13.4nm软X射线干涉光刻透射光栅的优化设计

基于严格的矢量耦合波方法,结合纳米级光栅实际制作工艺,定量分析了在13.4 nm软X射线(TE偏振)正入射条件下,光栅材料、厚度、占空比、梯形浮雕底角大小等因素对光栅一级衍射效率的影响.结果表明,在此波段处,Si3N4、Cr、Au浮雕的相位作用对光栅衍射起重要影响,其中非金属材料Si3N4比金属材料Cr、Au的相位作用更明显.最后优化得到了用Si(或Si3N4)做衬底的si3N4、Cr、Au光栅,分析结果显示,其一级衍射效率优于目前用于13.4 nm软X射线干涉光刻的Cr、Si3N4复合光栅.     

X-ray Bragg diffraction on periodic surface gratings

We report on the X-ray Bragg diffraction analysis of periodic surface gratings on (100) GaAs crystals. We show that the X-ray Bragg diffraction is a very powerful method to investigate ultrafine surface gratings and allow us to determine not only the grating period but, in particular, the width of the grooves and to characterize the quality of the sidewalls, which is not easily possible with optical methods. The X-ray diffraction on surface crystal gratings is analogue to the Fraunhofer diffraction of multiple slits or reflection gratings.     

Highly resolved EUV beam-foil spectra of silicon

Spectra of foil-excited ions at tandem energies in the EUV region show many unclassified lines. In order to provide a basis for term analysis, high resolution spectra of Si are taken using a ruled 600 l/mm grating in 3^rd diffraction order and two holographic gratings of 1,200 l/mm resp. 3,600 l/mm in first diffraction order. With the latter grating the resolution power of a 2.2 m grazing-incidence monochromator is sufficient to measure fine-structure splittings of inter-shell transitions of O VI–O VIII and Si X–Si XII in the wavelength rangeλ < 20 nm. The performance of the gratings is demonstrated.     

Absorption gratings in ferroelectric Bi4Ti3O12

4 Ti₃O₁₂. Basic properties of absorption gratings in this crystal are investigated with beam-coupling experiments. Depending on the grating spacing, wavelength, and intensity of the writing beams, an absorption grating in our sample can be either in phase or shifted by 180° with respect to the light pattern. The formation mechanism of absorption grating is discussed and proposed to originate from a shallow-trap effect. Received: 10 February 1997     

一种新型透射式自聚焦光栅的设计及理论研究

结合普通透射光栅的分光特性和菲涅耳波带片的聚焦特性,提出一种应用于软X射线波段的新型透射式自聚焦光栅。根据菲涅耳衍射理论,对其衍射特性进行理论推导,证明该新型光栅存在一个与光栅平面垂直的焦平面,不同波长的光波聚焦于该焦平面的不同位置。在焦平面上,焦点位置随光子能量的变化是线性的,即能实现光子能量的线性测量。通过解析推导,得到在沿着焦平面和垂直于焦平面两个方向上光斑的展宽模式,发现该新型光栅在沿着焦平面的光斑展宽模式不同于普通光栅。根据基尔霍夫衍射公式,设置实用化参数,对其衍射模式进行了详细的数值模拟研究,并讨论了相应的测谱范围和谱分辨率。     

Diffraction study of volume holographic gratings in dispersive photorefractive material for femtosecond pulse readout

Based on the modified Kogelnik diffraction efficiency equation, the diffraction intensity spectrum and the total diffraction efficiency of volume gratings in photorefractive media are studied systematically. Taking photorefractive InP:Fe crystal as an example, the effect of the grating parameters and the pulse width on the diffraction properties are presented, in particular under the influence of crystal material dispersion. Under the combined effects, the diffraction pulse profiles and the total diffraction efficiency are shown. Also, the diffraction properties with and without crystal material dispersion are compared. These studies indicate that the properties of the diffraction beams can be controlled by the holographic grating parameters; this property can be used for pulse shaping applications.     

Thermal polarization properties of thick anisotropic diffraction holograms recorded in polymer-dispersed liquid crystals

The diffraction and polarization properties of thick anisotropic holographic gratings recorded in polymer-dispersed liquid crystals are studied experimentally and theoretically. Such gratings are anisotropic and sensitive to temperature variations and also exhibit a strong dependence of the diffraction properties on the incident radiation polarization because of the presence of liquid-crystal molecules. The dependences of the diffraction efficiency and diffracted beam polarization orientation on the diffraction grating temperature and incident beam linear polarization are obtained for the case of Bragg incidence. The same dependences are derived using the known experimental temperature curves of the liquid crystal permittivity. The experimental data are in agreement with the theoretical calculations. The feasibility of controlling the diffraction characteristics of the grating in a wide temperature interval is demonstrated.     

