肉桂酸酯系光敏聚合物的光致诱蚀作用机理研究

光致诱蚀作用或无显影气相光刻作用是一个非常有趣的现象。为了探讨肉桂酸酯系光敏聚合物的光致诱蚀作用机理,观察了各种因素的相互影响。提出了下述理论假设:当肉桂酸酯光敏聚合物薄膜受紫外光照射时,发生光化学反应并使其结构性质发生变化,从而使得薄膜可以从腐蚀气体中吸收H_2O和HF气体,形成一个氢氟酸-聚合物溶液,此溶液与HF和H_2O的混和气体不同,可以与其下部的SiO_2迅速反应。但未受光照射的区域不易同时吸收H_2O和HF,其下部SiO_2的反应速度很慢,于是在两个区域间形成了很大的腐蚀速度差,从而形成一个清晰的光刻图象。这个假设可以解释现有的全部实验结果。     

Photocrosslinkable vinylamine copolymers. I. Synthesis and photosensitivity of cinnamoylated polyvinylamine

Vinylamine copolymers prepared by the Hofmann reaction were functionalized by amidification with cinnamoyl chloride. The resulting photosensitive polymers, which are the nitrogen analogues of poly(vinylcinnamate), can be prepared with various contents of cinnamamide side groups. The polymers exhibit a marked hydrophilicity and undergo efficient crosslinking upon exposure to 250–300 nm UV light. The sensitivity S expressed in cm²·J⁻¹ was shown to be higher for a given content, τ, in cinnamamide groups expressed in mol·g⁻¹ when the residual vinyl amine units are in the ammonium form. The dependence of S upon τ was of the second order for the free base form of the photopolymers, but a higher order with S approximately proportional to τ³ for the hydrochloride form of the photosensitive polymers. © 1997 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 35 : 2513–2520, 1997     

Design of EGDMA‐Crosslinked Theophylline Imprinted Polymer with High Specificity and Selectivity

An attempt has been made to design theophylline selective polymers with maximum selectivity and specificity, and to relate the rebinding capacity of the polymers with the degree of crosslinking, as well as with the template‐monomer ratio. The theophylline imprinted and non‐imprinted polymers based on methacrylic acid as the functional monomer and ethylene glycol dimethacrylate (EGDMA) as crosslinking agent (35–80 mol%) were prepared. The developed imprinted polymers were characterized by FT‐IR, ¹H and ¹³C‐NMR spectra. Equilibrium binding of theophylline by the imprinted and non‐imprinted polymers were investigated and optimized the conditions. Imprinted polymers showed specific binding of the template theophylline. Selectivity of the imprinted polymers was investigated towards caffeine and nicotine. Imprinted polymers showed specific and selective binding of theophylline, which varied with the degree of EGDMA crosslinking. Equilibrium rebinding experiments proved that imprinted polymer with moderate (70%) crosslinking with 1∶2 template‐functional monomer ratio is ideal with maximum specificity and selectivity.     

Studies of the chemically amplified development-free vapor photolithography

Development-free vapor photolithography (DFVP) is a unique all-dry pattern transfer technique, which is based on the reaction of SiO₂ with HF vapor under a polymer film in the presence of accelerators at a temperature of above 100°C. In this paper, we found that the etching reaction could be catalyzed by superacids. Based on this discovery, a novel, chemically amplified, development-free vapor photolithography technique was developed, and has benn successfully applied to power electronic device manufacture.     

New soybean oil–styrene–divinylbenzene thermosetting copolymers. II. Dynamic mechanical properties

