一种减小GaN基肖特基结构紫外探测器暗电流的方法

提出了一种减小GaN肖特基结构紫外探测器暗电流的方法.该方法是在普通的GaN肖特基结构的表面增加一层薄的p-GaN.模拟计算结果表明,该层p-GaN能增加肖特基势垒高度,从而减小了器件的暗电流,提高了器件性能.进一步的计算还发现,对于p型载流子浓度较高的情况下,只需要很薄的一层p-GaN就能显著增加肖特基势垒高度,对于p型载流子浓度较低的情况下,则需要较厚的一层p-GaN才能有较好的肖特基势垒高度增加效果. 关键词： GaN 肖特基结构 紫外探测器 暗电流     

MSM结构Mg0.2Zn0.8O可见盲光电探测器

采用射频磁控溅射,通过传统的紫外曝光和湿法腐蚀的方法,制备了不同电极间距的金属-半导体-金属(MSM)结构Mg0.2Zn0.8O可见盲光电探测器.研究了器件的暗电流和响应度随电极间距的变化关系,当施加的电压没有达到贯穿电压的时候,暗电流和响应度均随着电极间距的增加而减小,并对其具体的机制进行了研究.     

双束质子辐照砷化镓光电导探测器的I-V特性

对用能量为7.5MeV和20MeV,注量为1011～1013cm-2的质子辐照后的砷化镓材料制作的光电导探测器的光电流和暗电流进行了测试,并由此推得电导率的变化。结果表明,经过能量为7.5MeV的质子改性后的砷化镓探测器相对于未改性的附加光电导率Δσ减少,而且随着辐照注量的增加而越小,而对于先用能量为20MeV质子辐照后再用能量为7.5MeV的质子辐照的砷化镓材料制作的探测器,其附加光电导率Δσ的减少则更为明显。对上述现象进行了分析,并根据其相应关系预测了该种探测器的响应时间、灵敏度、拖尾现象及受X射线激发的输出脉冲的后延的变化情况。     

双束质子辐照砷化镓光电导探测器的I-V特性

 对用能量为7.5MeV和20MeV,注量为10¹¹～10¹³cm^-2的质子辐照后的砷化镓材料制作的光电导探测器的光电流和暗电流进行了测试，并由此推得电导率的变化。结果表明，经过能量为7.5MeV的质子改性后的砷化镓探测器相对于未改性的附加光电导率Δσ减少，而且随着辐照注量的增加而越小，而对于先用能量为20MeV质子辐照后再用能量为7.5MeV的质子辐照的砷化镓材料制作的探测器，其附加光电导率Δσ的减少则更为明显。对上述现象进行了分析，并根据其相应关系预测了该种探测器的响应时间、灵敏度、拖尾现象及受X射线激发的输出脉冲的后延的变化情况。     

阻挡杂质带红外探测器中的界面势垒效应

通过变温暗电流和变偏压光电流谱实验对阻挡杂质带红外探测器的跃迁机理和输运特性进行了研究. 结合器件能带结构计算的结果, 证明了在阻挡杂质带红外探测器中主要由导带底下移效应引起的界面势垒的存在. 提出了阻挡杂质带红外探测器的双激发工作模型, 并从变偏压光电流谱中成功地分离出了与这两种物理过程所对应的光谱峰, 进一步证实了器件的能带结构. 研究了界面势垒效应对阻挡杂质带红外探测器的光电流谱、响应率和内量子效率的影响. 研究表明, 考虑进界面势垒效应, 计算得到的器件响应率与实验值符合得很好. 同时发现阻挡杂质带红外探测器中内建电场的存在等效降低了发生碰撞电离增益所需的临界电场强度.     

