移相干涉技术中移相器的自校正方法

移相干涉技术（ＰＳＩ）是８０年代兴起的一门干涉图形自动识别技术，移相器作为移相干涉技术的关键部件其移相误差将直接影响到移相干涉技术的干涉图的识别精度。本文提出了一种移相器的自校正方法，即利用移相干涉仪的自身系统，通过快速傅里叶方法，对移相器进行逐步逼近校正。结合移相式红外干涉仪的研制，给出了一组移相器的自动校正的实验，实验表明，校正后的移相器的非线性误差可由原来的５％降低到０．２％。     

移相干涉测量术及其应用

为了对移相式数字干涉仪在光学元件测量中的应用有全面了解，介绍了移相干涉术的基本原理。结合激光数字波面干涉仪，阐述移相干涉术的四步重叠平均算法、压电晶体移相器(PZT)的结构、3 PZT的组合方法、移相器的标定误差和非线性误差的校正方法、波面相位解包的自适应种子算法、波面相位的评价指标等内容。结合移相数字波面干涉仪，叙述了移相干涉测量技术在普通光学元件、红外光学元件、大口径光学元件、非球面光学元件等测量中的应用并指出了应用过程中的注意事项。最后明确指出光干涉技术正沿着高相位分辨率、高空间分辨率、宽波段和瞬态高速测量的方向发展，并将会在瞬态波前测量、微机械的微结构动态分析等方面有着越来越广泛的应用。     

基于波长移相剪切干涉的准直波前重构技术

为了实现干涉仪出射准直波前的重构,提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射,通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响,推导相对剪切比和其影响因素间的关系公式,给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前,波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置,提高了测量精度,特别适合于测量波长移相干涉仪的出射波前。     

移相干涉术的新方法—声光变频移相法

提出了一种变频移相的方法，并用声光器件作为变频移相器件进行了移相干涉实验，这种方法可以完成压电陶瓷移相方法无法实现的一些移相干涉测量。     

可用于单幅闭合干涉图相位恢复的正则化相位跟随技术

在利用干涉技术检测温度、压力、形貌等物理量时,往往需要通过各种调制手段将这些物理量的信息加载到干涉条纹图样中,并通过对其进行分析而得到被测信息。当实验条件不利于实验者实施移相、加载波等调制手段时,探测器得到的往往是单幅闭合条纹,此时常用的移相解调技术和频谱分析方法等不再适用。正则化相位跟随(Regularized Phase Tracking,RPT)技术可以对单幅闭合条纹进行相位恢复,是目前针对单幅闭合条纹相位恢复最有效的方法。近年来研究者们从复杂干涉图处理能力、算法稳定性、相位恢复精度等方面对RPT技术进行了改进和发展,使其逐渐走向实用化。本文介绍了RPT技术用于单幅干涉图相位恢复的基本原理,总结了近年来RPT技术的相关改进与发展,例举了采用RPT技术进行相位恢复的应用场合,并适当推测RPT技术的未来发展方向。     

基于偏振移相的环路径向剪切干涉

只需要一幅干涉图就能得到被检波面信息的径向剪切干涉,适于动态波前的测量。将便于干涉图像处理的同步移相技术引入径向剪切干涉中,基于环路径向剪切干涉,利用一个正交的二维光栅分光,采用偏振移相法,能同时得到相移间隔π/2的四幅移相干涉图。运用传统的四步移相算法,结合波面迭代算法复原波面。通过理论公式的推导、计算机的模拟分析,以及初步的实验测试,验证了偏振移相应用于径向剪切干涉的可行性,模拟结果显示均方根精度优于λ/100。具有抗振特点的光栅分光偏振移相的同步移相方案,不仅能够克服剪切干涉的单幅干涉图处理复杂的缺点,更有利于提高剪切干涉的抗干扰能力。     

应用移相干涉术测量量块长度和长度变动量

研究了应用移相干涉术测量新的一等量块的方法。对于干涉图像进行多幅图的采样，由移相法计算量块测量面和与其研全的辅助平晶表面的波面面形，着重研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术，得到一幅表征它们表面的离散滤差值，并给出量块工作面长度和长度变动量的测量结果。     

平行平板光学参数的快速高精度测量方法

提出一种基于特征多项式的波长移相干涉测量方法。首先,将该方法与两步绝对测量法结合,对多表面干涉技术进行理论研究;然后,以特征图和特征多项式理论为基础设计出一种加权多步波长移相算法,用于对平板的表面面形、光学厚度变化以及光学均匀性信息进行提取计算,并通过移相算法的评价函数及其傅里叶表达式展示了算法对误差的抗扰度;最后,将该算法与OPL算法进行对比。结果表明,所提方法在不同厚度平行平板光学均匀性的测量上具有速度快、精度高的优势。     

国外光学测试技术(续)

