Influence of the substrate temperature during deposition on film characteristics of copper phthalocyanine and field-effect transistor properties

In this paper, we employ different substrate temperatures during the deposition process and observe a highly ordered structure and strong orientation of copper phthalocyanine (CuPc) molecules on Si/SiO₂ by using X-ray-diffraction and transmission electron microscopy analysis. The results show the effect of CuPc morphology at different substrate temperatures on the organic field-effect-transistor performance. When the substrate temperature for deposition of CuPc is 120 °C, a mobility of 3.75×10^-3 cm²/V s can be obtained. PACS 73.61.Ph; 85.30.Tv; 78.66.Tr     

Light-emitting field-effect transistor based on a tetracene thin film

We report the first organic light-emitting field-effect transistor. The device structure comprises interdigitated gold source and drain electrodes on a Si/SiO(2) substrate. A polycrystalline tetracene thin film is vacuum sublimated on the substrate forming the active layer of the device. Both holes and electrons are injected from the gold contacts into this layer leading to electroluminescence from the tetracene. The output characteristics, transfer characteristics, and the optical emission properties of the device are reported. A possible mechanism for electron injection is suggested.     

InGaZnO薄膜晶体管泄漏电流模型

研究了非晶氧化锌镓铟薄膜晶体管(amorphous InGaZnO thin-film transistor,InGaZnO TFT)的泄漏电流模型.基于Poole-Frenkel热发射效应和热离子场致发射效应的泄漏电流产生机制,分别得到了高电场和低电场条件下的载流子产生-复合率.在此基础上推导得到了InGaZnO TFT的分段式泄漏电流-电压数学模型,并利用平滑函数得到了关断区和亚阈区连续统一的泄漏电流模型.所提出的泄漏电流模型的计算值和TCAD模拟值与实验结果较为吻合.利用所提出的InGaZnO TFT泄漏电流模型和TCAD模拟,讨论了InGaZnO TFT不同的沟道宽度、沟道长度和栅介质层厚度对泄漏电流值的影响.研究结果对InGaZnO TFT集成传感电路的设计具有一定参考价值.     

Influence of white light illumination on the performance of a-IGZO thin film transistor under positive gate-bias stress

The influence of white light illumination on the stability of an amorphous In GaZnO thin film transistor is investigated in this work. Under prolonged positive gate bias stress, the device illuminated by white light exhibits smaller positive threshold voltage shift than the device stressed under dark. There are simultaneous degradations of field-effect mobility for both stressed devices, which follows a similar trend to that of the threshold voltage shift. The reduced threshold voltage shift under illumination is explained by a competition between bias-induced interface carrier trapping effect and photon-induced carrier detrapping effect. It is further found that white light illumination could even excite and release trapped carriers originally exiting at the device interface before positive gate bias stress, so that the threshold voltage could recover to an even lower value than that in an equilibrium state. The effect of photo-excitation of oxygen vacancies within the a-IGZO film is also discussed.     

Properties of transistor based C60 thin film on polystyrene

This paper reports that the n-type organic thin-fihn transistors have been fabricated by using C60 as the active layer and polystyrene as the dielectric. The properties of insulator and the growth characteristic of C60 film were carefully investigated. By choosing different source/drain electrodes, a device with good performance can be obtained. The highest electron field effect mobility about 1.15 cm2/（V. s） could reach when Barium was introduced as electrodes. Moreover, the C60 transistor shows a negligible ＇hysteresis effect＇ contributed to the hydroxyl-free of insulator. The result suggests that polymer dielectrics are promising in applications among n-type organic transistors.     

Room-temperature flexible thin film transistor with high mobility

We report a room-temperature and high-mobility InGaZnO thin-film transistor on flexible substrate. To gain both high gate capacitance and low leakage current, we adopt stacked dielectric of Y₂O₃/TiO₂/Y₂O₃. This flexible IGZO TFT shows a low threshold voltage of 0.45 V, a small sub-threshold swing of 0.16 V/decade and very high field-effect mobility of 40 cm²/V. Such good performance is mainly contributed by improved gate stack structure and thickness modulation of IGZO channel that reduce the interface trap density without apparent mobility degradation.     