硅化铂肖特基势垒红外焦平面列阵及其发展

介绍PtSi肖特基势垒红外焦平面列阵的工作原理,分析探测器的最佳化结构,评述国内外肖特基势垒红外焦平面列阵的发展。     

基于液相外延的InAs基红外探测器InAsSbP阻挡层的仿真

在传统pn结红外探测器中,宽带隙阻挡层的引入可以有效降低器件暗电流。采用COMSOL软件对探测器的能带图进行仿真,结果表明,InAsSbP四元合金通过n型或p型掺杂,其能带结构能够实现价带能级的下凹或导带能级的上凸,起到阻挡空穴或电子的作用。通过理论分析和仿真计算,确定了满足阻挡层要求的InAsSbP组分。对于nBip型和pBin型红外探测器,仿真得到了阻挡层的最优厚度和最优掺杂浓度(粒子数浓度),并分析了其偏离最优值时对器件暗电流的影响。对于nBip型探测器,当阻挡层厚度为40nm、掺杂浓度为2×10~(18) cm~(-3)时,器件开关比最大;对于pBin型探测器,当阻挡层厚度为60nm、掺杂浓度为4×10~(17) cm~(-3)时,器件的开关比最大。     

PIN光电探测器的建模与仿真分析

为了优化PIN光电探测器响应特性,首先依据载流子速率方程,并考虑芯片寄生参量和封装寄生参量,建立光电探测器的等效电路模型。然后仿真分析了反偏电压、I区宽度、光敏面、芯片寄生电阻和电容、封装寄生电阻、电容和电感对光电探测器脉冲响应特性和频率响应特性的影响。结果表明:通过增大反偏电压,减小光敏面和寄生参量(芯片寄生电容和电阻,封装寄生电容和电阻),选取合适的I区宽度,利用引线电感的谐振效应现象,可以抑制脉冲响应波形畸变,提高频率响应带宽。     

用于雪崩光电探测器响应度增强的超透镜设计与仿真

超透镜除了可以实现传统透镜的聚焦和成像功能之外,还可通过对超构单元的设计实现对光场偏振、波长和振幅等的多维度操控,由于体积薄、重量轻、成本低、易集成,其在光电子器件领域中开始崭露头角,已经成为当前的研究热点和重要方向。本文采用时域有限差分算法(Finite-difference time-domain,FDTD)设计并优化了基于InGaAs雪崩探测器原位集成的超透镜,同时估算了超透镜的聚焦效率和透射率。仿真结果表明,超透镜将入射光会聚至探测器的光敏区中,透射率达到82.8%,并且在目标焦距150μm、超透镜半径50μm时聚焦效率达到84.89%。为进一步提高透射率,在超透镜表面增加抗反射层(AR Layer)。结果表明,300nm的SiO₂层透射率达到最大值86.6%,250 nm的SiN层透射率达到最大值87.6%,透射率比未增加AR层时分别增加了3.8%和4.8%。最后计算得出集成超透镜的探测器吸收区光场能量比未集成超透镜的探测器吸收区光场能量提升了250.96倍,将极大提升探测器的响应度。本文提出了单片集成超透镜的雪崩探测器设计方案,将雪崩探测器光敏区之外的...     

红外四象限探测器暗电流自动测量技术研究

简要介绍了红外四象限探测器的暗电流参数特性,针对多元探测器的特点,设计了温度控制电路以及多路切换开关电路,实现了在不同温度和电压下对暗电流的全自动化测量.通过实验数据得出探测器在不同偏压下的温度特性曲线图,证明本测量系统是可行的,并且可以用于其他多元探测器的暗电流检测.     

基于谐振腔增强型石墨烯光电探测器的设计及性能分析

提出了一种具有超薄有源层的谐振腔增强型石墨烯光电探测器的设计方法,利用谐振腔结构可以将光场限制在腔内,有效增强探测器的吸收.通过研究谐振腔内光场谐振条件及谐振模式下探测器响应度增强的机理,建立了驻波效应下谐振腔增强型石墨烯光电探测器光吸收模型,仿真分析谐振腔反射镜反射率、谐振腔腔长对于腔内光场增强器件性能的影响.理论分析表明,谐振腔增强型石墨烯光电探测器在850 nm处响应度可达0.5 A/W,相比无腔状态下提高了32倍;半高全宽为10 nm.采用谐振腔结构能够提高石墨烯光电探测器件的光电响应,为解决光电探测器响应度与响应速度之间的相互制约关系提供了途径.     