A variety of new polymeric materials ranging from soft rubbers to hard, tough, and brittle plastics were prepared from the cationic copolymerization of regular soybean oil, low saturation soybean oil (LoSatSoy oil), or conjugated LoSatSoy oil with styrene and divinylbenzene initiated by boron trifluoride diethyl etherate (BF₃ · OEt₂) or related modified initiators. The relationship between the dynamic mechanical properties of the various polymers obtained and the stoichiometry, the types of soybean oils and crosslinking agents, and the different modified initiators was investigated. The room‐temperature storage moduli ranged from 6 × 10⁶ to 2 × 10⁹ Pa, whereas the single glass‐transition temperatures (T_g) varied from approximately 0 to 105 °C. These properties were comparable to those of commercially available rubbery materials and conventional plastics. The crosslinking densities of the new polymers were largely dependent on the concentration of the crosslinking agent and the type of soybean oil employed and varied from 74 to 4 × 10⁴ mol/m³. The T_g increased and the intensity of the loss factor decreased irregularly with an increase in the logarithmic crosslinking densities of the polymers. Empirical equations were established to describe the effect of crosslinking on the loss factor in these new polymeric materials. The polymers based on conjugated LoSatSoy oil, styrene, and divinylbenzene possessed the highest room‐temperature moduli and T_g 's. These new soybean oil polymers appear promising as replacements for petroleum‐based polymeric materials. © 2000 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 38: 2721–2738, 2000     

CALCULATING THE MOLECULAR INTERNAL ROTATING STERIC FACTOR OF POLYMERS BY THE RADIATION CROSSLINKING METHOD

In this paper, calculating the molecular internal rotating steric factor of polymers by the radiation crosslinking method is studied and a relationship between the molecular internal rotating steric factor (σ) and crosslinking parameter βis established~([1]) by taking account of the effect of polymer chain flexibility on βvalue, σvalue of polymer obtained by this method is in agreement with that given with other method.     

Photoassisted etching of silicon dioxide films

Theoretical approaches to resolving the problem of photoassisted etching of silicon dioxide as the most widely used protective layer in microelectronics are presented. A model of donor-acceptor interaction providing for the desolvation of the F^? ion involved in SiO₂ photoetching is proposed. The etchant compositions were optimized, and the effect of the most important factors on the etching process was examined. It has been shown that the maximal photoetching rate is 0.42 μm/min and the chemical contribution to etching is small, being about 0.02 μm/min.     

Near infrared photopolymer for micro-optics applications

Near infrared (NIR) activable photopolymers suitable for versatile fabrication of micro-optical elements were developed. The first main objective of this article is to show that these new photopolymers can be used for microfabrication and investigate the parameters governing the microfabrication process. The impact of photonic, physico-chemical, and chemical parameters is discussed. High quality microstructures with a good control over their size and shape are demonstrated. The second main objective is to show practical examples of microlenses and waveguides implemented on single core and multiple core optical fibers, VCSELs, and glass slides are then presented. The NIR photosensitivity of this negative tone photoresists allows using the device source itself as to start the crosslinking process, which constitutes a convenient approach for micro-optics self-positioning on NIR sources and justifies the interest of such NIR photopolymer for the fabrication micro-optical elements and optical interconnects.     

Luminescent lanthanide-containing chiral liquid crystalline polymers in the side chain

Luminescent lanthanide-containing chiral liquid crystalline polymers are graft-copolymerised using poly(methylhydrogeno)siloxane (PMHS), crosslinking agent, liquid crystalline monomer and lanthanide complexes. The chemical structures of the monomers are characterised by FTIR, ^1?H NMR and elemental analyses. The mesomorphic properties and phase behaviour are investigated by differential scanning calorimetry, thermogravimetric analysis, polarising optical microscopy and X-ray diffraction. The polymers containing less than 9 mol% of the crosslinking units reveal reversible mesomorphic phase transition, wide mesophase temperature ranges and high thermal stability. With the introduction of lanthanide complex units, the polymers are enabled with the significant luminescent properties. The temperature dependence of fluorescence intensity was studied in the liquid crystalline phase. The IR imaging shows that the lanthanide complex units evenly distribute in polymers.     