不同结构的电控双折射无刻痕光栅研究

用MLC-7700-100向列相液晶制备了不同结构的电控双折射无刻痕液晶光栅.用波长为632.8 nm的He-Ne激光为光源,测量两种液晶光栅的光学衍射特性,用偏光显微镜观察不同电压下两种液晶光栅的液晶分子偏转状态和织构态改变的情况,并进行分析对比.发现双面电极条纹液晶光栅的电控衍射特性比单面电极条纹液晶光栅好.此结果...     

光轴方向任意时光折变晶体中体全息光栅的衍射性质

利用坐标旋转方法和Kogelnik耦合波理论,建立了光轴方向任意时单轴晶体中体光栅布拉格衍射的耦合波方程,分析了Li NbO3晶体的光轴方向对光折变体全息光栅的各向同性和各向异性布拉格衍射性质的影响。模拟计算表明,在给定光栅的结构参量时,通过适当选择光轴方向角可以使得光折变体光栅的各向同性和各向异性布拉格衍射的衍射效率达到最大,给出了相应类型的衍射效率取得最大值时晶体光轴的大致方向。这些理论分析为光折变体全息光学器件的优化设计和进一步广泛应用提供了很好的理论参考依据。     

Methods to control parameters of a diffraction grating on the surface of lithium niobate electro-optical crystal

Optical transmission and directivity pattern of a tunable diffraction grating that is based on the X-cut lithium niobate electro-optical crystal are studied. It is demonstrated that the intensities in 0 and ±1 diffraction orders decrease by 40% relative to the original level when a voltage of 792 V is applied to electrodes on the crystal. Diffraction orders at angels of ±λ/(2d) and ±3λ/(2d) are demonstrated. The changes of directivity pattern are caused by scattering phase diffraction grating that emerges in the crystal in the presence of the electric field of electrodes and vanishes in the absence of voltage. A hysteresis dependence of the intensity of the zero diffraction order on the voltage is related to the formation of needle-shaped domains with a length of up to 100 μm and a width of up to 10 μm that are oriented perpendicularly to the electrodes. In the vicinity of the domains, the electric field causes rotation of the crystal indicatrix and depolarization and scattering of the transmitted radiation. Under normal conditions, the lifetime of the domains is several weeks when the voltage is switched off and the electrodes are not short-circuited.     

Single order soft X-ray diffraction with quasi-random radius pinhole array spectroscopic photon sieves

A novel single order diffraction grating in the soft X-ray region, called quasi-random radius pinhole array spectro- scopic photon sieves （QRSPS）, is proposed in this paper. This new grating is composed of pinholes on a substrate, whose radii are quasi-random, while their centers are regular. Analysis proves that its transmittance function across the grating bar is similar to that of sinusoidal transmission gratings. Simulation results show that the QRSPS can suppress higher-order diffraction effectively. And the QRSPS would still retain its characteristic of single order diffraction when we take the effect of X-ray penetration into account. These properties indicate that the QRSPS can be used in the soft X-ray spectra measurement.     

Peculiarities of spontaneous grating generation in light-sensitive waveguide layers during holographic grating formation

The generation of spontaneous (noise) gratings during the simultaneous formation of a holographic grating in thin (on the order of the cutoff thickness of the TE₀ waveguide mode) AgCl-Ag films by two laser beams with λ = 532 nm and polarization vectors that make an angle of 45° with the plane of incidence have been studied. The electron microscopy images and diffraction patterns have revealed a significant difference of the spontaneous-grating structure from the structure obtained under irradiation by one laser beam. The spontaneous gratings have a significant spread in the directions of their wave vector, and the diffraction pattern (recorded using a probe beam with λ = 337 nm) has the form of a bundle of diverging arcs that intersect at one point. This difference is caused by self-diffraction from the holographic grating, which is responsible for the main diffraction peaks with odd orders, the growth of spontaneous gratings because of the interference of the beams diffracted by the holographic grating with the waveguide TE₀ modes scattered in the film, and silver transport to the interference minima. The diffraction patterns are quantitatively analyzed and the period of the new (formed under two-beam irradiation) spontaneous gratings is calculated. The calculation results are in good agreement with the experimental data.     