Reduction of the contact resistance in copper phthalocyanine thin film transistor with UV/ozone treated Au electrodes

Bottom-contact (BC) copper phthalocyanine (CuPc) thin film transistor with UV/ozone treated Au as a source/drain electrode was fabricated and the contact resistance was estimated from the transmission line method (TLM). Comparing the properties of OTFT with untreated Au electrode, the performance of the BC CuPc-TFT with the UV/ozone treated Au electrodes was significantly improved: saturation mobility increased from 4.69 × 10⁻³ to 2.37 × 10⁻² cm²/V s, threshold voltage reduced from −29.1 to −6.4 V, and threshold swing varied from 5.08 to 2.25 V/decade. The contact resistance of the device with UV/ozone treated Au electrodes was nearly 20 times smaller than that of the device with untreated Au electrodes at the gate voltage of −20 V. This result indicated that using the UV/ozone treated Au electrode is an effective method to reduce the contact resistance. The present BC configuration with UV/ozone treated Au electrodes could be a significant step towards the commercialization of OTFT technology.     

Influence of film morphology on thin film ferromagnetism

Cobalt, nickel and their alloy, Co₁Ni₉, films were epitaxially grown on Cu(100) under different growth conditions and subsequent treatments and studied using surface magneto-optic Kerr effect (SMOKE) in an attempt to understand the effects of film morphology on the magnetic properties. CO contamination can significantly reduce the magnetization and Curie temperature. Thermal desorption spectroscopy (TDS) shows that CO desorbs at 422 K from Ni and 410 K from Co₁Ni₉ at a heating rate of 6 K per minute. Annealing the films below 450 K produces smooth and clean films with stable magnetic behavior. However, annealing at higher temperatures results in Cu segregation and island formation leading to the finite-size ferromagnetic or even superparamagnetic behavior.     

温度变化对金属Ag膜反射镜偏振特性的影响研究

空间遥感应用中的光学有效载荷对系统偏振控制提出了越来越高的要求,作为常用的宽光谱反射镜,金属银(Ag)膜反射镜的偏振特性随着环境温度的改变而变化。本文设计并制备了低偏振灵敏度的Ag膜反射镜,研究了反射镜在45°和60°入射角下,从室温25℃升温到150℃时的偏振特性变化和反射光谱变化情况。随着温度的升高,Ag膜的折射率在350~1 200 nm波长范围内有所增加;Ag膜反射镜的反射光中s和p光的相位差Δ在350~600 nm波长范围内减小,在600~650 nm波长范围内基本稳定,在650~1 200 nm波长范围内增大。温度上升到125℃时,Ag膜和反射镜表面形貌发生改变,增加了表面散射和吸收,导致350~900 nm波段反射率降低,在波长350 nm附近的降低约25%。     

氢化非晶硅薄膜晶体管的低频噪声特性

针对氢化非晶硅薄膜晶体管(hydrogenated amorphous silicon thin film transistor,a-Si:H TFT)的低频噪声特性展开实验研究.由测量结果可知,a-Si:H TFT的低频噪声特性遵循1/f~γ(f为频率,γ≈0.92)的变化规律,主要受迁移率随机涨落效应的影响.基于与迁移率涨落相关的载流子数随机涨落模型(?N-?μ模型),在考虑源漏接触电阻、局域态俘获及释放载流子效应等情况时,对器件低频噪声特性随沟道电流的变化进行分析与拟合.基于a-Si:H TFT的亚阈区电流-电压特性提取器件表面能带弯曲量与栅源电压之间的关系,通过沟道电流噪声功率谱密度提取a-Si:H TFT有源层内局域态密度及其分布.实验结果表明:局域态在禁带内随能量呈e指数变化,两种缺陷态在导带底密度分别约为6.31×10~(18)和1.26×10~(18)cm~(-3)·eV~(-1),特征温度分别约为192和290 K,这符合非晶硅层内带尾态密度及其分布特征.最后提取器件的平均Hooge因子,为评价非晶硅材料及其稳定性提供参考.     