Imidazole-containing chitosan derivative: a new synthetic approach and sorption properties

A novel method for the synthesis of a hetaryl-containing chelate amino polymer, namely, N-(4(5)-imidazolylmethyl)chitosan (IMC), with a degree of substitution up to 0.3 was proposed. The “synthesis in gel” approach involves direct substitution of the hydroxyl group in 4(5)-imidazolylmethanol. The structures of these polymers were confirmed by ¹H NMR data. For sorption studies, IMC samples were crosslinked with epichlorohydrin and diglycidyl ethers of ethylene glycol and diethylene glycol. The degrees of swelling and sorption properties of the polymers largely depend on the crosslinking agent and the degree of crosslinking. The sorption capacities of IMC for Au^III, Pt^IV, and Pd^II ions are higher than those of the nonmodified polymer. The extraction of noble metal ions from chloride solutions becomes more selective with increasing degree of crosslinking. The sorption capacity of IMC for Co^II and Ni^II ions is higher than those of chitosan and its known N-heterocyclic derivatives.     

Synthesis and liquid crystal alignment properties of new cinnamate-based photocrosslinkable polymers

Because optical buffing can achieve aligning patterns with different azimuthal angles of the liquid crystal directors, photoalignment appears to be a very hopeful technique for designing complex LCD structures. Until recently, most photopolymers provided low anchoring and/or low tilt angles which are unsuitable for industrial applications. In this work, four new photocrosslinkable polymers based on biphenyl and naphthalene moieties have been prepared and characterized. These photopolymers have been irradiated with linearly polarized UV light, and liquid crystal cells have been made. The tilt angles generated by oblique irradiation have been measured as well as the anchoring energies. Finally, the stability of the liquid crystal alignment properties have been studied.     

Photocrosslinking of poly(methyl acrylate)s containing the 1,3-dioxolane structure as a pendant group

(2-Ethyl-2-methyl-1,3-dioxolan-4-yl)methyl- and (2-methyl-2-phenyl-1,3-dioxolan-4-yl) methyl acrylates were synthesized and polymerized. The photochemical behavior of the resulting polymers was investigated to determine whether the polymers pending on the 1,3-dioxolane structure were readily crosslinked with ultraviolet (UV) irradiation. The degree of crosslinking was estimated by the weight-loss method by immersion in acetone, with the result that the polymer with an aromatic substituent was more photocrosslinkable than the polymer that bore the aliphatic substituent. The catalytic effect on photocrosslinking of polymers was also studied by using benzoin and cobalt naphthenate. The infrared (IR) spectra of polymers irradiated in air that showed the new band at 3450 cm^?1 were attributed to a hydroxyl group; however, the spectra of polymers irradiated in vacuum displayed little absorption at 3450 cm^?1. To explain the mechanism of crosslinking model compounds were prepared and irradiated with UV light. It was concluded that crosslinking proceeds mainly from the fission of the 1,3-dioxolane ring and the coupling of the yielding radicals, together with autooxidation by atmospheric oxygen.     

Synthesis and liquid crystal alignment properties of new cinnamate-based photocrosslinkable polymers

Because optical buffing can achieve aligning patterns with different azimuthal angles of the liquid crystal directors, photoalignment appears to be a very hopeful technique for designing complex LCD structures. Until recently, most photopolymers provided low anchoring and/or low tilt angles which are unsuitable for industrial applications. In this work, four new photocrosslinkable polymers based on biphenyl and naphthalene moieties have been prepared and characterized. These photopolymers have been irradiated with linearly polarized UV light, and liquid crystal cells have been made. The tilt angles generated by oblique irradiation have been measured as well as the anchoring energies. Finally, the stability of the liquid crystal alignment properties have been studied.     

Synthesis and characterization of side chain cholesteric liquid crystalline elastomers derived from chiral bisolefinic crosslinking units

