飞秒激光直写偏振转换器件和几何相位器件(特邀)

光学器件的微型化和集成化是当前研究的热点,其中利用微纳结构实现局域电磁改性的超构光学更是引人关注.本文从微纳结构的制备出发,总结了利用超衍射精密加工的飞秒激光直写技术,制备偏振转换器件和几何相位器件的工作.介绍了微纳结构改性的物理机制,飞秒激光直写光刻胶、飞秒激光烧蚀金属薄膜、飞秒激光诱导纳米光栅等手段在偏振转换器件和...     

衍射光学二维激光扫描器设计制作研究

提出、设计并采用激光直写和反应离子刻蚀技术制作出一种新型的衍射光学纯相位型二维激光扫描器,并进行了系统参数的实验测试,其扫描角度为２５°×２５°,衍射效率为４１％。     

激光直写非对称多模高聚物光功率分配器

设计并制作了一种基于激光直写工艺的多模高聚物1×8光功率分配器。该器件采用了独特的次级非对称结构实现了光功率在各个输出端口的均匀分配。借助紫外激光直写的方式,配合高精度平移台实现了器件的加工,并将整个分配器的制作过程控制在5 min以内,从而在加工周期上颇具优势。对所得的分配器进行了性能测试,实验结果表明,端口输出光功率最大均匀度差异小于4%,证明了器件具有较为理想的分光性能。提出的激光直写法结构加工无需掩模或离子蚀刻等复杂加工手段,有助于大幅度提高制造效率并能够有效地控制器件性能。     

利用飞秒激光直写实现透明介电材料中三维维微微纳结构的制备与集成

本文综述了利用飞秒激光三维直写技术,在玻璃和晶体等透明介电材料中实现微流体、微光学、微电子学等一系列功能性微纳结构,并进一步构筑新型微纳光子器件的原理、技术与应用。     

连续型平面衍射聚光透镜掩模的制作

针对目前二元光学元件掩模制作工艺过程的诸多不足，对连续型平面衍射聚光透镜掩模的激光直写制作工艺进行了研究。基于基尔霍夫标量衍射理论，采用光线追迹法设计了连续型平面衍射聚光透镜掩模。采用激光直写技术，利用CLWS 300M／C极坐标激光直写设备、S1830光刻胶和MICROPOSIT 351显影液，进行了刻写实验。实验表明，激光能量、预烘烤温度、显影液浓度以及预曝光对掩模微结构的制作均有影响。最后制作了掩模。与二元光学元件掩模的制作工艺相比，该技术具有工艺简单、制作周期短且易于操作的优点。     

基于双光子聚合的片上光学互连（特邀）

集成光子芯片是将激光光源、低损耗波导、调制器、探测器等多类光电器件结合在一起,实现功能化集成,在高速光通讯、量子信息处理、光学传感等领域有具有重要的应用。然而由于不同的光电器件基于不同材料体系,实现多材料体系的光电器件集成极其困难。传统的异质集成和单片集成方法难以同时解决定位精度不足、低拓展性、高损耗、低带宽等一系列问题。基于飞秒激光的双光子聚合技术具有高精度和高穿透的优势,可以实现多材料体系的片上微纳光学元件增材制造,具有极高的加工自由度。本文对片上光学元件的激光增材制造这一领域进行综述,探讨了光子引线键合和微空间光路元件两种技术路径,总结了现有技术的发展现状,并对未来的发展前景进行了展望。     

飞秒激光制作微型光纤干涉传感器的研究进展

飞秒激光脉冲持续时间短、峰值功率高,在对物质进行处理过程中热作用区域小、加工精度高,已成为一种制作高性能、新结构光子器件的重要方法。简单介绍了飞秒脉冲激光微加工的方法和特性,归纳了飞秒激光直写技术在光纤干涉型传感器制作方面的研究进展,包括微型光纤Fabry-Perot干涉传感器和微型光纤Mach-Zehnder干涉传感器,重点介绍了这些光纤传感器的结构、特性和潜在应用。对用该技术制作的微型光纤干涉传感器进行了总结和展望。     

