heat transfer equation is solved by finite differences in two or three dimensions with full resolution of the thin liquid layer. An intelligent adaptive grid refinement and a semi-analytic treatment of the surface elements have been implemented to simulate laser cuts with lots of laser pulses in moderate computing time. The code has been successfully verified by comparisons with an analytic solution and with experimental data. Details of the mathematical model, the implementation in Matlab^®and comparisons with experimental laser cuts are presented in this paper.     

Frequency stabilization of CO laser using RF optogalvanic Lamb-dip

The Lamb dip of CO rovibrational transition is detected by a room temperature extracavity RF optogalvanic cell and employed to stabilize the frequency of a CO laser. The S/N ratio of optogalvanic signal is about 2000  at optical power < 1 W. The relative depth of Lamb dip is 2.3%. The S/N ratios of first and third harmonic demodulated saturation signals are about 40  and 10  , respectively. The CO laser is stabilized using the first harmonic demodulated signal, and the frequency stability is better than 300 kHz. Concurrently, the influences of operational parameters, which include the coil current, partial pressures of gas mixture, are investigated. A simple model for the influence of coil current is presented, and further improvements are addressed as well.