In this work we prepared a nematic monomer (4′‐allyloxybiphenyl 4′‐ethoxybenzoate, M₁ ), a chiral crosslinking agent (isosorbide 4‐allyloxybenzoyl bisate, M₂ ) and a series of new side chain cholesteric liquid crystalline elastomers derived from M₁ and M₂ . The chemical structures of the monomers and polymers were confirmed by FTIR and ¹H NMR spectroscopy. The mesomorphic properties were investigated by differential scanning calorimetry, thermogravimetric analysis, polarizing optical microscopy and X‐ray diffraction. The effect of the content of the crosslinking unit on phase behaviour of the elastomers is discussed. Polymer P₁ showed a nematic phase, P₂ –P₇ showed a cholesteric phase; P₆ formed a blue Grandjean texture over a broad temperature range 145–209.6°C, with no changed on the cooling. Polymers P₄ –P₇ , with more than 6?mol?% of chiral crosslinking agent, gave rise to selective reflection. Elastomers containing less than 15?mol?% of the crosslinking units displayed elasticity, reversible phase transition with wide mesophase temperature ranges, and high thermal stability. Experimental results demonstrated that, with increasing content of crosslinking agent, the glass transition temperatures first fell and then increased; the isotropization temperatures and mesophase temperature ranges decreased.     

Three-component photopolymers based on thermal crosslinking and acidolytic de-crosslinking of vinyl ether groups. 2. effects of acid components on photopolymer characteristics

The three-component photopolymers consisting of poly(p-hydroxystyrene) (PHS) or poly(styrene-co-acrylic acid) (PSA) as the binder polymer, 2,2-bis(4-(2-(vinyloxy)ethoxy)phenyl)propane (BPA-DEVE) or 1,1,1-tris(4-(2-(vinyloxy)ethoxy)phenyl)ethane (THPETEVE) as the crosslinking agent, and a photoacid generator were investigated with regard to their lithographic characteristics and thermal crosslinking reactivity because of the acidity of the acid component. The thermal crosslinking rate can be represented as the pseudo first-order reaction. The PSA copolymer with an acrylic acid unit has the higher crosslinking rate and sensitivity, and the lower activation energy. Under low baking temperatures at which crosslinking does not take place, dual-mode resist behavior is observed.     

Crosslinking polyferrocenylenes by polymethylol compounds

Polyferrocenylenes with mean molecular weights of 500–4 000 have been converted into thermosetting polymers by reaction with xylylene glycol and telomers thereof. The prepolymers have been used successfully as molding materials and laminating resins. Glass fiber-reinforced laminates have been made with flexural strengths of 63 × 10³ psi and flexural moduli of 4–5 × 10⁶ psi. Ferrocene–xylylene glycol copolymers were also prepared, and 1,1′-bis(hydroxymethyl)ferrocene was used as a polyferrocenylene crosslinking agent. Laminates were also made from the 1,1′-bis(hydroxymethyl)ferrocene-based polymers.     

Synthesis and characterization of liquid crystalline elastomers bearing fluorinated mesogenic units and crosslinking mesogens

Several new side‐chain liquid crystalline (LC) polysiloxanes and elastomers ( IP ‐ VIP ) bearing fluorinated mesogenic units and crosslinking mesogens were synthesized by a one‐step hydrosilylation reaction with poly(methylhydrogeno)siloxane, a fluorine‐containing LC monomer 4′‐undec‐10‐enoyloxy‐biphenyl‐4‐yl 4‐fluoro‐benzoate and a crosslinking LC monomer 4′‐(4‐allyloxy‐benzoxy)‐biphenyl‐4‐yl 4‐allyloxy‐benzoate. The chemical structures and LC properties of the monomers and polymers were characterized by use of various experimental techniques such as FTIR, ¹H‐NMR, EA, TGA, DSC, POM and XRD. The effect of crosslinking mesogens on mesomorphic properties of the fluorinated LC polymers was studied as well. The obtained polymers and elastomers were soluble in many solvents such as toluene, tetrahydrofuran, chloroform, and so forth. The temperatures at which 5% weight loss occurred (T_d) were greater than 250°C for all the polymers, and the weight of residue near 600°C increased slightly with increase of the crosslinking mesogens in the fluorinated polymer systems. The samples IP , IIP , IIIP and IVP showed both smectic A and nematic phases when they were heated and cooled, but VP and VIP exhibited only a nematic mesophase. The glass transition temperature (T_g) of polymers increased slightly with increase of crosslinking mesogens in the polymer systems, but the mesophase–isotropic phase transition temperature (T_i) and smectic A–nematic mesophase transition temperature (T_S‐N) decreased slightly. It suggests that the temperature range of the mesophase became narrow with the increase of crosslinking mesogens for all the fluorinated polymers and elastomers. In XRD curves, the intensity of sharp reflections at low angle decreased with increase of crosslinking mesogens in the fluorinated polymers systems, indicating that the smectic order derived from fluorinated mesogenic units should be destroyed by introduction of more crosslinking mesogens. Copyright © 2008 John Wiley & Sons, Ltd.     

