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1.
介绍了现阶段两种用于聚焦离子束系统的离子源——液态金属离子源和气体场发射离子源的基本原理, 并对比了它们的优缺点。由于目前这两种离子源都难以满足纳米加工领域不断提高的技术要求, 因此提出了一种用于聚焦离子束的新型离子源——电子束离子源, 并介绍了电子束离子源的基本原理, 给出了设计参数、 模拟结果(20 kV的Ar+离子束, 发射度约为5.8×10-5·mm·mrad, 束斑约为1 μm)和初步的实验结果。 There are two kinds of ion sources, Liquid Metal Ion Source and Gas Field Ion Source, used to provide ion beams for the Focus Ion Beam system. The working mechanism of the two kinds of sources is presented and their advantages and disadvantages are summarized. With the rapid development in the nano technology, the requirements are hardly met with these two kinds of ion sources. Therefore, a new kind of ion source, electron beam ion source, is developed for the Focus Ion Beam system. The basic principle of the electron beam ion source is introduced and the design parameters, the result of the simulation (20 kV Ar+, extracted emittance is 5.8×10-5π·mm·mrad, raduis of the ion beam about 1 μm.) and the primary experimental results are presented  相似文献   

2.
We present here a self consistent theory of small amplitude double layers associated with electrostatic ion cyclotron waves in a plasma containing hot electrons, cold ions and traversed by an ion beam. It has been shown that compressive type of double layers solution exists when θb (beam temperature) < αb (beam concentration) < 1.  相似文献   

3.
The power balance in the inductive discharge of a radio-frequency ion source is worked out by calculating the power losses caused by plasma deposition on the surfaces bordering it, by the power consumed for positive-ion generation and pre-acceleration, by eddy currents, and by propellant-atom excitation. The relationship between the minimal consumption of high-frequency power per unit of ion current of the thruster and electron temperature and geometric parameters of the gas-discharge chamber is presented.  相似文献   

4.
5.
Ion implantation     
Some developments in applications of Mössbauer spectroscopy to investigate ion-implanted radioactive source isotopes in solids are presented. Emphasis is layed on impurity and defect studies in metals and semiconductors. The particular role of Mössbauer spectroscopy in comparison to and in combination with other analytical techniques is illustrated. Recently developed on-line implantation techniques are described, their merits and prospects are discussed.  相似文献   

6.
Ion implantation     
The extreme sensitivity of Mössbauer Spectroscopy to the local atomic and electronic configuration around ion implanted Mössbauer probes is demonstrated in a number of recent defect configuration studies in semiconductors and metals. A surge of interest is observed towards Mössbauer studies on high dose implantations connected with materials research: recent studies are reviewed dealing with ion beam synthesis, ion beam modification and ion beam mixing of materials.  相似文献   

7.
8.
冀炜邦  成华东  刘亮 《光学学报》2012,32(10):1027002-271
研究了和平面刻槽离子阱中的电压热涨落噪声引起的离子加热和离子加热的直接计算模型,给出了离子加热的加热尺度,并利用有限元分析方法计算了当刻槽宽度和射频电极宽度比例α发生变化时加热尺度的变化。同时,还利用涨落耗散原理计算了控制电极的阻抗热涨落对离子产生的加热效应,并给出了x和y方向电场涨落的谱密度表达式,通过计算给出了较好的α值。  相似文献   

9.
A small and inexpensive electron beam ion source for multiply charged ions of noble gases is described. One of its essential characteristics is the low energy spread of the extracted ion beam, which depends on the charge state q of the ions and amounts to ∽q × 50 meV. The total ion current containing ionic states up to q = 6 is in the order of 10 nA. The design, construction and important parameters of the ion source are described.  相似文献   

10.
A particle-in-cell simulation is developed to study dc plasma immersion ion implantation. Particular attention is paid to the influence of the voltage applied to the target on the ion path, and the ion flux distribution on the target surface. It is found that the potential near the aperture within the plasma region is not the plasma potential, and is impacted by the voltage applied to the implanted target. A curved equipotential contour expands into the plasma region through the aperture and the extent of the expansion depends on the voltage. Ions accelerated by the electric field in the sheath form a beam shape and a flux distribution on the target surface, which are strongly dependent on the applied voltage. The results of the simulations demonstrate the formation mechanism of the grid-shadow effect, which is in agreement with the result observed experimentally.  相似文献   

11.
The influence of finite ion temperature on the properties of strongly non-linear ion acoustic solitary waves is discussed within the framework in Sakanaka's ion fluid model.  相似文献   