Influence of high energy electron irradiation on the characteristics of polysilicon thin film transistors

The influence of high energy electron (23 MeV) irradiation on the electrical characteristics of p-channel polysilicon thin film transistors (PSTFTs) was studied. The channel 220 nm thick LPCVD (low pressure chemical vapor deposition) deposited polysilicon layer was phosphorus doped by ion implantation. A 45 nm thick, thermally grown, SiO2 layer served as gate dielectric. A self-alignment technology for boron doping of the source and drain regions was used. 200 nm thick polysilicon film was deposited as a gate electrode. The obtained p-channel PSTFTs were irradiated with different high energy electron doses. Leakage currents through the gate oxide and transfer characteristics of the transistors were measured. A software model describing the field enhancement and the non-uniform current distribution at textured polysilicon/oxide interface was developed. In order to assess the irradiation-stimulated changes of gate oxide parameters the gate oxide tunneling conduction and transistor characteristics were studied. At MeV dose of 6×10¹³ el/cm², a negligible degradation of the transistor properties was found. A significant deterioration of the electrical properties of PSTFTs at MeV irradiation dose of 3×10¹⁴ el/cm² was observed.     

Technology demonstration of a novel poly-Si nanowire thin film transistor

A simple process flow method for the fabrication of poly-Si nanowire thin film transistors(NW-TFTs) without advanced lithographic tools is introduced in this paper.The cross section of the nanowire channel was manipulated to have a parallelogram shape by combining a two-step etching process and a spacer formation technique.The electrical and temperature characteristics of the developed NW-TFTs are measured in detail and compared with those of conventional planar TFTs(used as a control).The as-demonstrated NW-TFT exhibits a small subthreshold swing(191 mV/dec),a high ON/OFF ratio(8.5 × 10~7),alow threshold voltage(1.12 V),a decreased OFF-state current,and a low drain-induced-barrier lowering value(70.11 mV/V).The effective trap densities both at the interface and grain boundaries are also significantly reduced in the NW-TFT.The results show that all improvements of the NW-TFT originate from the enhanced gate controllability of the multi-gate over the channel.     

Reflection characteristics of a copper metal-organic chemical-vapor-deposited thin film for vertical micromirror applications

We introduce Cu metal-organic chemical-vapor deposition as a potential means of conformal metal coating of the sidewalls of micromachined vertical mirrors. The optimal process temperature was experimentally found to be 215 degrees C, which gives high step coverage of better than 90%, and the surface roughness was less than 27 nm. The roughness, measured with an atomic force microscope, will induce a scattering loss less than 0.12 dB, which is small enough for vertical micromirror application. The experimental reflectances of Cu thin film were measured with a distributed-feedback laser (1550 nm) and found to be greater than 0.9 for incidence angles of 22.5 degrees and 45 degrees , and these reflectances were in good agreement with theoretical values.     

Simulation of grain boundary effect on characteristics of ZnO thin film transistor by considering the location and orientation of grain boundary

The grain boundaries (GBs) have a strong effect on the electric properties of ZnO thin film transistors (TFTs). A novel grain boundary model was developed to analyse the effect. The model was characterized with different angles between the orientation of the grain boundary and the channel direction. The potential barriers formed by the grain boundaries increase with the increase of the grain boundary angle, so the degradation of the transistor characteristics increases. When a grain boundary is close to the drain edge, the potential barrier height reduces, so the electric properties were improved.     

Properties of C60 thin film transistor based on polystyrene

This paper reports that the n-type organic thin-film transistors have been fabricated by using C60 as the active layer and polystyrene as the dielectric.The properties of insulator and the growth characteristic of C60 film were carefully investigated.By choosing different source/drain electrodes,a device with good performance can be obtained.The highest electron field effect mobility about 1.15 cm 2 /(V·s) could reach when Barium was introduced as electrodes.Moreover,the C60 transistor shows a negligible 'hysteresis effect' contributed to the hydroxyl-free of insulator.The result suggests that polymer dielectrics are promising in applications among n-type organic transistors.     