Reversible addition–fragmentation chain transfer mediated radical polymerization of asymmetrical divinyl monomers targeting hyperbranched vinyl polymers

Reversible addition–fragmentation chain transfer (RAFT) mediated radical polymerizations of allyl methacrylate and undecenyl methacrylate, compounds containing two types of vinyl groups with different reactivities, were investigated to provide hyperbranched polymers. The RAFT agent benzyl dithiobenzoate was demonstrated to be an appropriate chain‐transfer agent to inhibit crosslinking and obtain polymers with moderate‐to‐high conversions. The polymerization of allyl methacrylate led to a polymer without branches but with five‐ or six‐membered rings. However, poly(undecenyl methacrylate) showed an indication of branching rather than intramolecular cycles. The hyperbranched structure of poly(undecenyl methacrylate) was confirmed by a combination of ¹H, ¹³C, ¹H–¹H correlation spectroscopy, and distortionless enhancement by polarization transfer 135 NMR spectra. The branching topology of the polymers was controlled by the variation of the reaction temperature, chain‐transfer‐agent concentration, and monomer conversion. The significantly lower inherent viscosities of the resulting polymers, compared with those of linear analogues, demonstrated their compact structure. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 45: 26–40, 2007     

Microstructural PALS study of regulated dimethacrylates: Thiol‐ versus β‐allyl sulfone‐based networks

Radical photocuring of multifunctional (meth)acrylates is lacking control over the irregular chain growth process yielding highly crosslinked, inhomogeneous networks. Chain transfer agents (CTAs, e.g., thiols or β‐allyl sulfones) have been widely used to modify this curing process, thus reducing shrinkage stress and increasing the toughness of the formed photopolymers. Resulting photopolymer networks exhibit higher bulk density, lower crosslinking density, and narrow glass transitions. Consequently, a more homogeneous network structure was postulated for those networks. Whereas macroscopic properties of the modified final materials have already been studied, herein the microstructural arrangement of such modified networks has also been evaluated with the help of positron annihilation lifetime spectroscopy (PALS). A more homogenous network structure with a decreased average free‐volume void size was confirmed for CTA‐based dimethacrylate networks. A sharper distribution of the ortho‐positronium (o‐Ps) lifetime, mainly for the β‐allyl sulfone‐based photopolymers, hints toward a more regulated network structure. Moreover, the combination of PALS, DMTA, density and swelling experiments elucidates relations between void formation, crosslinking density and macroscopic characteristics such as shrinkage stress and mechanical properties. © 2016 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2016 , 54, 2476–2484     

Synthesis and photochemical properties of novel multifunctional photopolymers with both pendant epoxy groups and phenacyl ester groups

Novel multifunctional photopolymers with both pendant epoxy groups and phenacyl ester groups were synthesized by the one‐pot method for the reaction of poly(methacrylic acid) with epibromohydrin; this was followed by a reaction with phenacylbromide with 1,8‐diazabicyclo‐[5.4.0]undecene‐7 as a condensation reagent. These esterification reactions proceeded smoothly and quantitatively under mild conditions. Moreover, the photochemical reactions of the resulting polymers were evaluated by UV and IR spectroscopy. The pendant phenacyl ester groups were photocleaved to give corresponding carboxyl groups, and then the produced carboxyl groups reacted with pendant epoxy groups. Furthermore, the baking process promoted a crosslinking reaction because of the addition reaction of epoxy groups with carboxyl groups after irradiation. It was also proven that the photochemical reactivity of the resulting polymers was affected by the structure of the phenacyl ester group. © 2001 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 39: 530–538, 2001