12.
利用最新自行研制的电扫描发射度探测系统, 在ECR离子源上进行了一系列关于ECR离子源引出束流发射度的研究. 这套电扫描发射度探测系统安装在中国科学院近代物理研究所(兰州)的LECR3试验平台的束运线上. 试验中, 通过测量相关参数, 研究了磁场、微波、掺气效应及负偏压效应等对引出束流发射度的影响. 利用实验所得的结果与关于ECR等离子体和离子源束流发射度的半经验理论, 分析推导了离子源各可调参数与ECR等离子体的直接关系, 这为分析探索ECR离子源的工作机制提供了一定的参考依据.  相似文献   

13.
本文评述激光离子源的基本原理、主要性能、研究方案和近年来的发展,以及在寻找与研究新核素中的应用. The basic principles, important characteristics, developing plans and recent developments as well as applications in finding new nuclide on laser ion source were reviewed in this poper.  相似文献   

14.
After the successful exploitation of electron cooling in several heavy ion storage rings the possibility of generating crystalline ion beams gained the interest of particle accelerator physicists. New cooling methods, such as laser cooling, give further opportunity to reach ultra cold system of particles necessary for the state transition to the crystalline configuration. Crystalline beams will give insight into a completely new research field, reaching higher standards in precision measurements and techniques. The applicative potentialities of crystalline beams justify a careful investigation on this subject. The conceptual design of a low-energy heavy-ion storage ring, called CRYSTAL, proposed for the experimental demonstration of crystalline beams at Legnaro LNL is presented. This revised version was published online in August 2006 with corrections to the Cover Date.  相似文献   

15.
碘、碘离子和碘三离子的紫外吸收光谱   总被引:3,自引:1,他引:2  
研究了碘I2、碘离子I- 和碘三离子I-3 水溶液的紫外吸收光谱,测定了三种型体的摩尔吸光系数。I2水溶液在203 nm呈现一吸收峰,摩尔吸光系数为1.96×104 L·mol-1·cm-1;I- 水溶液在193和226 nm呈现双吸收峰,摩尔吸光系数分别为1.42×104和1.34×104 L·mol-1·cm-1;当I2水溶液与KI溶液混合时,在288和350 nm出现两个吸收峰,表明I-3的形成。利用饱和法测得I-3在288和350 nm处的摩尔吸光系数分别为3.52×104和2.32×104 L·mol-1·cm-1。  相似文献   

16.
为满足国家大科学工程兰州重离子冷却储存环的要求,在14.5GHz ECR 离子源上进行afterglow工作模式的实验,首次产生了高电荷态脉冲束流Ar11+和Ar12+,给出了初步实验结果,并对结果进行了分析和解释.  相似文献   

17.
HIMM是国产自主研发的医用加速器装置,作为目前最大的医学放疗装置,整个加速器控制系统的稳定性和可靠性要比工业系统有更高的要求。离子源针阀是离子源产生束流的重要组件,气体流量的大小和混合比直接影响源体真空度、电离效率、离子源稳定性等。本文针对HIMM离子源进气系统设计了基于三菱伺服电机和菲尼克斯PLC的控制系统,从系统结构、硬件设计、软件设计、数据分析等方面进行了介绍。为保证系统稳定性,加入伺服驱动器与相关真空度的硬连锁和远程开关功能。经过实际测试,该系统运行稳定,定位精度可达0.1?,满足设计要求。  相似文献   

18.
Ion mobilities of silver, cobalt, zinc, gadolinium and europium and their complexonates with NTA, EDTA and DTPA are determined. It is shown that – contrary to the published data the ion mobility of complexonates does not depend on the mobility of the central cation; – complexonates with equal charges show similar mobilities, the deviation being not more than 15% of the average value; – a tendency for the ion mobility to decrease with increasing molecular weight of the complexonate is observed.  相似文献   

19.
离子束修形技术   总被引:3,自引:1,他引:2       下载免费PDF全文
 离子束修形技术具有精度高、确定性好等优点,应用越来越广泛。介绍了离子束修形技术的原理和特点,以及国外离子束修形技术的发展历程和现状,并介绍了国内离子束修形技术的发展现状。针对当前离子束修形技术的研究热点,如中高频误差控制技术、驻留时间求解算法和加工工艺等方面,综述了国内外的研究现状。  相似文献   

20.
The pressure dependence of the radial distribution of water oxygen atoms around Rb+ and Br- ions in a diluted RbBr aqueous solution has been investigated by means of x-ray absorption spectroscopy at the Br and Rb K edges up to 2.8 GPa, using a large-volume high-pressure setup developed at a third generation synchrotron radiation facility. Dramatic effects in the anion hydration structure, in particular, are observed, indicating that upon increasing pressure water undergoes a structural transformation which involves considerable molecular reorientation.  相似文献   

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