Monte Carlo simulation of excess noise in heterojunction avalanche photodetector

A Monte Carlo (MC) simulation of excess noise in heterojunction avalanche photodetector (APD), made up of InP/InGaAs, is made. The simulation is based on the hard threshold dead space consideration in the displaced exponential model of the distribution of ionization path lengths. Impact ionization and multiplication of electrons as function of ionizing electric field are also studied. The multiplication and noise are seen to be reduced compared to those in component materials. The simulated results are seen to agree well with the reports of other theoretical predictions and experimental results published in literatures.     

Design and fabrication of a high-performance evanescently coupled waveguide photodetector

In this paper, we present the design, fabrication, and measurement of an evanescently coupled waveguide photode- tector operating at 1.55 gm, which mainly comprises a diluted waveguide, a single-mode rib waveguide and a p-i-n photodiode with an extended optical matching layer. The optical characteristics of this structure are studied by using a three-dimensional finite-difference time-domain （3D FDTD） method. The photodetector exhibits a high 3-dB bandwidth of more than 35 GHz and a responsivity of 0.291 A/W at 1550 nm directly coupled with a cleaved fiber. Moreover, a linear response of more than 72-mW optical power is achieved, where a photocurrent of more than 21 mA is obtained at a reverse bias voltage of 3 V.     

高速高饱和单行载流子光探测器的设计与分析

设计了一种In P基的背入射台面结构的单行载流子光探测器.通过在吸收层中采取高斯型掺杂界面及引入合适厚度和掺杂浓度的崖层,使得光探测器同时具备了高速和高饱和电流特性.理论分析表明,在光敏面为14μm2、反向偏压为2 V条件下,该器件的3 d B带宽可达58 GHz,直流饱和电流高达158 m A.在大功率光注入条件下,详细分析了光探测器带宽降低和电流饱和现象,得出能带偏移和电场坍塌是其根本原因的结论.     

Design and numerical modeling of normal-oriented quantum wire infrared photodetector array

A design for an IR photodetector is proposed and described that uses an array of II–VI semiconductor quantum wire heterostructures and that uses intersubband transitions in the conduction band of the wires as the IR detection mechanism. The detection mechanism of these quantum wire infrared detectors (QRIP) is similar to that used in quantum well infrared photodetectors (QWIP) but important differences arise due to the further confinement of the electrons in an additional dimension. QWIPs are briefly described, including their undesirable aspects and how QRIPs offer solutions to these problematic issues. The electron quantum states, absorption and other important aspects of several QRIP designs are calculated using analytical and finite difference techniques. A potential design for a focal plane array using QRIPs is described that uses a nanopatterned alumina template for DC electrodeposition of II–VI semiconductor quantum wires oriented normal to the substrate.     

Design of graphene coupling enhanced quantum dot infrared photodetector

Optical Review - The conventional quantum dot infrared photodetector (QDIP) has a weak ability to capture light, which limits the further improvement of absorptivity. In this paper, the graphene...     

The simulation of temperature dependence of responsivity and response time for 6H-SiC UV photodetector

In this paper the temperature dependence of responsivity and response time for 6H-SiC ultraviolet (UV) photodetector is simulated based on numerical model in the range from 300K to 900K. The simulation results show that the responsivity and the response time of device are less sensitive to temperature and this kind of UV photodetector has excellent temperature stability. Also the effects of device structure and bias voltage on the responsivity and the response time are presented. The thicker the drift region is, the higher the responsivity and the longer the response time are. So the thickness of drift region has to be carefully designed to make trade-off between responsivity and response time.     

Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.     

Phonon mediated photodetector

Quantum-wells and quantum dots and related semiconductor nanostructures have been widely investigated for infrared devices. Here we propose a new general approach to make use of polar optical phonons in quantum-wells for infrared (IR) and terahertz (THz) detection. As the first example, we show the coupling of phonon and intersubband transition leading to Fano resonance in photocurrent spectra. We investigate the phenomenon experimentally in specially designed GaAs/AlGaAs quantum-well infrared photodetectors. Finally, we discuss the future research and potentials.