Hydrophobic and antireflective characteristics of thermally oxidized periodic Si surface nanostructures

We reported the antireflective properties of periodic silicon (Si) subwavelength gratings and flat substrates in combination with thermal oxidation for an effective surface passivation. Moreover, theoretical calculations and analysis based on rigorous coupled-wave analysis simulation were performed. For thermally oxidized Si subwavelength grating structures, the reflectance was significantly reduced compared to that of the thermally oxidized flat Si substrates in wide ranges of wavelengths and angles of incidence. As the oxidation time increased, the reflectance became lower with increasing SiO _x thickness on Si subwavelength gratings due to the more graded effective refractive index profile from air to the Si via the thermally oxidized Si subwavelength gratings with increased height. By incorporating a thermal oxidation process into the Si subwavelength gratings, a more hydrophobic surface with good surface passivation was obtained.     

紫外光诱导液晶相位光栅

使用紫外光诱导取向技术制作了可转换的液晶相位光栅,通过光掩模两次曝光的方法形成光栅条纹.这种光栅制作工艺较为简单,不需要上下基板精确的对准,驱动电压较低.采用He-Ne激光器和光探测器进行测试,结果表明,衍射效率具有电场调制性并出现同预测一致的衍射条纹.对液晶光栅的偏振特性进行了研究,利用琼斯矩阵和衍射理论对液晶相位光栅衍射强度进行了分析和模拟计算.     

Electro-optic properties of switchable gratings made of polymer and nematic liquid-crystal slices

We report the diffraction properties at wavelengths of 632.8 and 1550 nm for volume transmission gratings made of a sequence of continuously aligned nematic liquid-crystal layers separated by isotropic polymer slices. The gratings are generated by holographically curing a solution of liquid crystal diluted in an isotropic prepolymer by means of a laser beam at a wavelength of 352 nm with a total intensity of approximately 10 mW/cm2. A diffraction efficiency of 98% was measured, and an electric field as low as 5 V/microm switches off the phase grating. Measured angular spectra are fitted by use of the modified coupled-mode theory including the effects of grating birefringence.     

Diffraction properties of ultrashort pulsed beams with arbitrary temporal profiles by a reflection volume holographic grating

The diffraction properties of reflection volume holographic gratings are studied when the gratings are illuminated by an ultrashort beam with arbitrary temporal profiles. The modified Kogelnik's theory of coupled waves is used. Simple analytical expressions for spectral and temporal distribution of the transmitted and diffracted are obtained. The dependences of the diffraction bandwidth, the Bragg selectivity bandwidth and the total diffraction efficiency of the reflection volume grating on the temporal profiles of the input ultrashort pulse are investigated. Study shows that the bandwidth of the reflection volume holographic gratings varies with the grating parameters more slowly than the transmitting volume holographic gratings. For three different temporal profiles, numerical results about diffraction properties of the reflection volume holographic gratings are given and compared with the transmitting volume holographic gratings.     

多层膜闪耀光栅衍射的运动学研究

用 X射线运动学理论对软 X射线多层膜闪耀光栅的衍射特性进行了详细的研究 ,得到了衍射规律的一般表达式 ,讨论了产生衍射极大值的条件、光谱特性 ,不同于光栅和多层膜的色散特性。以及用作软 X射线单色器的一般性问题。发现只要选择合适的光栅参数 ,便可以将衍射光的大部分能量集中到某一个非零衍射级上。     

Control of anisotropic diffraction in liquid-crystal composite volume gratings

Orientation-controlled anisotropic diffraction gratings are realized by interferometric exposure using composite materials of nematic liquid crystals (LCs) and LC diacrylate monomers. The anisotropic diffraction properties in volume gratings, which dominantly diffract p- or s-polarized light, are shown to be controlled by the rubbed directions of the alignment layers under the control of the photopolymerization temperature. Images of the fringe patterns observed by polarization microscopy show the effects of the alignment layers on the LC orientation during grating formation.     

Sudan IV dye based poly(alkyloxymethacrylate) films for optical data storage

The polymer poly{1-[2′-methyl-4′-(2″-methylphenylazo) phenylazo]-2-(m-methacryloyloxyoctyloxy}naphthalene, where m = 6, 8, 10, is synthesized by free radical addition polymerization method for holographic optical data storage. Characterization of the polymers is done by formation of the holographic grating. A study of the dependence of diffraction efficiency of the grating formed on various parameters is presented. Surface relief gratings on these polymer films are created upon exposure to argon ion laser beams at 514.5 nm without any subsequent processing steps. The surface structure of the relief gratings has been investigated by atomic force microscopy. The depth of surface relief in a typical case is found to be around 40 nm.