Optical Defect in GaN-Based Laser Diodes Detected by Cathodoluminescence

GaN-based laser diodes （LDs） with 399 nm wavelength are grown on sapphire substrates by metal organic chemical vapour deposition （MOCVD）. Electroluminescence spectra of the fabricated LDs show that the LDs from some grown wafers failed to emit laser. The SEM and XRD results show the similar surface morphology and interface qualities of multi quantum wells （MQWs） and super-lattices between LDs that succeed and fail to emit laser. However, the cathodoluminescence （CL） measurements reveal a kind of optical defect rather than structural defect in un-emitted LDs. Further depth-dependent CL imaging observation indicates that such optical defects originate from the MQWs to the surface of LDs as a non-irradiative recombination centre that should cause the failure of laser emitting of LDs.     

GaN基激光器多量子阱垒材料的研究

在(0001)蓝宝石衬底上分别用金属有机化学气相沉积技术外延生长了InGaN/GaN, InGaN/InGaN, InGaN/AlInGaN多量子阱激光器结构, 并分别制作了脊形波导GaN基激光器。同步辐射X射线衍射,电注入受激发射光谱测试及光功率-电流(L-I)测试证明,相对于GaN垒材料,InGaN垒材料,AlInGaN四元合金垒材料更能改善多量子阱的晶体质量,提高量子阱的量子效率及降低激光器阈值电流。相关的机制为：组分调节合适的四元合金垒层中Al的掺入使得量子阱势垒高度增加,阱区收集载流子的能力增强;In的掺入能更多地补偿应力,减少了由于缺陷和位错所产生的非辐射复合中心密度;In的掺入还减小了量子阱中应力引致的压电场,电子空穴波函数空间交叠得以加强,使得辐射复合增加。     

Flip-Chip GaN-Based Light-Emitting Diodes with Mesh-Contact Electrodes

GaN-based light-emitting diodes （LEDs） with mesh-contact electrodes have been developed. The p-type ohmic contact layer is composed of oxidized Ni/Au mesh and NiO overlay （20A）. An Ag （3000A） omni-directional reflector covers the p-type contact. The n-type contact is a Ti/AI planar film with a 10-μm-width Ti/AI stripe. The Ti/AI stripe surrounds the centre of LED mesa. With a 20-mA current injection, the light output power of GaN-based LEDs with mesh-contact electrodes is 23% higher than that of the conventional LEDs.     

High-Voltage AlGaN/GaN-Based Lateral Schottky Barrier Diodes

Lateral Schottky barrier diodes （SBDs） on A1GaN/GaN heterojunctions are fabricated and studied. The characteristics of the fabricated SBDs with different Schottky contact diameters and different Schottky-Ohmic contact spacings are investigated. The breakdown voltage can be increased by either increasing the Schottky-Ohmie con- tact spacing or increasing the Schottky contact diameter. However, the specific on-resistance is increased at the same time. A high breakdown voltage of 1400 V and low reverse leakage current below 20nA are achieved by the device with a Schottky contact diameter of 100 μm and a contact spacing of 40 μm, yielding a high V^2BR/ RoN,sp value of 194 MW.cm^-2.     

Fabrication and Optical Characterization of GaN-Based Nanopillar Light Emitting Diodes

InGaN/GaN-multiple-quantum-well-based light emitting diode (LED) nanopillar arrays with a diameter of approximately 200nm and a height of 700nm are fabricated by inductively coupled plasma etching using Ni self-assembled nanodots as etching mask. In comparison to the as-grown LED sample an enhancement by a factor of four of photoluminescence (PL) intensity is achieved after the fabrication of nanopillars, and a blue shift and a decrease of full width at half maximum of the PL peak are observed. The method of additional wet etching with different chemical solutions is used to remove the etch-induced damage. The result shows that the dilute HCl (HCl:H₂O=1:1) treatment is the most effective. The PL intensity of nanopillar LEDs after such a treatment is about 3.5 times stronger than that before treatment.     