基于软光刻的片间光学互连线路

设计并试制了由软光刻法转印,可敷设在印刷电路板上用于芯片间互连的光学互连线路。提出了一种新颖的端口耦合结构,并发现在耦合适配段长度与接收窗口的长度比值为12∶1时耦合效率最佳,且该耦合结构有效降低了对安装精度的要求;分析了该光学互连线路在交叉布线时的基本准则,获得对于不同横截面矩形波导结构在交叉布线时呈现的串扰与交叉角度的相关性,并发现在强束缚下交叉角度大于54°的交叉结构都能达到低串扰(小于-30 dB)。采用软光刻技术制作了上述高聚物波导光学互连线路元件,实验测量结果与设计数据符合较好。与传统的光刻或激光直写技术相比,软光刻转印具有制作简单,易于实现高聚物三维结构的大批量高精度复制。     

基于回音壁谐振模的无标记光学生物传感技术

光学生物传感器在新药研制和生命科学等领域得到广泛关注,重点对基于回音壁谐振模的无标记光学生物传感器做了评述。根据谐振腔结构将传感器分为三类。基于微球的生物传感器由于微球腔的高品质因子而成为最初研究的重点,已实验研究了对蛋白质分子、病毒和细菌的传感响应,建立了基于单光子谐振能量和微扰理论的理论模型;基于微盘的生物传感器能够利用成熟的平面光刻微加工技术,传感构想提出更早,但直到回流热处理技术的应用才使得微盘品质因子大幅提高,从而实现了单分子测量;基于微环的生物传感器具有简单的谐振模式,有利于信号探测,已采用聚合物,氮化硅,以及硅基二氧化硅等材料制作成功,作为其在三维上的扩展,微管式传感器由于能够将光通道和流体通道合二为一而在近年得到关注。     

超构器件的设计、制造与成像应用

超构光学为平面光学器件的发展提供了新的思路与方向。超构器件由亚波长人工纳米结构组成，能在二维平面上实现对入射光的振幅、相位和偏振的操纵。研究人员已经发展了多种超构表面技术，将其用于满足各式各样的光学需求。本文首先回顾了超构器件的前沿研究与技术发展现状，介绍了超构器件的广义设计流程，并以连续宽带消色差超构透镜为例进行逐步说明，帮助读者理解；然后，展示了多种超构器件加工方法，包括直写刻蚀、图案转移刻蚀和混合图案刻蚀等，进一步讨论了超构器件在成像应用中的发展，包括偏振成像、光场成像、光学感测以及生物成像等；最后，进行了总结，并对超构器件未来的发展提出了见解与展望。     

Phase-shifted Fresnel axicon

We propose an optical element: a phase-shifted Fresnel axicon for generation of multiple Bessel beams. By giving a binary phase modulation to the standard Fresnel axicon, the proposed element is generated. The phase profile of the binary phase modulation is engineered to generate two and three Bessel beams of equal intensities. This composite optical element is fabricated using electron beam direct writing. The performance of the fabricated device is evaluated using a semiconductor laser, and the generation of two and three Bessel beams is successfully demonstrated.     

Using diffractive optical element and Zygo interferometer to test large-aperture convex surface

A valid method for measuring the large-aperture convex surface by using a curved diffractive optical element (DOE) and a Zygo interferometer is demonstrated experimentally. In this method, the direct use of source and high-resolution CCD camera of Zygo interferometer represents a major advance in the areas of adjustment. The DOE, fabricated by combining laser direct writing and lithography, results in higher accuracy, efficiency and lower cost for testing aspheric compared with other types of DOE employed. We have fabricated one optical test system and measured a 110-mm-diameter convex surface of errors 44.3 nm rms and 311 nm P–V.     

Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Polymeric flat focal field arrayed waveguide grating using electron-beam direct wiring

A four-channel 400-GHz spacing flat focal field arrayed waveguide grating (AWG) demultiplexer is designed based on polymeric optical waveguide. The waveguide core-layer material is a newly developed negative tone epoxy Novolak resin (ENR) polymer with ultravoilet (UV) cured resin Norland optical adhesive 61(NOA61) as the cladding layer. The device is fabricated using electron-beam direct writing, which has less processing steps than the reported polymeric AWGs. The experimental result is presented.     

Fabrication of multilayer metamaterials by femtosecond laser‐induced forward‐transfer technique

A novel method based on femtosecond laser‐induced forward transfer for high‐throughput and efficient fabrication of periodic multilayer plasmonic metamaterials is demonstrated. With precisely controlling laser raster path applied on sputtered multilayer thin films, the laser‐ablated materials can be transferred to another substrate leaving the fabricated multilayer structure on the original substrate. Subsequently, three‐dimensional metamaterials can be made by multilayer structuring. Moreover, all the experimental results show that to create such multilayer split resonant rings (SRRs) with uniform profile, the laser fluence should be fine controlled under proper conditions. The optical property of fabricated multilayer SRR array is investigated by optical measurements and finite‐difference time‐domain simulations, showing various resonant modes in the middle‐IR region. The calculated induced current distributions exhibit rich resonance properties of the structures as well. This work markedly extends the laser direct writing technique to a wide application in fabricating complicated metamaterials and plasmonic devices efficiently.     

激光直写制作的小F数连续浮雕衍射透镜轴向聚焦特性分析

为确定卷积效应以及深度制作误差对小F数连续浮雕衍射透镜(DOE)轴向聚焦特性影响,基于瑞利-索末菲衍射理论建立了激光直写制作的连续浮雕衍射透镜非旁轴近似轴向光强分布模型.该模型考虑了连续浮雕衍射透镜的轴向衍射聚焦特性与透镜结构参数、写入光斑尺寸和扫描间距以及深度制作误差的关系,克服了傍轴近似条件下传统模型的不精确性.为验证模型的正确性,用激光直写制作了设计波长为441.6 nm,F数为4以及相位匹配因子为3的连续浮雕衍射透镜,并测试了波长441.6 nm激光入射时透镜的轴向聚焦特性.实验与分析表明,该模型分析结果与实验测试结果符合,从而证实模型的有效性,为激光直写制作的小F数连续浮雕衍射透镜的应用提供了理论依据.     

Photoetching of spherical microlenses on glasses using a femtosecond laser

We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications.     

Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology

A novel and cheap direct writing method based on the micropen has been developed to fabricate fluorinated polyimide stripe optical waveguides on Si/SiO₂ wafers. The overall design, starting material, micropen direct writing system and fabrication processes of the stripe optical waveguides are presented. The effects of the key direct writing parameters, such as the tip-to-substrate distance, extrusive gas pressure, writing speed and viscosity of the polyamic acid, on the dimension and morphology of the stripe optical waveguides are discussed in detail. After deposition by the micropen system and baking process, the fluorinated polyimide stripe optical waveguides with good morphology and surface quality can be fabricated using the optimal parameters. The propagation losses at the wavelength of 1.55 μm are in the range of 1.4-3.5 dB cm⁻¹ as characterized by different length combinations of the strip optical waveguides.     

Silicon-based transmissive diffractive optical element

A silicon nitride (SiNx) membrane diffractive optical element (DOE) designed to exhibit beam-splitting and focusing behavior at visible wavelengths has been fabricated and tested. Since the fabrication process is based on silicon micromachining technology, the DOE is easily integrated with a laser diode chip and a photodiode chip on a silicon substrate to function as the hologram-laser-photodiode unit for use in the pickup head of a CD or DVD system. The SiNx film is deposited with low-pressure chemical-vapor deposition and the free-standing membrane is formed by KOH etching. The transmissive DOE showed a high diffraction efficiency (>20% for a binary-phase-level element). The experimental evaluation was in good agreement with the designed and modeled predictions.