四、干涉测试技术虽然上述的三种测试技术也是基于光的干涉,但这里是指通常的干涉技术。干涉技术广泛地应用于光学工业中。牛顿环、     

基于Lissajous图技术的波长移相标定方法

波长移相干涉仪可应用于大口径光学元件的检测。研究了基于Lissajous图技术的波长移相标定方法,实现了干涉图间移相量的计算,解决了在不同干涉腔长下进行测试时移相量需控制成为一个特定值的问题。首先通过模拟仿真,验证了方法的正确性;然后编写程序对已知移相量的实际干涉图进行计算。结果表明,在干涉图对比度较好以及对计算的两点选择恰当的情况下,计算出的相对误差在4%范围内。     

一种同步移相干涉测量系统的误差研究

根据偏振光的琼斯矩阵理论,分析了一种基于二维光栅分光的同步移相干涉测量系统的工作原理。从干涉系统、分光系统以及移相系统三个部分详细研究了该系统的误差产生原因和作用机理,并针对各种误差源提出了相应的解决办法,为同步移相干涉测量系统中光学元件的选择、光路的调整及其误差的补偿提供了理论依据。结果表明,干涉部分的误差影响较小,可以通过光路的设计降低分光部分的误差;移相系统的误差最大,必须要对移相误差进行标定。     

Volume-grating phase-shifting digital speckle pattern interferometry used for measurement of out-of-plane displacement field

A new digital speckle pattern interferometry, called volume-grating phase-shifting digital speckle pattern interferometry, is discussed in this paper. The out-of-plane displacement field of a bent plate can be quantitatively measured using volume-grating phase-shifting digital speckle pattern interferometry proposed in this paper. Theoretical and experimental results, as well as absolute errors, are given.     

载波相移云纹干涉法研究

通过对载波技术研究,提出载波相移云纹干涉法,采用该方法可以实现云纹干涉条纹信息的自动识别,给出了灵敏度和载波频率的定量关系式;同时,对载波数字相移云纹干涉法测试的精度进行了系统分析。     

Parallel two-step phase-shifting microscopic interferometry based on a cube beamsplitter

Parallel two-step phase-shifting interferometry for microscopy is presented, and the recording condition for generalized two-step phase-shifting interferometry is discussed. A 45° tilted cube beamsplitter enables to replicate the orthogonally linear polarized object and reference waves into two parallel beams, respectively. As a consequence, two interferograms with quadrature phase shift are obtained along the two beams, and phase reconstructed with an improved algorithm. To reconstruct the phase distribution from the two-step phase-shifting interferograms, a certain recording condition should be satisfied. However, the recording condition has not ever been discussed before. In this paper, the recording condition for the two-step phase-shifting interferometry is derived and that is: the intensity of reference wave should be no less than two times object wave intensity.     

Four-step spatial phase-shifting shearing interferometry from moiré configuration by triple gratings

A spatial phase-shifting shearing interferometry is presented in this paper. The whole optical configuration is simple and consists of three Ronchi gratings. Four phase-shifted shearing interferograms can be obtained simultaneously. The explicit intensity distributions of shearing interferograms are given and a corresponding four-step spatial phase-shifting algorithm is proposed to extract phase information from the new interferometry. This spatial phase-shifting configuration is applied to extract phase projection of a propane flame and a mathematical error analysis is presented.     

基于菌紫质薄膜的相移器及其应用

设计了一种基于菌紫质光致各向异性的相移器,并把它用于相移干涉计量。取向随机分布的极性菌紫质分子对线偏振诱导光的选择性吸收导致分子取向分布不均匀,使其呈现宏观的各向异性,这种各向异性与诱导光的偏振特性密切相关,圆偏振光经过各向异性的菌紫质薄膜后,出射光的偏振特性完全由偏振诱导光决定。基于上述原理设计了一种新型的相移器,用琼斯矩阵法推导了基于相移器的相移干涉原理。该相移器在工作过程中不需要移动Mach-Zender干涉仪内部的任何器件,仅需要改变外部控制光路中诱导光的偏振取向就可以控制参考光的相位,有助于提高设备的抗振能力。用最小二乘法对相移干涉结果进行重建,得到了和实际相位一致的结果,验证了相移器的可行性。     

Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference

Conventional multi-wavelength phase-shifting interferometry utilizes two or three monochromatic light sources, such as lasers, to realize the measurement of the surface topography with large discontinuity. In this paper, the white light source, with a single-chip CCD color camera, is used to accomplish multi-wavelength phase-shifting interferometry. In addition, we propose an algorithm which combines white light phase-shifting algorithm, equivalent wavelength method and fringe order method to achieve measuring and calibrating the micro-structures ranging from nanometer scale to micrometer scale. Finally, the proposed method is validated by a traceable step height standard.     

An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

Spatial-carrier phase-shifting digital holography utilizing spatial frequency analysis for the correction of the phase-shift error

We propose a single-shot digital holography in which the complex amplitude distribution is obtained by spatial-carrier phase-shifting (SCPS) interferometry and the correction of the inherent phase-shift error occurred in this interferometry. The 0th order diffraction wave and the conjugate image are removed by phase-shifting interferometry and Fourier transform technique, respectively. The inherent error is corrected in the spatial frequency domain. The proposed technique does not require an iteration process to remove the unwanted images and has an advantage in the field of view in comparison to a conventional SCPS technique.     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.