InGaN基发光二极管和激光二极管

在InGaN发光二极管中,尽管存在着大量的位错,但其效率还是相当高的.用InGaN作为有源层是很重要的.在InGaN基LED的情况下,为产生光发射需要较高的激发功率.横向大面积外延生长的GaN激光二极管(LDs)是在厚的GaN衬底上外延制备成的.在温度250℃、30mW输出的连续工作状态下,其工作电流小于42mA,600℃、30mW输出的连续工作状态下的寿命约为15 000小时.这些结果表明,螺旋位错密度的降低延长了激光二极管的寿命.此外,良好的散热也是很重要的.     

GaN-Based Thin Film Vertical Structure Light Emitting Diodes Fabricated by a Modified Laser Lift-off Process and Transferred to Cu

GaN-based thin film vertical structure light-emitting diodes （VS-LEDs） were fabricated by a modified YAG laser lift-off （LLO） process and transferred to Cu substrates. With a comparison of the electrical and optical properties of conventional LEDs on sapphire substrates and of lateral structure thin film LEDs by a KrF LLO process, the vertical structure of LLO LEDs shows obvious superiority. LLO VSLEDs made by modified YAG LLO process show less increase of leakage current than the devices made by conventional/（rE LLO process. Furthermore, owing to the well current spreading and less current path, the ideality factors and series resistance of vertical structure LEDs reduce greatly and the efficiency increases more obviously than the lateral structure LEDs, which is dso reflected on the relative L - I curves. The output power of vertical structure LEDs is over 3 times greater than that of the lateral structure LLO LEDs within 300mA.     

金属氟化物对聚合物发光二极管发光性能的提高

在以聚合物发光材料MEH-PPV为发光层的聚合物发光二极管(PLEDs)的金属阴极与聚合物发光层之间插入一层绝缘的金属氟化物,发光器件的发光性能有所提高,而且绝缘层的厚度会影响器件性能提高的最终效果。特别是具有LiF／Al的双层电极的发光器件,其发光特性与工作性能优良,但稳定性较差的Ba(Ca)／Al电极结构器件的发光特性具有可比性。初步分析表明绝缘层的插入造成了发光聚合物层与金属电极界面的能带发生弯曲,降低了发光器件中少数载流子电子的注入势垒,提高了发光器件中少数载流子电子的注入效率。从而最终导致了发光器件的开启电压、发光强度、外量子效率及电流效率等发光性能指标的显著提高。     

绝缘层LiF/Al电极对提高P-PPV发光器件发光性能的研究

为了提高聚合物电致发光器件中Ba（Ca）／Al阴极的稳定性,在该阴极与聚合物发光材料poly（2-（4-ethylexyl）phenyl-1,4-phenylene vinylene）（P-PPV）层之间插入一层7nm的LiF绝缘层,发光器件的发光性能在多项参数（发光器件的电压．电流特性、发光强度及外量子效率,以及电流效率等发光性能指标）上能够与工作性能优良但稳定性较差的Ba（Ca）／Al电极结构PLEDs器件的发光特性具有可比性。这对于研制高效率、高稳定的聚合物电致发光器件并最终将其用于商业目的,具有重大现实意义。     

Effect of Green Quantum Well Number on Properties of Green GaN-Based Light-Emitting Diodes

In GaN-based green light-emitting diodes(LEDs) with different green quantum well numbers grown on Si(111)substrates by metal organic chemical vapor deposition are investigated. It is observed that V-shaped pits appear in the AFM images with the green quantum well number increasing from 5 to 9, and results in larger reverse-bias leakage current. Meanwhile, in the case of the sample with the number from 5 to 7 then to 9, the external quantum efficiency increases firstly, and then decreases. These phenomena may be related to the size of V-shaped pits in the active area and the distribution of electrons and holes in the active area caused by V-shaped pits. The optimal number of green quantum wells is determined to be 7.     