Influence of interfactants on thin metal film growth

The growth of Pb on Si(1 1 1) with and without Ag as an interfactant is studied in the temperature range from 270 to 375 K by microscopy and spectroscopy. Whereas Pb grows on the Si(1 1 1)-7×7 surface in the Stranski–Krastanov (SK) mode, the growth mode on the Si(1 1 1)-√3×√3-R30°-Ag surface changes from layer-by-layer below 300 K to SK mode above 300 K. Spectroscopy shows that Ag remains at the interface between the substrate and the growing Pb film. The influence of the interfactant on the growth is attributed to the increase of the island density by an order of magnitude and to the changes of the growth kinetics resulting from this increase.     

Improved thin film transistor performance of solution-processed-zinc-oxide nanorods with spin-on-glass capping layer

Due to the vulnerability of various organic and oxide materials to the atmosphere, a protective layer is often used to improve device performance and stability. In this study, we use a spin-on-glass (SOG) layer to encapsulate a solution-processed-zinc-oxide (ZnO) film. ZnO loses oxygen very easily to the atmosphere and even loses Zn at relatively low temperatures. An SOG capping layer prevents the loss of oxygen without degrading its crystalline properties. We demonstrate the properties of a bottom-gate transistor with a capping layer; it shows improved electrical properties with a mobility of 0.5 cm²/V.s. and stability. Physical characterization reveals that the defect density with a capping layer is much lower than it is without it. A capping layer can also prevent the loss of oxygen at the annealing temperature of 350 °C.     

Chalcogen-based thin film transistor using CuInSe2 photo-active layer

We propose chalcogen-based photo-thin film transistor (P-TFT) using CuInSe₂ (CIS) homo-junction. By using a tri-layer process, we fabricated n- and p-type CIS films. Optical and electrical properties of the fabricated CIS films are measured to be suitable for homo-junction. For the fabrication of a P-TFT, n-type CIS generating higher photo current was used for a channel layer whereas p-type CIS with higher carrier density was used for source and drain. The fabricated transistor exhibited typical transistor operation of p-channel enhancement mode and current increase with light.     

铟锌氧化物薄膜晶体管局域态分布的提取方法

本文针对铟锌氧化物薄膜晶体管(IZO TFT)的低频噪声特性与变频电容-电压特性展开试验研究,基于上述特性对有源层内局域态密度及其在禁带中的分布进行参数提取.首先,基于IZO TFT的亚阈区I-V特性提取器件表面势随栅源电压的变化关系.基于载流子数随机涨落模型,在考虑有源层内缺陷态俘获/释放载流子效应基础上,通过γ因子提取深能态陷阱的特征温度;基于沟道电流噪声功率谱密度及平带电压噪声功率谱密度的测量,提取IZO TFT有源层内局域态密度及其分布.试验结果表明,带尾态缺陷在禁带内随能量呈e指数变化趋势,其导带底密度N1TA约为3.42×10~(20)cm~(-3)·eV-,特征温度TTA约为135 K.随后,将C-V特性与线性区I-V特性相结合,对栅端寄生电阻、漏端寄生电阻、源端寄生电阻进行提取与分离.在考虑有源层内局域态所俘获电荷与自由载流子的情况下,基于变频C-V特性对IZO TFT有源层内局域态分布进行参数提取.试验结果表明,深能态与带尾态在禁带内随能量均呈e指数变化趋势,深能态在导带底密度NDA约为5.4×10~(15)cm~(-3)·eV~(-1),特征温度TDA约为711 K,而带尾态在导带底密度NTA约为1.99×10~(20)cm~(-3)·eV~(-1),特征温度TTA约为183 K.最后,对以上两种局域态提取方法进行对比与分析.     

Anomalous conductivity in PZT thin film deposited on copper substrate electrode

Electrical properties of ferroelectric films are influenced by factors that include methods of synthesis and characteristics of the substrate electrode. Conductivity measurements were performed on PZT (lead zirconate titanate) thin films deposited by sol–gel synthesis on a copper electrode to investigate electric properties and isolate the principal charge carriers. A semiconducting PZT/Cu interface appears during thermal treatment, significantly influencing electric conduction. A power law, describing the transport mechanism across the PZT film, was found empirically.