大功率半导体激光器的可靠性研究

对InGaAs/AlGaAs和InGaAsP/GaAs有源区含铝的915nm和无铝的808nm腔面镀膜及未镀膜的大功率半导体激光器进行了老化实验。在老化前通过综合参数测试仪测试两种激光器的斜率效率、阈值电流，发现有腔面膜的激光器比无腔面膜的激光器的阈值电流降低25％以上。在1.2倍阈值电流下，恒流老化40h左右，老化后再分别测试它们的阈值电流、功率参数，我们发现在老化后未镀膜的激光器的阈值电流和镀有腔面膜的激光器相比增加25mA以上，输出功率也比镀过腔面膜的减小到了原来的1／2，可见腔面保护对于延长激光器的寿命是很重要的。     

激光二极管泵浦的高重复频率Nd：YAG激光器

报道两个１．５Ｗ连续激光二极管端面泵浦的声光调ＱＮｄ：ＹＡＧ激光器，输出激光脉冲的最高重复频率为３０ｋＨｚ重复频率１ｋＨｚ时，最窄脉宽为１２ｎｓ，最高峰值功率为１２．１ｋＷ。     

用ZCTC晶体倍频半导体激光的紫光输出

报道了新型金属络合物非线性光学材料ZCTC（硫氰硫锌镉）晶体的光学性质。测量了ZCTC晶体的折射率,计算了其相位匹配角度。进行了半导体激光（LD）室温下直接倍频实验。当808nm基频GaAlAs半导体激光功率为473mW时,获得了390μW、4040μnm紫光输出。实验表明ZCTC晶体是一种优良的半导体激光倍频紫外非线性光学材料。     

CBP有机薄膜对MEH-PPV聚合物发光二极管性能的影响

以聚合物发光材料MEH-PPV为发光层的聚合物发光二极管的ITO阳极与发光层之间,加入一层溶解于氯仿中的有机小分子CBP,能显著改善发光器件的电流特性。在电压较低的时候能提高电流,在电压较高的时候能抑制电流,从而增加工作电压范围。此外,器件的电流效率也能得到显著的提高。实验结果表明,加入CBP层后,在低电压时,CBP层能够减缓空穴注入到发光层中,将其限制在CBP层,从而在器件中形成一个内电场,有助于电子的传输,降低开启电压,提高发光亮度。在电压较高时,CBP作为电子阻挡层,能阻挡电子漏泄到阳极,从而使在复合区的空穴与少数载流子电子的复合效率提高,改善器件的性能。     

Characteristics of Gain-Guided Laser Diodes with Cylindrical-Mirror Cavity

We have developed highly reliable etched-mirror laser diodes using a dry etching method. The lasers without facet-coating have been operating stably over 2500 h under automatic-power control (APC) at a power of 3 mW/facet at 50°C. The gain-guided laser diodes with a cylindrical-mirror cavity (CMC) have coaxial mirrors and a fan-shaped stripe structure. By decreasing the curvature radius of the inner facet or increasing the stripe width of the inner facet, the beam waist parallel to the junction plane can be moved outside of the laser diode, while the beam waist perpendicular to the junction plane stops at the mirror facet. A particular CMC laser has a low astigmatism of 4.1 μm and a low relative intensity of noise (RIN) less than –134 dB/Hz at 4 mW under 0–1% optical feedback without high frequency current superposition.     

领结型纳米银金属阵列对氮化镓基发光二极管光提取效率的影响

为了提升氮化镓(GaN)基发光二极管(Light Emitting Diode,LED)的发光效率,设计工艺简单且成本低廉的领结型纳米银金属阵列,并将该结构集成于GaN基发光二极管的表面,在不破坏外延结构的情况下通过激发局域表面等离激元效应有针对性地提升不同波段发光二极管的光提取效率.利用时域有限差分法系统地模拟计算不同尺寸的领结型纳米银金属阵列在不同入射波长下对GaN基发光二极管光提取效率的影响,并通过实验进行验证.结果 表明,在中心波长分别为370,425,525 nm的LED的表面集成最优尺寸的领结型纳米银金属阵列,其光致发光峰强度相比于无表面结构的LED分别提升71.1％、148.2％和105.9％.     

Analysis of the Characteristics of Laser and Superluminescent Diodes

It is shown that superluminescent diodes rank below laser diodes in energy characteristics, but they have a wider emission spectrum and lower noise level. The amplitude-frequency and noise characteristics of the laser diode correlate with each other, whereas there is no such correlation for the superluminescent diode. The photon density distribution along the active area is more homogeneous for the laser diode than for the superluminescent one. Presented at the 5th International Scientific-Technical Conference “Quantum Electronics,” November 22–25, 2004, Minsk, Belarus. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 72, No. 5, pp. 689–693. September–October, 2005.